JPS61190130U - - Google Patents

Info

Publication number
JPS61190130U
JPS61190130U JP7356385U JP7356385U JPS61190130U JP S61190130 U JPS61190130 U JP S61190130U JP 7356385 U JP7356385 U JP 7356385U JP 7356385 U JP7356385 U JP 7356385U JP S61190130 U JPS61190130 U JP S61190130U
Authority
JP
Japan
Prior art keywords
resist coating
semiconductor wafer
cup
adjustment means
temperature adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7356385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7356385U priority Critical patent/JPS61190130U/ja
Publication of JPS61190130U publication Critical patent/JPS61190130U/ja
Pending legal-status Critical Current

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Landscapes

  • Coating Apparatus (AREA)
JP7356385U 1985-05-20 1985-05-20 Pending JPS61190130U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7356385U JPS61190130U (enrdf_load_stackoverflow) 1985-05-20 1985-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7356385U JPS61190130U (enrdf_load_stackoverflow) 1985-05-20 1985-05-20

Publications (1)

Publication Number Publication Date
JPS61190130U true JPS61190130U (enrdf_load_stackoverflow) 1986-11-27

Family

ID=30613052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7356385U Pending JPS61190130U (enrdf_load_stackoverflow) 1985-05-20 1985-05-20

Country Status (1)

Country Link
JP (1) JPS61190130U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02307568A (ja) * 1989-05-22 1990-12-20 Nec Corp 塗布剤の塗布方法及びその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02307568A (ja) * 1989-05-22 1990-12-20 Nec Corp 塗布剤の塗布方法及びその装置

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