JPH0533486B2 - - Google Patents
Info
- Publication number
- JPH0533486B2 JPH0533486B2 JP7517186A JP7517186A JPH0533486B2 JP H0533486 B2 JPH0533486 B2 JP H0533486B2 JP 7517186 A JP7517186 A JP 7517186A JP 7517186 A JP7517186 A JP 7517186A JP H0533486 B2 JPH0533486 B2 JP H0533486B2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- electrons
- emission
- light
- photoelectron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052783 alkali metal Inorganic materials 0.000 claims description 11
- 150000001340 alkali metals Chemical class 0.000 claims description 11
- 238000009792 diffusion process Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 16
- 239000004065 semiconductor Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 239000013078 crystal Substances 0.000 description 8
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- 229910005540 GaP Inorganic materials 0.000 description 2
- QHRPVRRJYMWFKB-UHFFFAOYSA-N [Sb].[Cs] Chemical compound [Sb].[Cs] QHRPVRRJYMWFKB-UHFFFAOYSA-N 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61075171A JPS62232831A (ja) | 1986-04-01 | 1986-04-01 | 光電子または２次電子放射用陰極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61075171A JPS62232831A (ja) | 1986-04-01 | 1986-04-01 | 光電子または２次電子放射用陰極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62232831A JPS62232831A (ja) | 1987-10-13 |
| JPH0533486B2 true JPH0533486B2 (fr) | 1993-05-19 |
Family
ID=13568485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61075171A Granted JPS62232831A (ja) | 1986-04-01 | 1986-04-01 | 光電子または２次電子放射用陰極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62232831A (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4975656A (en) * | 1989-03-31 | 1990-12-04 | Litton Systems, Inc. | Enhanced secondary electron emitter |
| JP2758529B2 (ja) * | 1992-04-22 | 1998-05-28 | 浜松ホトニクス株式会社 | 反射型光電面および光電子増倍管 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5071261A (fr) * | 1973-10-25 | 1975-06-13 | ||
| JPS5384694A (en) * | 1976-12-30 | 1978-07-26 | Sooraa Tekunorojii Ass Risaach | Solar energy converter |
-
1986
- 1986-04-01 JP JP61075171A patent/JPS62232831A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5071261A (fr) * | 1973-10-25 | 1975-06-13 | ||
| JPS5384694A (en) * | 1976-12-30 | 1978-07-26 | Sooraa Tekunorojii Ass Risaach | Solar energy converter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62232831A (ja) | 1987-10-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |