JP3241097B2 - Plate transfer equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate-like object transfer device for transferring a plate-like lead frame on which, for example, a semiconductor chip is mounted.

[0002]

2. Description of the Related Art For example, in order to manufacture a semiconductor device, a plate-shaped lead frame is sequentially transported to a bonding position.
A semiconductor chip may be mounted on a lead frame at a bonding position. In addition, there is a case where a lead frame on which a semiconductor chip is mounted is transported toward a processing / assembly process. At present, as shown below, an apparatus for transporting lead frames with high precision has been developed.

That is, in this type of transport device,
For example, the separation unit 1 shown in FIG. 10 and the supply unit 2 shown in FIG.
And the transport stage 3 and the guide portions 4 and 5 shown in FIG. 13 or FIG. 14 are appropriately combined.

[0004] Of these, in the separating section 1 of FIG. 10, a plurality of rectangular plate-shaped lead frames 6 are accommodated in a storage section 7.
And are stored in a stacked state. Storage section 7
Have a support plate 8, holding columns 9 and a vertical mechanism 10, and a lead frame 6 is mounted on the support plate 8. And the up-and-down mechanism part 10 raises and lowers the support plate 8,
The height of the topmost lead frame 6 is adjusted.

[0005] An optical sensor 11 is arranged in the vicinity of the storage section 7 and detects the position of the topmost lead frame 6. The vertical mechanism 10 is driven based on the output of the optical sensor 11, and the lead frame 6 is moved.
.., The position of the topmost lead frame 6 is maintained at a constant height.

[0006] The separation unit 1 is provided with a suction head 12, and this suction head 12 is connected to an X-axis drive device 13 and a Z-axis drive device 14. The suction head 12 is displaced in a horizontal direction (X-axis direction) and a vertical direction (Z-axis direction). Then, the suction head 12 suctions the uppermost lead frame 6 among the lead frames 6 in the storage section 7.

That is, the suction head 12 is mounted on the uppermost
The frame 6 is held and separated from the other frames 6 of the storage section 7. And the reels separated and taken out
The do frame 6 is conveyed to the supply unit 2 and supplied to the supply frame.
15 are placed on the table 15.

Here, the lead frames 6 are generally made of a copper plate or the like, and the lead frames 6 have a lead pattern for connecting a semiconductor chip by a method such as etching. Is formed.

Furthermore, in the storage section 7, an interlayer paper (not shown) may be interposed between the lead frames 6. In general, the interlayer paper is alternately stacked with the lead frames 6, and is interposed between the lead frames 6,.
The lead patterns of the lead frames 6 are prevented from overlapping or deforming. The thickness of the interlayer paper is, for example, about 1/10 of the thickness of the lead frame 6.

In the supply section 2 shown in FIG. 12, the supply rails 15, 15 and the guide roller 1 are arranged substantially in parallel with each other.
6 and a feeding unit (not shown) are provided. The supply unit 2 is provided with a stopper 17, which is vertically driven by an actuator 18. Then, the stopper 17 projects upward from between the supply rails 15, 15, and positions the lead frame.

That is, the lead frame 6 is connected to the supply rail 1
5 and 15, the feed portion feeds the lead frame 6, and the guide rollers 16 move the lead frame 6.
Are guided along the supply rails 15,15. Further, the front end of the lead frame 6 comes into contact with the stopper 17, and the lead frame 6 is temporarily stopped at the reference position and positioned. When the positioning of the lead frame 6 is completed, the stopper 15 is lowered and retracted, and the lead frame 6 is retracted.
Is continued.

A transport stage 3 is disposed downstream of the supply unit 2. The guide rails 19, 1
The guide rails 19 are formed with rail grooves 20. Then, the lead frame 6 supplied from the supply unit 2 to the transport stage 3 is provided.
Move along the guide rails 19, 19 while inserting the side edges into the rail grooves 20, 20.

In order to move the lead frame 6 on the transport stage 3, a pilot is provided along the side edge of the lead frame 6, as schematically shown in FIG. Hole 2
1 ... are used. That is, the guide portion 4 having the pilot pin 22 is provided on the transport stage 3, and the pilot pin 22 is moved up and down and before and after the lead frame 6 as shown by arrows A to D in the drawing. Move in the direction.
Then, the pilot pin 22 is inserted into the pilot hole 21 and locked to the lead frame 6, and the lead frame 6
To move it forward.

