JPS6210437U - - Google Patents

Info

Publication number
JPS6210437U
JPS6210437U JP10166285U JP10166285U JPS6210437U JP S6210437 U JPS6210437 U JP S6210437U JP 10166285 U JP10166285 U JP 10166285U JP 10166285 U JP10166285 U JP 10166285U JP S6210437 U JPS6210437 U JP S6210437U
Authority
JP
Japan
Prior art keywords
motor
coating device
utility
wafer chuck
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10166285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10166285U priority Critical patent/JPS6210437U/ja
Publication of JPS6210437U publication Critical patent/JPS6210437U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP10166285U 1985-07-05 1985-07-05 Pending JPS6210437U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10166285U JPS6210437U (enrdf_load_stackoverflow) 1985-07-05 1985-07-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10166285U JPS6210437U (enrdf_load_stackoverflow) 1985-07-05 1985-07-05

Publications (1)

Publication Number Publication Date
JPS6210437U true JPS6210437U (enrdf_load_stackoverflow) 1987-01-22

Family

ID=30972593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10166285U Pending JPS6210437U (enrdf_load_stackoverflow) 1985-07-05 1985-07-05

Country Status (1)

Country Link
JP (1) JPS6210437U (enrdf_load_stackoverflow)

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