JPH05341311A - Active matrix type liquid crystal display device - Google Patents

Abstract

PURPOSE:To cut a short-circuit pattern without losing the orienting performance of an oriented film even after a rubbing process and to reduce a decrease in yield due to electrostatic destruction by cutting the short-circuit pattern by using a light shield part as a mask. CONSTITUTION:The short-circuit pattern 81 which connects respective scanning lines 31 and respective auxiliary capacitance lines 61 and arranged in the same layer with the scanning lines 31 and auxiliary capacitance lines 61 is installed between one end of a matrix wiring part 71 and a scanning line driving circuit 131 and at the other end of the matrix wiring part 71. A counter substrate 301 is equipped with the matrix-shaped light shield part 311 for shielding switch elements 41 of a matrix array substrate 11 from light, and the light shield part 311 has windows 83 for cutting the short-circuit pattern 81. After a liquid crystal layer is sandwiched between the couple of substrates 11 and 301, the short-circuit pattern 81 corresponding to the windows 83 is cut at a time by using the light shield part 311 as the mask.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an active matrix type liquid crystal display device having a matrix array substrate integrally formed with a drive circuit.

[0002]

2. Description of the Related Art Liquid crystal display devices have come to be widely used in various fields by taking advantage of features such as light weight and low power consumption. Above all, an active matrix type liquid crystal display device using a matrix array substrate in which a switch element such as a thin film transistor is installed for each pixel electrode is high in quality because a high quality display image without crosstalk between adjacent pixels can be obtained. It has been attracting attention as a fine display device and a projection type display device.

In recent years, in particular, an attempt has been made to improve productivity by eliminating the trouble of connection with the driving circuit by integrally forming the driving circuit on the matrix array substrate.

In order to realize such an active matrix type liquid crystal display device, it is necessary to achieve a high speed operation of the switch element which constitutes the drive circuit. Therefore, a high speed operation using polycrystalline silicon or the like for the active layer is possible. Thin film transistors are used.

By the way, in such a thin film transistor in which polycrystalline silicon or the like is used for the active layer, the number of manufacturing steps such as ion implantation or dry etching is increased as compared with a thin film transistor in which the active layer is formed of amorphous silicon. For this reason, the generation of static electricity during the manufacturing of the liquid crystal display device is increased more than ever before, and therefore a structure for coping with electrostatic breakdown of the switch element is indispensable.

As a method of preventing the switch element from being destroyed by the influence of static electricity generated during manufacturing,
For example, as disclosed in Japanese Patent Laid-Open No. 60-251665, each scan line is electrically connected by a short ring, and after completion of the thin film process, a short circuit is formed by etching using a contact hole provided in an interlayer insulating film. It is known to cut rings.

[0007]

By the way, in the manufacturing process of the active matrix type liquid crystal display device, static electricity is generated not only when the switch element is formed, but also when the alignment film is rubbed after the switch element is formed. This may cause electrostatic breakdown of the switch element.

Therefore, in order to sufficiently reduce the electrostatic breakdown of the switch element, it is possible to suppress the electrostatic breakdown by cutting the short ring by etching after the rubbing treatment of the alignment film.

However, the alignment film after the rubbing treatment is very sensitive, and when the resist pattern for etching the short ring is attached or removed, the alignment film is damaged especially by the removing liquid of the resist pattern and the alignment performance is deteriorated. Will end up. It is possible to use dry etching for the etching process, but the resist pattern hardens, and it becomes difficult to remove the resist pattern without damaging the alignment film.

The present invention has been made in view of the above technical problems, and an object of the present invention is to provide a matrix array substrate and a liquid crystal display device using the same, which can reduce the reduction in manufacturing yield due to electrostatic breakdown. It is what

[0011]

According to the active matrix type liquid crystal display device of the present invention, a plurality of signal lines and scanning lines are wired in a matrix on an insulating substrate, and pixel electrodes are provided at respective intersections via switch elements. Matrix provided with installed matrix wiring part, short pattern connected to each scanning line or each signal line, signal line driving circuit connected to signal line, and scanning line driving circuit connected to scanning line An array substrate, a counter substrate facing the matrix array substrate, and a light blocking portion having a window for cutting the short pattern of the matrix array substrate are provided, and the short pattern is cut using the light blocking portion as a mask to scan each scanning line or each signal. The feature is that the lines are electrically separated.

The active matrix type liquid crystal display device of the present invention is characterized in that the light shielding portion is formed on the matrix array substrate and the light shielding portion is formed on the counter substrate.