When there is no pilot hole in the lead frame 6 as shown in FIG. 14, a driving roller 23 for feeding the lead frame 6 and a drive roller 23 for feeding the lead frame 6 are provided. A guide part 5 having a stopper pin 24 arranged at the stop position is used. The guide section 5 rotates the driving roller 24 to feed the lead frame 6, and at the same time, leads the lead frame 6.
The front end of the frame 6 collides with the stopper pin 24, and the lead frame 6 is stopped and positioned. Further, when the lead frame 6 is pitch-fed at regular intervals, the stopper pin 24 moves back and forth and up and down as shown by arrows A to D in the drawing.

[0015]

In the above-described conventional transfer apparatus, the separation unit 1, the supply unit 2, and the guide units 4, 5 have the following disadvantages.

That is, in the separation section 1 shown in FIG. 10, when the separation of the lead frames 6 is insufficient, for example, the two lead frames 6, 6 are sucked by the suction head 12 and the two sheets are sucked. Picking up sometimes occurred. In this case, it is necessary to stop the transport device and the peripheral devices and separate the lead frames 6, 6 one by one. For this reason, taking two sheets of the lead frame 6 has caused a reduction in the operation rate.

When the interlayer paper is sandwiched between the lead frames 6, the interlayer paper is blown off in the longitudinal direction of the apparatus, that is, in the transport direction by a method such as air blow. , Noise, obstruction of cleanliness, and enlargement of the apparatus.

Further, conventionally, as shown in FIG. 11, a stroke E in the X-axis direction of the suction head 12, that is, in the horizontal direction, is used.
Was constant. When the type of the lead frame 6 is changed and the dimensions of the lead frame to be handled are changed, the width of the storage section 7 and the interval between the supply rails 15 are changed.
As shown by the two-dot chain line in the figure, the center position was adjusted before and after the type change. In other words, a double opening mechanism for adjusting the width and the interval while maintaining the center position is required between the storage section 7 and the supply rails 15 and 15. And
The transport device was expensive for that much.

In the supply section 2, the thickness of the lead frame 6 is generally 0.2 mm or less,
Lead frame 6 stops because lead 6 is fragile.
7 when pressed. The reliability of the product may be reduced due to the deformation of the lead frames 6.

Further, since the stopper 17 is used for positioning the lead frame 6, there is a gap between the lead frames 6 on the transport stage 4. The size of the gap was at least about the thickness of the stopper 17. Therefore, the pitch of the semiconductor chips mounted on the lead frames 6 becomes large correspondingly,
The operation rate of the equipment was low.

Since the stopper 17 is used for positioning the lead frame 6, the time required for positioning the lead frame 6,... .. Are pressed by the stopper 17. Therefore, lead frame 6 ...
The time required for positioning was long.

Further, as shown in FIG.
If the pilot holes 21 are provided in the pilot holes 21, the pilot pins 22 are connected to all the pilot holes 21.
A certain gap was required between the pilot holes 21... And the pilot pins 22 in order to insert the pilot holes 21 smoothly. Therefore, in the guide portion 4, the pilot hole 2
Positioning accuracy was limited by the gap between the pilot pins 22 and the positioning accuracy was low.

In order to perform positioning with an accuracy of, for example, about 0.01 mm, a reference pin (not shown) for positioning the lead frames 6... In the case where the reference pins are provided, there is a problem that the apparatus becomes expensive by the amount of the reference pins. Further, when the type of the lead frame 6 is changed, it is necessary to change the position of the reference pin, so that it takes a lot of time to change the type.

On the other hand, when there is no pilot hole in the lead frame 6 as shown in FIG. 14, when the lead frame 6 is transported at a high speed, the lead frame 6 is moved to the stopper pin 24. Was supposed to be hurt by collision. For this reason, this type of guide section 5 cannot be applied to high-speed conveyance. Further, since the lead frame 6 collides with the stopper pin 24 and retreats somewhat, it has been difficult to improve the positioning accuracy. An object of the present invention is to provide a plate-like object transport device having a high operation rate.

[0025]

