JPH0295233U - - Google Patents

Info

Publication number
JPH0295233U
JPH0295233U JP309589U JP309589U JPH0295233U JP H0295233 U JPH0295233 U JP H0295233U JP 309589 U JP309589 U JP 309589U JP 309589 U JP309589 U JP 309589U JP H0295233 U JPH0295233 U JP H0295233U
Authority
JP
Japan
Prior art keywords
cooling
block
heater block
wafer
susceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP309589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0534102Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP309589U priority Critical patent/JPH0534102Y2/ja
Publication of JPH0295233U publication Critical patent/JPH0295233U/ja
Application granted granted Critical
Publication of JPH0534102Y2 publication Critical patent/JPH0534102Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Details Of Resistors (AREA)
JP309589U 1989-01-13 1989-01-13 Expired - Lifetime JPH0534102Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP309589U JPH0534102Y2 (enrdf_load_stackoverflow) 1989-01-13 1989-01-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP309589U JPH0534102Y2 (enrdf_load_stackoverflow) 1989-01-13 1989-01-13

Publications (2)

Publication Number Publication Date
JPH0295233U true JPH0295233U (enrdf_load_stackoverflow) 1990-07-30
JPH0534102Y2 JPH0534102Y2 (enrdf_load_stackoverflow) 1993-08-30

Family

ID=31204427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP309589U Expired - Lifetime JPH0534102Y2 (enrdf_load_stackoverflow) 1989-01-13 1989-01-13

Country Status (1)

Country Link
JP (1) JPH0534102Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0534102Y2 (enrdf_load_stackoverflow) 1993-08-30

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