In addition, the matrix wiring portion of the active matrix type liquid crystal display device of the present invention is provided with auxiliary capacitance lines which are arranged in the same layer as the scanning lines and form a capacitance between the pixel electrodes, and each scanning line is formed by a short pattern. Each scanning line and each auxiliary capacitance line are electrically connected to each other and the short pattern is cut using the light shielding portion as a mask. In particular, each scanning line, each auxiliary capacitance line, and the short pattern are formed by the same member.

[0014]

In the active matrix type liquid crystal display device of the present invention, the short pattern is cut using the light shielding portion as a mask as described above. Therefore, according to the present invention, even after the rubbing treatment is applied to the alignment film, the short pattern can be cut without impairing the alignment performance of the alignment film.

Further, according to the present invention, an active matrix type liquid crystal display device in which a drive circuit is integrally formed by forming a short pattern particularly between the scanning line and the auxiliary capacitance line arranged in the same layer. Even in this case, the electrostatic breakdown of the switch element can be effectively prevented. Further, according to such a configuration, by configuring the scanning line and the auxiliary capacitance line with the same material, it becomes possible to collectively form the scanning line, the auxiliary capacitance line, and the short pattern by one patterning, It is possible to effectively prevent electrostatic breakdown without significantly increasing the manufacturing process.

By the way, such a short pattern causes the liquid crystal layer to be sandwiched between the matrix array substrate and the counter substrate even after the alignment film is formed on the matrix array substrate and subjected to the alignment treatment. Although it may be after forming the display device, the manufacturing yield is improved by cutting the short pattern after forming the liquid crystal display device.
Particularly preferred in the present invention. As a method of cutting the short pattern, it is a preferable method in consideration of productivity, the influence on the alignment film, and the like of collective cutting using a laser beam.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An active matrix type liquid crystal display device according to an embodiment of the present invention will be described below with reference to the drawings.

In this liquid crystal display device (201), a rubbing process was performed between the matrix array substrate (11) and the counter substrate (301) as shown in FIG. 1 so that the rubbing directions were orthogonal to each other. The liquid crystal layer (401) is sandwiched by the alignment films (91) and (331) as shown in FIG.

The matrix array substrate (11) is an insulating substrate (1
A plurality of signal lines (21) and scanning lines (31) are arranged in a matrix on the above (0), and the I.D. T. O. (Indium-Tin-Oxide) pixel electrode (5
1) is installed. Further, the pixel electrode (51) is made of the same member as the scanning line (31) and is arranged in the same layer as the scanning line (31).
The matrix wiring portion (71) of the matrix array substrate (11) is configured to include the auxiliary capacitance line (61) that forms a capacitance (Cs) between and.

Each signal line (21) has the same insulating substrate (10).
Each scanning line (31) is also connected to the signal line driving circuit (121) integrally formed on the same, and to the scanning line driving circuit (131) integrally formed on the same insulating substrate (10).

Further, between one end of the matrix wiring part (71) and the scanning line driving circuit (131), and the matrix wiring part (71).
The other end of the scanning line (31) and the auxiliary capacitance line (61), for connecting the scanning line (31) and the auxiliary capacitance line (61) and the same member, the scanning line (31) Further, the matrix array substrate (11) is configured by installing the short pattern (81) arranged in the same layer as the auxiliary capacitance line (61).

The matrix wiring portion (71) forming the matrix array substrate (11) will be described in detail with reference to FIGS. 2 and 3. The switch element (41) provided in the matrix wiring part (71) is a thin film transistor in which the active layer (43a) is composed of a polycrystalline silicon film, and the active layer (43
Adjacent to (a), a source region (43c) and a drain region (43b) are formed by adding impurities to the polycrystalline silicon film, and impurities are added on the active layer (43a) through the gate insulating film (45). And a gate electrode (41a) integrally formed with the scanning line (31) made of polycrystalline silicon.

Further, the auxiliary capacitance line (61) provided in the matrix wiring part (71) has an insulating film (65) provided on the polycrystalline silicon film (43c) in the same step as the gate insulating film (45). The gate electrode (41a) is made of polycrystalline silicon formed in the same step as the gate electrode (41a). Then, the pixel electrode (51) is installed on the auxiliary capacitance line (61) through the interlayer insulating film (67), and the auxiliary capacitance line (61)
An auxiliary capacitance (Cs) is formed between the extended pattern of the active layer (43a) and the pixel electrode (51).

The counter substrate (301) constituting the liquid crystal display device (201) is a matrix light-shielding portion made of chromium (Cr) for shielding the switch element (41) of the matrix array substrate (11). (311) and a counter electrode (321) facing the pixel electrode (51) are provided on the light shielding part (311).

