JPS61190131U - - Google Patents

Info

Publication number
JPS61190131U
JPS61190131U JP7356685U JP7356685U JPS61190131U JP S61190131 U JPS61190131 U JP S61190131U JP 7356685 U JP7356685 U JP 7356685U JP 7356685 U JP7356685 U JP 7356685U JP S61190131 U JPS61190131 U JP S61190131U
Authority
JP
Japan
Prior art keywords
motor
semiconductor wafer
temperature
coating apparatus
resist coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7356685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0121558Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7356685U priority Critical patent/JPH0121558Y2/ja
Publication of JPS61190131U publication Critical patent/JPS61190131U/ja
Application granted granted Critical
Publication of JPH0121558Y2 publication Critical patent/JPH0121558Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP7356685U 1985-05-20 1985-05-20 Expired JPH0121558Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7356685U JPH0121558Y2 (enrdf_load_stackoverflow) 1985-05-20 1985-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7356685U JPH0121558Y2 (enrdf_load_stackoverflow) 1985-05-20 1985-05-20

Publications (2)

Publication Number Publication Date
JPS61190131U true JPS61190131U (enrdf_load_stackoverflow) 1986-11-27
JPH0121558Y2 JPH0121558Y2 (enrdf_load_stackoverflow) 1989-06-27

Family

ID=30613058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7356685U Expired JPH0121558Y2 (enrdf_load_stackoverflow) 1985-05-20 1985-05-20

Country Status (1)

Country Link
JP (1) JPH0121558Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0121558Y2 (enrdf_load_stackoverflow) 1989-06-27

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