In order to achieve the above object, an object of the present invention is to provide a plate-like article conveying path.
To the transfer stage and the transfer stage
Things of a supply unit for supplying, the supply unit, the plate-like
A suction head for sucking and holding an object;
And a supply rail arranged side by side with the supply rail.
The material discharge part and the suction by being attached to the
Detection for unnecessary objects held by the landing head
Output sensor and, based on the output of the detection sensor,
The material is any of the unnecessary material discharging section and the supply rail.
Drive the suction head so that it is conveyed toward
And a driving means . According to a second aspect of the present invention, the transfer stage
The plate is supplied to the end of the plate to be supplied.
Is the end of the plate-like object already supplied on the transfer stage.
2. The feeder according to claim 1, wherein the feeder is supplied while pressing the feeder.
In the plate-like object transport device. The invention according to claim 3 is a transport switch.
Tige has a guide part that guides the transport of plate-like objects
At the same time, the plate-like object is sandwiched from the thickness direction of the plate-like object.
To move along the transfer direction of the transfer stage
The plate-like object conveying device according to claim 1 , further comprising a part. In the invention according to claim 4, the plate-like object is a lead.
The plate-like object transport device according to claim 1, wherein the plate-like object transport device is a frame . According to the fifth aspect of the present invention, unnecessary objects are detected.
In the event of damage, the waste
2. An operation for storing in an outlet.
The plate-like object conveying device described in the above. The invention according to claim 6 is plate-shaped.
If objects are stacked with interlayer paper in between, the suction head
Is driven to transport one of the plate-like objects to a supply rail.
After that, one sheet of the interlayer paper is conveyed to an unnecessary material discharge section.
And the detection sensor removes unwanted objects.
When detected, the suction head removes the plate-like object.
It is driven so as to be conveyed to the unnecessary material discharging section.
2. The plate-like object conveying device according to claim 1, wherein

[0026]

[0027]

[0028]

An embodiment of the present invention will be described below with reference to the drawings. The same portions as those described in the section of the related art are denoted by the same reference numerals, and description thereof will be omitted.

FIGS. 1 to 9 show an embodiment of the present invention. In FIG. 1, reference numeral 31 denotes a plate-like object transfer device (hereinafter, referred to as a transfer device). The transport device 31 includes the separation unit 3
2, a supply section 33, a transport stage 34, and a guide section 35 shown in FIG.

The separating section 32 includes a storage section 36 for storing the lead frames 6 as a plurality of plate-like objects in a stacked state, and is movable in the X-axis direction and the Z-axis direction in FIG. And a temporary storage box 37 serving as an unnecessary material discharge unit disposed near the storage unit 36.

The storage portion 36 is provided with the support plate 8 which is horizontally oriented.
And five holding columns 9a to 9e are projected almost directly above. The lead frame 6 is placed on the support plate 8, and four end faces are aligned with both side edges in the longitudinal direction and one end in the longitudinal direction facing the holding columns 9a to 9e. The support plate 8 is supported by an up-down mechanism 10, and the up-down mechanism 10 raises the support plate 8 along holding columns 9a to 9e.
Lower it.

Of the holding columns 9a to 9e, some holding columns 9
d and 9e move in the horizontal direction (X-axis direction). That is,
The storage portion 36 is provided with a opening mechanism (not shown), and the opening mechanism is connected to the holding columns 9d and 9e. Then, the holding columns 9d and 9e slide along the guide holes 8a and 8b opened in the support plate 8 to provide a lead frame.
The distance between the holding columns 9a and 9b opposed in the width direction of the drum 6 is changed. The distance between the holding columns 9d, 9e and 9a, 9b is adjusted by a lead frame handled by the opening mechanism.
The width is adjusted according to the width of The storage section 36
It is also conceivable to provide a mechanism for moving the intermediate holding column 9c in accordance with the length of the lead frame 6.

An optical sensor 11 is disposed near the storage section 36. The optical sensor 11 detects the uppermost one of the stacked lead frames 6.

The suction head 12 is supported by an X-axis driving unit 13 and a Z-axis driving unit 14.
The slider 38 is attached downward at the tip of the slider 38. Z
The axis driving unit 14 is fixed at a fixed position, and the X-axis driving unit 1
Reference numeral 3 is connected to the Z-axis drive unit 14. Z axis drive unit 14
Moves the X-axis drive unit 13 integrally with the slider 39 in the vertical direction, that is, in the Z-axis direction.

The X-axis drive section 13 has an actuator 40 and a transmission section 41.
And the slider 38 are connected via a transmission portion 41.
The driving force of the actuator 40 is transmitted to the slider 38 via the transmission portion 41. Then, the X-axis drive unit 13 moves the slider 38 forward and backward, and displaces the suction head 12 in the horizontal direction, that is, in the X-axis direction.

That is, the suction head 12 is connected to the Z-axis driving unit 14.
, And is moved horizontally by the X-axis drive unit 13. Further, the suction head 12
It stops at an arbitrary position in any direction of the Z axis and the X axis.

Here, an actuator which can be digitally controlled, such as a pulse motor or a servo motor, is employed as the actuator 40, for example. In addition, the transmission unit 41 includes:
A rack and pinion mechanism is employed.

The suction head 12 is connected to a negative pressure source (not shown) via a negative pressure tube 42. further,
The suction head 12 has its lower surface in contact with the uppermost lead frame 6 among the lead frames 6 stacked in the storage section 7, and sucks and holds the lead frame 6.