In particular, the light-shielding portion (311) of this embodiment is not only on the matrix wiring portion (71) as shown in FIG. 1, but also on the drive circuits (121), (131) constituting the matrix array substrate (11). It is also installed integrally on the top, and scan line (31) and auxiliary capacitance line (6
It has a window (83) for disconnecting the short pattern (81) connecting with (1).

The liquid crystal display device (201) of this embodiment
After the liquid crystal layer (401) is sandwiched between the pair of substrates (11) and (301), the short pattern (81) corresponding to the window (83) is collectively formed by the laser using the light shielding part (311) as a mask. Made by cutting.

As described above, the liquid crystal display device of this embodiment
According to (201), since each scanning line (31) and auxiliary capacitance line (61) are connected by the short pattern (81) during manufacturing, it is possible to sufficiently suppress the decrease in manufacturing yield due to electrostatic breakdown. You can In particular, in this embodiment, since the auxiliary capacitance line (61) and the scanning line (31) are arranged in the same layer, a short pattern (81) connecting the scanning line (31) and the auxiliary capacitance line (61). Can be formed in the same layer as the scanning line (31) and the auxiliary capacitance line (61). Therefore, since the scanning line (31), the auxiliary capacitance line (61) and the short pattern (81) can be collectively formed, the liquid crystal display device in which the drive circuits (121) and (131) are integrally formed ( Even 201) does not have the trouble of providing a contact hole or the like to connect the scanning line (31) and the auxiliary capacitance line (61), and the productivity and the manufacturing yield can be improved.

Further, according to the liquid crystal display device (201) of this embodiment, the alignment films (91), (331) and the like are damaged by providing the light shielding portion (311) having the window (83). Without the short pattern (8
Since 1) can be cut, the switch element (41) is not destroyed even by static electricity generated during manufacturing such as rubbing treatment of the alignment films (91) and (331), and the manufacturing yield is further improved. Can be improved.

According to the embodiment, the window (8
A light shielding part (311) having 3) is provided, but, for example, a substrate facing the matrix wiring part (71) of the matrix array substrate (11).
(10) A light-shielding portion having a window may be formed on the surface and the short pattern (81) corresponding to the window may be cut by this. Further, by removing the protective film on the short pattern (81) corresponding to the window portion of the light shielding part, the short pattern (8
The cutting of 1) can be performed more easily.

[0030]

As described above in detail, according to the liquid crystal display device of the present invention, the light shielding portion is provided on at least one substrate,
By removing the short pattern using the light shielding portion as a mask, the short pattern can be removed even after the alignment film is installed without damaging the alignment film. Therefore, according to the present invention, the electrostatic breakdown of the switch element of the active matrix type liquid crystal display device can be sufficiently reduced, and the manufacturing yield can be greatly improved.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an active matrix type liquid crystal display device according to an embodiment of the present invention.

2 is a partially enlarged view of a matrix wiring portion in FIG.

FIG. 3 is a schematic cross-sectional view of the liquid crystal display device taken along the line AA ′ in FIG.

[Explanation of symbols]

 (11) Matrix array substrate (21) Signal line (31) Scan line (41) Switch element (61) Storage capacitance line (81) Short pattern (201) Liquid crystal display

Claims (5)

[Claims] 1. A matrix wiring part in which a plurality of signal lines and scanning lines are wired in a matrix on an insulating substrate and pixel electrodes are provided at respective intersections via switch elements, and the scanning lines or the scanning lines. A short pattern connected to the signal line, a signal line drive circuit connected to the signal line,
A matrix array substrate including a scanning line driving circuit connected to the scanning lines, an opposite substrate facing the matrix array substrate, and a light shielding portion having a window for cutting the short pattern of the matrix array substrate. Then
An active matrix type liquid crystal display device, characterized in that the scanning pattern or the signal line is electrically separated by cutting the short pattern using the light shielding portion as a mask. 2. An active matrix type liquid crystal display device, wherein the light-shielding portion according to claim 1 is formed on a matrix array substrate. 3. An active matrix type liquid crystal display device, wherein the light-shielding portion according to claim 1 is formed on a counter substrate. 4. The matrix wiring portion according to claim 1, further comprising an auxiliary capacitance line arranged in the same layer as the scanning line to form a capacitance with the pixel electrode, and connected to each scanning line by the short pattern. The active matrix liquid crystal display device is characterized in that the short pattern is cut by using the light shielding portion as a mask to electrically separate the scanning lines and the auxiliary capacitance lines. 5. The active matrix liquid crystal display device according to claim 4, wherein each of the scanning lines, each of the auxiliary capacitance lines and the short pattern are formed of the same member.