JPS62181534U - - Google Patents
Info
- Publication number
- JPS62181534U JPS62181534U JP6877986U JP6877986U JPS62181534U JP S62181534 U JPS62181534 U JP S62181534U JP 6877986 U JP6877986 U JP 6877986U JP 6877986 U JP6877986 U JP 6877986U JP S62181534 U JPS62181534 U JP S62181534U
- Authority
- JP
- Japan
- Prior art keywords
- base
- wafer
- rotating shaft
- photo sensor
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 7
- 239000010453 quartz Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986068779U JPH052501Y2 (enrdf_load_stackoverflow) | 1986-05-09 | 1986-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986068779U JPH052501Y2 (enrdf_load_stackoverflow) | 1986-05-09 | 1986-05-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62181534U true JPS62181534U (enrdf_load_stackoverflow) | 1987-11-18 |
| JPH052501Y2 JPH052501Y2 (enrdf_load_stackoverflow) | 1993-01-21 |
Family
ID=30908911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986068779U Expired - Lifetime JPH052501Y2 (enrdf_load_stackoverflow) | 1986-05-09 | 1986-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH052501Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63252831A (ja) * | 1987-04-07 | 1988-10-19 | Taiyo Yuden Co Ltd | 板体収納マガジンと板体収納方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103436U (ja) * | 1982-12-27 | 1984-07-12 | 株式会社東芝 | 半導体ウエハ用ボ−ト |
| JPS6072241A (ja) * | 1983-09-28 | 1985-04-24 | Mitsubishi Electric Corp | 半導体ウエハ−供給装置 |
| JPS60252542A (ja) * | 1984-05-28 | 1985-12-13 | Nippon Telegr & Teleph Corp <Ntt> | カセツト変換装置 |
-
1986
- 1986-05-09 JP JP1986068779U patent/JPH052501Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103436U (ja) * | 1982-12-27 | 1984-07-12 | 株式会社東芝 | 半導体ウエハ用ボ−ト |
| JPS6072241A (ja) * | 1983-09-28 | 1985-04-24 | Mitsubishi Electric Corp | 半導体ウエハ−供給装置 |
| JPS60252542A (ja) * | 1984-05-28 | 1985-12-13 | Nippon Telegr & Teleph Corp <Ntt> | カセツト変換装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63252831A (ja) * | 1987-04-07 | 1988-10-19 | Taiyo Yuden Co Ltd | 板体収納マガジンと板体収納方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH052501Y2 (enrdf_load_stackoverflow) | 1993-01-21 |