The temporary storage box 37 is formed in the shape of a rectangular parallelepiped, and has a rectangular opening at the top. Further, the dimensions of the temporary storage box 37 are set slightly larger than the outer diameter of the lead frames 6 so that the lead frames 6 can be stored in a horizontal state. And the temporary storage box 37
The temporary storage box 37 is disposed between the storage section 7 and the Z-axis drive section 14, and the direction of the temporary storage box 37 is substantially the same as the longitudinal direction of the lead frames 6 stored in the storage section 7. It is set to be parallel.

The supply section 33 has two supply rails 15a and 15b as shown in FIG. Supply Ray
The screws 15a and 15b are both formed in the shape of a prism, and are arranged in parallel with each other and horizontally. The heights of the supply rails 15a and 15b are set equally.

Four guide rollers 16a, 16a, 16b, 16b are provided on the supply rails 15a, 15b as a set of two. In each set, the guide rollers 16a and 16b are arranged at the same position in the longitudinal direction of the supply rails 15a and 15b, and further, the distance between them can be freely changed. That is, the lead frame 6 is placed on the supply rails 15a and 15b, and the guide rollers 16a are provided.
16b are in contact with each side edge of the lead frame 6 at two places. The interval between the guide rollers 16a and 16b of each set changes according to the width of the lead frame 6 to be handled. Here, both edges of the lead frame 6 are in contact with the two supply rails 15a and 15b, and the two supply rails 1
5a and 15b.

As shown in FIG. 4, the supply section 33 is provided with a feed section 43, and the feed section 43 is disposed below the supply rails 15a and 15b. Further, the feeding unit 43 is provided with a pulse motor on a support 44 fixed at a fixed position.
A screw 45, a feed screw 46, and a guide shaft 47 are attached. The feed screw 46 is oriented substantially parallel to the supply rails 15 and 15 and is connected to a pulse motor 45. Further, the guide shaft 47 is
6 and are arranged in parallel with each other.

Further, the feeding section 43 is provided with a moving section 48, and the moving section 48 is connected to both the feed screw 46 and the guide shaft 47. The connection between the moving portion 48 and the feed screw 46 is performed using a nut 49 screwed to the feed screw 46. Further, a feeding arm 50 shaped like a band plate is fixed to the moving portion 48.

The feed arm 50 has a lower end connected to the moving part 48 and extends obliquely upward from the moving part 48. Further, the feeding arm 50 is bent at an intermediate position, and the upper end is extended almost directly above. The feed arm 50 has its upper end in contact with the rear end of the lead frame 6 placed on the supply rails 15a and 15b. The contact position between the feed arm 50 and the lead frame 6 is set at an intermediate portion of the lead frame 6 in the width direction.

When the pulse motor 45 rotates the feed screw 46, the moving section 48 moves in accordance with the rotation amount of the feed screw 46, and the feed arm 50 is guided by the guide shaft 47 while being indicated by the arrow F. Is displaced integrally with the moving part 48 as described above. Then, the feed arm 50 is connected to the supply rail 15a,
Pushing the lead frame 6 on the front frame 15b from the rear to the front, the lead frame 6 is guided by the guide rollers 16.
5b.

Here, the moving section 48 (and the feeding arm 5)
0) is stopped by the guide shaft 47. The pulse motor 45 is controlled according to the type of the lead frame 6 to be sent.

The transport stage 34 is arranged at the subsequent stage of the supply section 33, and has guide rails 51, 51 which are continuously arranged with respect to the supply rails 15a, 15b. The guide rails 51 are spaced at uniform intervals over the entire length and face each other in parallel.

The guide rails 51 have rail grooves 52, 52, respectively.
Reference numeral 52 extends substantially horizontally along the longitudinal direction of the guide rails 51,51. The rail grooves 52 face each other and are located at substantially the same height. Further, the width of the rail groove 52 is set to be slightly larger than the thickness of the lead frame 6, and the lead frame 6 sent from the supply section 33 is placed in the rail groove 52. Be inserted into.

As shown in FIGS. 5A and 5B, the laser
At the receiving end 53 of the groove 52, 52, an inclined surface 54 a is provided.
54b are formed. One inclined surface 54a is inclined in the vertical direction, and the other 54b is inclined in the horizontal direction. The opening area of the rail groove 52 at the receiving side end 53 increases as it approaches the end faces 55, 55 of the guide rails 51, 51. Further, as shown in FIG. 5B, the bottom surfaces 56 of the rail grooves 52 at the receiving end 53 are formed flat.

