JPH0534102Y2 - - Google Patents
Info
- Publication number
- JPH0534102Y2 JPH0534102Y2 JP309589U JP309589U JPH0534102Y2 JP H0534102 Y2 JPH0534102 Y2 JP H0534102Y2 JP 309589 U JP309589 U JP 309589U JP 309589 U JP309589 U JP 309589U JP H0534102 Y2 JPH0534102 Y2 JP H0534102Y2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- block
- susceptor
- temperature
- heater block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 claims description 49
- 239000000110 cooling liquid Substances 0.000 claims description 19
- 239000000112 cooling gas Substances 0.000 claims description 16
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000003507 refrigerant Substances 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims 1
- 229910000838 Al alloy Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Details Of Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP309589U JPH0534102Y2 (enrdf_load_stackoverflow) | 1989-01-13 | 1989-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP309589U JPH0534102Y2 (enrdf_load_stackoverflow) | 1989-01-13 | 1989-01-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0295233U JPH0295233U (enrdf_load_stackoverflow) | 1990-07-30 |
| JPH0534102Y2 true JPH0534102Y2 (enrdf_load_stackoverflow) | 1993-08-30 |
Family
ID=31204427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP309589U Expired - Lifetime JPH0534102Y2 (enrdf_load_stackoverflow) | 1989-01-13 | 1989-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534102Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-01-13 JP JP309589U patent/JPH0534102Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0295233U (enrdf_load_stackoverflow) | 1990-07-30 |
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