JPS61136536U - - Google Patents

Info

Publication number
JPS61136536U
JPS61136536U JP1875185U JP1875185U JPS61136536U JP S61136536 U JPS61136536 U JP S61136536U JP 1875185 U JP1875185 U JP 1875185U JP 1875185 U JP1875185 U JP 1875185U JP S61136536 U JPS61136536 U JP S61136536U
Authority
JP
Japan
Prior art keywords
cover
gas
substrate
gas outlet
rotating substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1875185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1875185U priority Critical patent/JPS61136536U/ja
Publication of JPS61136536U publication Critical patent/JPS61136536U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1875185U 1985-02-13 1985-02-13 Pending JPS61136536U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1875185U JPS61136536U (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1875185U JPS61136536U (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Publications (1)

Publication Number Publication Date
JPS61136536U true JPS61136536U (enrdf_load_stackoverflow) 1986-08-25

Family

ID=30507678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1875185U Pending JPS61136536U (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Country Status (1)

Country Link
JP (1) JPS61136536U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158767A (ja) * 2007-12-27 2009-07-16 Tokyo Electron Ltd 回転塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009158767A (ja) * 2007-12-27 2009-07-16 Tokyo Electron Ltd 回転塗布装置

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