FIGS. 7A to 7C show the guide portion 35.
It is shown. Although only one guide portion 35 is not shown, a plurality of guide portions 35 are provided on the transport stage 34.
The guide portions 35 are arranged along one guide rail 51. Each guide portion 35 is configured in substantially the same manner. Therefore, in this embodiment, only one guide portion 35 will be described, and description of the other guide portions 35 will be omitted. The guide portion 35 includes the holding portion 57 and the linear guide 5.
The guide rail 51 is disposed at a position in the middle of the one guide rail 51 in the longitudinal direction.

As shown in FIGS. 7A and 7B, the holding portion 57 is provided with two plate-like claws 59. These pawls 59, 59 have their plate surfaces in contact with the guide rail 5
1 and 51, along with the lead frame
.. (Only 6a is shown).

Further, the claws 59, 59 are arranged vertically so that their flat edges face each other and are parallel to the plate surface of the lead frame 6a. And the pawls 59, 59 are the first and second two swing arms 6
0, 61 are fixed to the tip.

The swing arms 60 and 61 are arranged vertically, and are arranged substantially on the same straight line. Further, both swing arms 60 and 61 are pivotally supported by an arm holding portion 62,
It pivots up and down around the pivots 63 and 64, respectively. Further, the pivot portions 63 and 64 are arranged substantially on the same straight line.

An engagement groove 65 is formed in the first swing arm 60 disposed in the upper stage, and this engagement groove 65 is cut out in a U-shape and extends vertically. The second swing arm 61 arranged at the lower stage has a cylindrical engagement pin 6.
6 are protruded substantially horizontally, and the engaging pins 66 are inserted into the engaging grooves 65 from below. The diameter of the engaging pin 66 and the width of the engaging groove 65 are, as shown in FIG. 8, slightly different between the outer peripheral surface of the engaging pin 66 and the edge of the engaging groove 65. 67 are formed. The size H of the gap 67 is set to, for example, 0.1 mm or more.

Further, both arms 60 and 61 are connected via a coil spring 68, and both ends of the coil spring 68 are connected to connection pins 69 and 69 projecting from the swing arms 60 and 61, respectively. It is connected. The coil spring 68 has a claw 59,
It is located at a location near 59.

The lower second swing arm 61 is provided with a rotatable cam follower 70, which faces the eccentric cam 71. The cam follower 70 rotates the eccentric cam 71 with the rotation of the eccentric cam 71.
It rotates while being pushed by 1.

The first swing arm 60 has the claw 59 wrapped around the guide rail 51 from above. Further, the second swing arm 61 is inserted into a slide hole 72 formed in the guide rail 51, and makes the claw 59 wrap around the inside of the guide rail 51 from below.

The arm holding portion 62 of the holding portion 57 is connected to the slider 73 of the linear guide 58. The linear guide 58 extends in the longitudinal direction of the transport stage 34, that is, in the transport direction of the lead frame 6a. Next, the operation of the above-described transport device 31 will be described.

First, in the separation section 32 in FIG. 1, the vertical mechanism section 10 of the storage section 36 is driven based on the output of the optical sensor 11, and the position of the uppermost lead frame 6 is set to a predetermined height. It is adjusted to. The X-axis drive unit 13 and the Z-axis drive unit 14 are driven, and the suction head 12 is moved to the lead frame 6.
Sent to.

The suction head 12 sucks and takes out the uppermost lead frame 6, moves in the X-axis direction, and transports the lead frame 6 to the supply unit 33. Then, the suction head 12 places the lead frame 6 on the supply rails 15,15. The amount of movement of the suction head 12 in the X-axis direction is adjusted by the actuator 40.

Next, the suction head 12 is moved to the storage section 3 again.
Move to side 6. When no interlayer paper is sandwiched between the lead frames 6, the suction head 12 reciprocates between the storage section 36 and the supply section 33, and performs only the work of transporting the lead frames 6. .

However, for example, two lead frames 6 are sucked at the same time, and the suction head 12 moves the lead frames 6.
When two sheets are taken, the suction head 12 moves to the temporary storage box 37, and temporarily stores the lead frames 6, 6 from which the two sheets have been taken in the temporary storage box 37. Then, the suction head 12 returns to the storage section 36, and the lead frame of the storage section 36
.. To the supply unit 33 are restarted. In this case, the two lead frames become unnecessary. Here, it is conceivable that the occurrence of double-sheet reading of the lead frames 6 is detected by, for example, the double-sheet detecting sensor 74 attached to the suction head 12.

On the other hand, in the storage section 36, the lead frame
When an interlayer paper (not shown) is sandwiched between the media 6, the suction head 12 sucks the interlayer paper, moves in the X-axis direction, passes through the supply unit 33, and moves to the temporary storage box 37. I will go. Then, the suction head 12 discharges the interlayer paper into the temporary storage box 37. That is, the suction head 12 is connected to the lead frame 6.
.. And the operation of discharging the interlayer paper are performed alternately. In this case, the interlayer paper becomes unnecessary.

