JPH01140823U - - Google Patents

Info

Publication number
JPH01140823U
JPH01140823U JP3751288U JP3751288U JPH01140823U JP H01140823 U JPH01140823 U JP H01140823U JP 3751288 U JP3751288 U JP 3751288U JP 3751288 U JP3751288 U JP 3751288U JP H01140823 U JPH01140823 U JP H01140823U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
temperature
temperature sensor
plasma etching
heating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3751288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3751288U priority Critical patent/JPH01140823U/ja
Publication of JPH01140823U publication Critical patent/JPH01140823U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3751288U 1988-03-22 1988-03-22 Pending JPH01140823U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3751288U JPH01140823U (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3751288U JPH01140823U (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Publications (1)

Publication Number Publication Date
JPH01140823U true JPH01140823U (enrdf_load_stackoverflow) 1989-09-27

Family

ID=31264092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3751288U Pending JPH01140823U (enrdf_load_stackoverflow) 1988-03-22 1988-03-22

Country Status (1)

Country Link
JP (1) JPH01140823U (enrdf_load_stackoverflow)

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