JPH0534116B2 - - Google Patents

Info

Publication number
JPH0534116B2
JPH0534116B2 JP61200385A JP20038586A JPH0534116B2 JP H0534116 B2 JPH0534116 B2 JP H0534116B2 JP 61200385 A JP61200385 A JP 61200385A JP 20038586 A JP20038586 A JP 20038586A JP H0534116 B2 JPH0534116 B2 JP H0534116B2
Authority
JP
Japan
Prior art keywords
stage
laser processing
slit
laser
processing position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61200385A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6356383A (ja
Inventor
Toshikazu Kajikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP61200385A priority Critical patent/JPS6356383A/ja
Publication of JPS6356383A publication Critical patent/JPS6356383A/ja
Publication of JPH0534116B2 publication Critical patent/JPH0534116B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Lasers (AREA)
JP61200385A 1986-08-27 1986-08-27 レーザ加工位置制御装置 Granted JPS6356383A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61200385A JPS6356383A (ja) 1986-08-27 1986-08-27 レーザ加工位置制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61200385A JPS6356383A (ja) 1986-08-27 1986-08-27 レーザ加工位置制御装置

Publications (2)

Publication Number Publication Date
JPS6356383A JPS6356383A (ja) 1988-03-10
JPH0534116B2 true JPH0534116B2 (enrdf_load_stackoverflow) 1993-05-21

Family

ID=16423439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61200385A Granted JPS6356383A (ja) 1986-08-27 1986-08-27 レーザ加工位置制御装置

Country Status (1)

Country Link
JP (1) JPS6356383A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3292079B2 (ja) * 1997-02-24 2002-06-17 三菱電機株式会社 レーザ加工装置
US7253376B2 (en) * 2005-01-21 2007-08-07 Ultratech, Inc. Methods and apparatus for truncating an image formed with coherent radiation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548489A (en) * 1978-09-29 1980-04-07 Nec Corp Full-automatic laser work system

Also Published As

Publication number Publication date
JPS6356383A (ja) 1988-03-10

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