In the supply section 33 shown in FIG. 4, the supply rails 15a and 15a are supplied by the suction head 12 of the separation section 32.
The lead frame 6 is placed on the lead frame b. The feed arm 50 of the feed section 43 moves between the supply rails 15a and 15b along the longitudinal direction of both rails 15a and 15b as shown by the arrow G, and the lead frame 6 is moved. , And approaches the transport stage 34.

At this time, the lead frame 6 is
While being guided by the rollers 16a to 16b.
It moves toward the dice 34. Guide rollers 16a to 16b
The frictional force between the lead frame 6 and the lead frame 6 is
It is set small so as not to hinder the movement of the doframe 6. The positioning of the lead frame 6 in the width direction is performed as follows.
This is performed by a guide roller 16.

The lead frame 6 pressed by the feed arm 50 is supplied to the transport stage 34 with its side edge entering the rail groove 52 of the transport stage 34. That is, the lead frames 6a, 6b move substantially horizontally along the longitudinal direction of the guide rails 51, 51 while the side edges are inserted into the rail grooves 52.

Here, in FIG. 4, the reference numeral 6 is attached to the lead frame in the supply unit 33, and the reference numeral to the lead frame already sent to the transport stage 34. 6
a and 6b are attached.

The leading end of the lead frame 6 on the supply section 33 is brought into contact with the rear end of the leading lead frame 6a.
Press the front lead frame 6a while moving. Then, the lead frame 6 supplied to the transport stage 34
a and 6b are conveyed in one direction without a gap while being in contact with each other.

The lead frame 6 pushed by the feed arm 50 stops at the same time when the feed arm 50 stops. That is, the lead frame 6 is fed to the reference position by the feed arm 50 and positioned at the stopped position. With the stop of the lead frame 6 on the supply unit 33, the lead frames 6a and 6b on the transport stage 34 also stop.

After the feed arm 50 stops, it moves in the reverse direction and returns to the original position. Then, the suction head 1
2 supplies the next lead frame 6 to rails 15a and 15b.
It is placed on top, and the feed arm 50 pushes the lead frame 6 from behind. The lead frames 6a, 6b,... On the transport stage 34 are pitch-fed in accordance with the reciprocating pitch of the feed arm 50.

In the guide portion 35 shown in FIGS. 7A to 7C, the claws 59 of the holding portion 57 are connected to the lead frame 6a.
Of the lead frame 6 from above and below
a. The holding portion 57 moves integrally with the lead frame 6a while holding the lead frame 6a, and guides the lead frame 6a in the transport direction. The holding portion 57
Is guided by the linear guide 58. When the holding portion 57 moves, the second swing arm 61 slides along the slide hole 71 of the guide rail 51.

When the lead frame 6a stops, the holding portion 57 also stops. Then, while the holding portion 57 holds the lead frame 6a, predetermined processing is performed on the lead frame 6a. When the predetermined processing is completed, the claws 59, 59 are opened as described later, and the lead frame 6a is opened.
Is released. And the holding part 57 is provided with the linear guide 5.
Return to the original position while being guided by 8. Then, the next lead frame 6a is pinched to prepare for the transport of the lead frame 6a.

The release of the claws 59, 59 is performed as follows. That is, as shown in FIG. 9, when the eccentric cam 70 rotates, the cam follower 69 provided on the second swing arm 61 is pushed up by the eccentric cam 70. The second swing arm 61 rotates about the pivot 64, and the tip of the second swing arm 61 is lowered as shown by the arrow I.

Since the first swing arm 60 and the second swing arm 61 are engaged via the engagement pin 66, the second swing arm
The force of the swing arm 61 is transmitted to the first swing arm through the engagement pin 66. The engagement pins 66 are provided with the claws 59, 59.
At the time of closing, it is located between both pivots 63, 64,
When opened, the second swinging arm is displaced forward (toward the claws 59, 59) while drawing an arc with the rotation of the second swing arm.

The engagement pin 66 is loosely fitted in the engagement groove 65. Then, the engagement pin 66 is inserted into the gap 67 in the engagement groove 65.
The first swing arm 6 is displaced according to the size H of the first swing arm 6.
Press 0. The first swing arm 61 is connected to the pivot 6
Raise the tip as indicated by the arrow J around 3. First
The displacement amounts of the swing arm 60 and the second swing arm 61 are substantially equal.

Both arms 60 and 61 are coil springs 6
7 to be always closed. The holding force of the claws 59, 59 is determined by the coil spring 67.

