JPH0534102Y2 - - Google Patents
Info
- Publication number
- JPH0534102Y2 JPH0534102Y2 JP309589U JP309589U JPH0534102Y2 JP H0534102 Y2 JPH0534102 Y2 JP H0534102Y2 JP 309589 U JP309589 U JP 309589U JP 309589 U JP309589 U JP 309589U JP H0534102 Y2 JPH0534102 Y2 JP H0534102Y2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- block
- susceptor
- temperature
- heater block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 claims description 49
- 239000000110 cooling liquid Substances 0.000 claims description 19
- 239000000112 cooling gas Substances 0.000 claims description 16
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000003507 refrigerant Substances 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims 1
- 229910000838 Al alloy Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Details Of Resistors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP309589U JPH0534102Y2 (enrdf_load_stackoverflow) | 1989-01-13 | 1989-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP309589U JPH0534102Y2 (enrdf_load_stackoverflow) | 1989-01-13 | 1989-01-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0295233U JPH0295233U (enrdf_load_stackoverflow) | 1990-07-30 |
| JPH0534102Y2 true JPH0534102Y2 (enrdf_load_stackoverflow) | 1993-08-30 |
Family
ID=31204427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP309589U Expired - Lifetime JPH0534102Y2 (enrdf_load_stackoverflow) | 1989-01-13 | 1989-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534102Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-01-13 JP JP309589U patent/JPH0534102Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0295233U (enrdf_load_stackoverflow) | 1990-07-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101645393B (zh) | 基板处理装置、加热装置及半导体装置的制造方法 | |
| JPH0727895B2 (ja) | 半導体ウエハーの処理方法と装置 | |
| TW201241386A (en) | Vertical-type heat treatment apparatus | |
| JPH0534102Y2 (enrdf_load_stackoverflow) | ||
| CN106653661A (zh) | 一种热处理设备工艺门冷却系统及冷却方法 | |
| JP6925377B2 (ja) | 基板処理装置、半導体装置の製造方法およびプログラム | |
| JP2920018B2 (ja) | 燃料電池式発電装置 | |
| CN108917177A (zh) | 熔盐加热装置及熔盐加热方法 | |
| JP3823335B2 (ja) | ガラス溶融炉の二次空気湿度制御装置 | |
| JPS57180079A (en) | Temperature controller for fuel cell | |
| CN222837334U (zh) | 坩埚预加温装置 | |
| JP7691204B2 (ja) | 成膜方法及び熱処理装置 | |
| JPS6311794B2 (enrdf_load_stackoverflow) | ||
| KR200234113Y1 (ko) | 반도체 웨이퍼의 냉각유니트 | |
| JPH05166527A (ja) | 溶融炭酸塩型燃料電池昇温制御方法 | |
| KR100501530B1 (ko) | 퍼지가스 온도 조절장치를 구비한 급속 열처리장치의 공정챔버 | |
| CN220649080U (zh) | 一种可控制升温速率的管式炉装置 | |
| JP2003314955A (ja) | 真空乾燥装置 | |
| CN2237826Y (zh) | 一种可控式余热低温回火炉 | |
| JPS5742121A (en) | Method and apparatus for drying wafer | |
| JPH0259382B2 (enrdf_load_stackoverflow) | ||
| JP2948791B2 (ja) | 液体貯蔵容器の交換方法 | |
| JP3682804B2 (ja) | 高温圧力容器 | |
| KR20100065608A (ko) | 증착 장치 | |
| CN208398379U (zh) | 一种熔盐加热装置 |