JPH0534107Y2 - - Google Patents
Info
- Publication number
- JPH0534107Y2 JPH0534107Y2 JP14269786U JP14269786U JPH0534107Y2 JP H0534107 Y2 JPH0534107 Y2 JP H0534107Y2 JP 14269786 U JP14269786 U JP 14269786U JP 14269786 U JP14269786 U JP 14269786U JP H0534107 Y2 JPH0534107 Y2 JP H0534107Y2
- Authority
- JP
- Japan
- Prior art keywords
- parallel link
- chamber
- link
- small
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010432 diamond Substances 0.000 description 5
- 229910003460 diamond Inorganic materials 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Transmission Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14269786U JPH0534107Y2 (enrdf_load_stackoverflow) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14269786U JPH0534107Y2 (enrdf_load_stackoverflow) | 1986-09-19 | 1986-09-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6350131U JPS6350131U (enrdf_load_stackoverflow) | 1988-04-05 |
| JPH0534107Y2 true JPH0534107Y2 (enrdf_load_stackoverflow) | 1993-08-30 |
Family
ID=31051669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14269786U Expired - Lifetime JPH0534107Y2 (enrdf_load_stackoverflow) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534107Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6480240B2 (ja) * | 2015-04-02 | 2019-03-06 | アサヒプリテック株式会社 | 抜取対象物の抜取方法 |
| JP6538402B2 (ja) * | 2015-04-02 | 2019-07-03 | アサヒプリテック株式会社 | 抜取装置 |
-
1986
- 1986-09-19 JP JP14269786U patent/JPH0534107Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6350131U (enrdf_load_stackoverflow) | 1988-04-05 |
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