That is, in the transport device 31 as described above, a temporary storage box 37 is provided in the separation section 32, and the storage section 3 is used as a place for storing the lead frames 6.
6, three supply units 33 and a temporary storage box 37 are set. An actuator 40 that can be digitally controlled is employed as a drive source of the suction head 12 in the X-axis direction. Then, when two sheets of the lead frames 6 are taken out, the suction head 12 moves toward the temporary storage box 37, and the two taken lead frames are put into the temporary storage box 37. Store temporarily.

Therefore, even when two sheets of the lead frames 6 are produced, the two sheets of the lead frames can be discharged without stopping the entire apparatus.
Then, the operation rates of the transport device 31 and the peripheral devices can be improved.

Even when the interlayer paper is sandwiched between the lead frames 6, if the interlayer paper is held by the suction head 12 and the interlayer paper is temporarily discharged to the storage box 37, the interlayer paper is discharged. It is not necessary to use an air blower. Therefore, the noise is reduced, the cleanliness is maintained, and the size of the transport device 31 is reduced.

Further, a digitally controllable actuator 40 is employed as a drive source of the suction head 12 in the X-axis direction, and the suction head 12 can be stopped at an arbitrary position in the X-axis direction. Therefore, the arrangement of the lead frames 6 in the storage section 36 and the supply section 33 is
2 is not restricted by the movable range.

That is, when the stroke of the suction head 12 is constant as in the prior art, the storage unit 36 and the supply unit 33
It was necessary to open the holding columns 9a, 9b, 9d, 9e and the supply rails 15a, 15b in the X-axis direction. However, in the present embodiment, the stroke of the suction head 12 can be arbitrarily changed as indicated by reference numerals K and N in FIG. When the type of the lead frame 6 is switched, the stroke of the suction head 12 can be changed in accordance with the center position of the lead frame 6.

Accordingly, a single-opening mechanism that opens only the holding columns 9d and 9e and one of the supply rails 15b in the storage section 36 and the supply section 33 can be adopted, and the transfer device 31 is inexpensive.

In the supply section 33, the feed section 43
Arm 50 pushes the lead frame 6 from behind,
The lead frames 6a, 6b,... On the transport stage 24 are transported while being pushed by the lead frames 6 on the supply section 33. Therefore, the lead frames 6, 6a, 6
can be conveyed without gaps. Then, the productivity is improved, and the operation rate of the transport device 31 is improved.

That is, in general, when the lead frames 6 are continuously conveyed along the longitudinal direction, as shown in FIG. 6, the mounting pitch P of the lead frames 6,. The relationship with the distance L from the longitudinal ends of the doframes 6 to the mounting position is expressed as follows. P = 2L + ΔL Here, ΔL is the interval between the lead frames 6.

Therefore, if the lead frames 6 can be conveyed without gaps as in this embodiment, ΔL = 0
And the mounting pitch P can be reduced. Then, more semiconductor chips 75 can be mounted, and the productivity and operation rate are improved.

Here, in FIG. 4, the semiconductor chip 7
5 are only partially shown. Further, the transport device 31 of the present embodiment can be applied to a lead frame in which semiconductor chips are mounted in a single row, or to a lead frame in which a plurality of rows are mounted.
It is also applicable to programs.

Further, since the lead frame 6 can be positioned without pressing the lead frame 6 against the stopper as in the prior art, the deformation of the lead frame 6 can be prevented. Therefore, product reliability and yield can be improved.

Further, a guide portion 35 is provided, and this guide portion 35 guides the lead frame 6a with the claws 59, 59 sandwiching the same. Therefore, the lead frame 6a can be guided regardless of whether or not the pilot holes 21 are present. And the degree of freedom increases in the form of the transportable object,
It is easy to change the type. Also, since there are almost no replacement parts that wear out quickly, the transfer device 31 is inexpensive.

In the holding portion 57, the engagement pin 6
Since the gap 67 having an appropriate size H is formed between the groove 6 and the engagement groove 65, the plurality of guide portions 35 can reliably guide the lead frames 6a, 6b,. .

That is, when there is no gap 67 between the engaging pin 66 and the engaging groove 65, each of the lead frames 6a, 6a
If there are variations in the plate thicknesses of b,... and the mounting accuracy of the claws 59, these variations cannot be absorbed, and some of the guide portions 35 cannot properly hold the lead frame. However, if a gap is formed between the engaging pin 66 and the engaging groove 65, the above-described variation can be absorbed, and the respective lead frames 6a, 6b,. . Therefore, occurrence of a clamping error can be prevented, and highly reliable transport can be performed. further,
Since the lead frames 6a, 6,... Can be reliably transported,
The transfer accuracy is increased, and the transfer speed can be increased. In addition,
In this embodiment, the lead frame 6 is used as a plate-like object.
However, the present invention can be applied to the conveyance of a plate-like material other than a lead frame. The present invention can be variously modified without departing from the gist.

