JPH0533811B2 - - Google Patents

Info

Publication number
JPH0533811B2
JPH0533811B2 JP195087A JP195087A JPH0533811B2 JP H0533811 B2 JPH0533811 B2 JP H0533811B2 JP 195087 A JP195087 A JP 195087A JP 195087 A JP195087 A JP 195087A JP H0533811 B2 JPH0533811 B2 JP H0533811B2
Authority
JP
Japan
Prior art keywords
workpiece
reaction chamber
deposition reaction
chuck
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP195087A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63179515A (ja
Inventor
Ban Masutorikuto Matsukusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Priority to JP195087A priority Critical patent/JPS63179515A/ja
Publication of JPS63179515A publication Critical patent/JPS63179515A/ja
Publication of JPH0533811B2 publication Critical patent/JPH0533811B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP195087A 1987-01-09 1987-01-09 化学蒸着装置 Granted JPS63179515A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP195087A JPS63179515A (ja) 1987-01-09 1987-01-09 化学蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP195087A JPS63179515A (ja) 1987-01-09 1987-01-09 化学蒸着装置

Publications (2)

Publication Number Publication Date
JPS63179515A JPS63179515A (ja) 1988-07-23
JPH0533811B2 true JPH0533811B2 (enrdf_load_stackoverflow) 1993-05-20

Family

ID=11515884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP195087A Granted JPS63179515A (ja) 1987-01-09 1987-01-09 化学蒸着装置

Country Status (1)

Country Link
JP (1) JPS63179515A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238571A (ja) * 1988-07-27 1990-02-07 Tokyo Electron Ltd 処理装置

Also Published As

Publication number Publication date
JPS63179515A (ja) 1988-07-23

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