[0091]

As described above, according to the present invention, the abnormality of the adsorbate (two sheets) is detected, and the adsorbate having the abnormality is controlled so as to be contained in the unnecessary material discharge section.
It has made it possible to improve the operation rate of the device.

[0092]

[0093]

[Brief description of the drawings]

FIG. 1 is a perspective view showing a separation unit according to an embodiment of the present invention.

FIG. 2 is an explanatory diagram showing an operation of a separation unit.

FIG. 3 is an explanatory diagram showing an operation of a separation unit.

FIG. 4 is a perspective view showing a supply unit and a transport stage according to one embodiment of the present invention.

5 (a) and 5 (b) schematically show an end of the guide rail on the receiving side, FIG. 5 (a) is a plan view, and FIG. 5 (b) is a line IV-IV in FIG. It is sectional drawing along.

FIG. 6 is an explanatory view showing a mounting pitch of a general lead frame.

FIGS. 7A to 7C show a guide portion according to an embodiment of the present invention, wherein FIG. 7A is a side view, and FIG.
FIG. 6C is a cross-sectional view along the line V, and FIG. 7C is a cross-sectional view along the line VI-VI in FIG.

FIG. 8 is an explanatory diagram showing a relationship between an engagement pin and an engagement groove.

FIG. 9 is an explanatory view showing a state where the guide unit releases the lead frame.

FIG. 10 is an explanatory view showing a conventional separation unit.

FIG. 11 is an explanatory view showing the operation of a conventional separation unit.

FIG. 12 is a perspective view showing a conventional supply unit and a transport stage.

FIG. 13 is an explanatory view showing a conventional guide unit.

FIG. 14 is an explanatory view showing a conventional guide unit.

[Explanation of symbols]

6 ... lead frame (plate-like material), 12 ... adsorption head, 3
DESCRIPTION OF SYMBOLS 1 ... Plate-like material conveyance apparatus, 32 ... Separation part, 33 ... Supply part, 3
4 ... conveying stage, 35 ... guide section, 36 ... storage section, 3
7: Temporary storage box (unnecessary matter discharge section), 57: Nipping section.

──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-4-55224 (JP, A) JP-A-63-58845 (JP, A) JP-A-2-121338 (JP, A) JP-A-2- 86519 (JP, A) JP-A-53-68973 (JP, A) JP-A-59-161809 (JP, A) JP-A-63-18836 (JP, U) (58) Fields investigated (Int. ⁷ , DB name) B65H 5/00 B65H 3/00 B65G 47/00 H01L 21/50

Claims (6)

(57) [Claims] 1. A transfer stage forming a transfer path for a plate-like object.
And supplying the plate-like object to the transfer stage
And a supply unit , wherein the supply unit includes a suction head for suction-holding the plate-like material, a supply rail on which the plate-like material is placed, and an unnecessary material discharge unit arranged side by side with the supply rail. , by the suction head by the attendant the platelet
A detection sensor for detecting the held unnecessary object, and the plate-like object is unnecessary based on an output of the detection sensor.
To one of the material discharge section and the supply rail
Driving means for driving the suction head to be conveyed
And a plate-like object transfer device, comprising: 2. The supply of a plate-like object from a supply unit to a transfer stage.
When feeding, the end of the plate to be fed is already
While pressing against the end of the plate
The plate-like object conveying device according to claim 1, wherein the supply is performed . 3. The transfer stage guides the transfer of a plate-like object.
Having a guide portion to make the plate-like object
The transfer direction of the transfer stage while nipping from the thickness direction of the object
Characterized by having a holding portion that moves along
The plate conveying device according to claim 1 . 4. The plate-like object is a lead frame.
The plate-like object conveying device according to claim 1, wherein: 5. When an unnecessary object is detected, the unnecessary object is detected.
To move the attached plate-like member to the
2. The plate-like object conveying device according to claim 1, wherein
Place. 6. A plate-like object is laminated with an interlayer paper interposed therebetween.
In such a case, the suction head is configured to transfer one sheet of the plate-like material to a supply rail.
After being driven to transport, one sheet of the interlayer paper
It is driven to be conveyed to the discharge unit, and when an unnecessary object is detected by the detection sensor,
The suction head conveys the plate- like material to the unnecessary material discharge unit.
The plate-like object conveying device according to claim 1, wherein the plate-like object conveying device is driven so as to be driven .