JPH05326673A - Apparatus and method for conveying pellet - Google Patents

Abstract

PURPOSE:To obtain an apparatus and a method for separating an adhesive tape and a pellet easily peelably without trouble at the time of raising a plunge-up needle in an apparatus and a method for conveying the pellet by an adhesive tape sucking jig. CONSTITUTION:The apparatus for conveying a pellet comprises an adhesive tape sucking jig 5 capable of reducing an inner pressure from a suction port 8 by evacuating means, a spherical protrusion 4 provided at a shaft 7 of a ceiling of the jig to support the pellet 2 fixed to an adhesive tape 3 in a plunged up state, and a lifting needle 6 so sliding as to vertically move through a center of the protrusion to plunge up the pellet 2 through the tape.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conveying device and a conveying method for pellets such as semiconductor elements, and more particularly to a conveying device and a conveying method for a pellet for storing the pellet in a storage tray or mounting it on a lead frame or the like. It is about.

[0002]

2. Description of the Related Art As a known example of a conventional pellet conveying method, there is, for example, Japanese Patent Application Laid-Open No. 3-30442 (name: transfer method of chip parts). As known from this document, in the conventional pellet conveying means, for example, in the manufacture of a semiconductor device, a wafer in which semiconductor elements are regularly arranged on a substrate made of Si or the like is subjected to a post-process (for example, a pellet bonding process). Etc.), so-called dicing is performed for dividing each semiconductor element into a plurality of pellets having a regular shape. After this dicing, in order to maintain the plurality of pellets in a predetermined posture and positional relationship, the back surface of the wafer is closely fixed to the adhesive surface of the adhesive tape of the adhesive tape attachment jig used as the pellet conveying device. ..

FIG. 6 is a cross-sectional view of an essential part schematically showing a conventional pellet conveying device. As shown in FIG. 6, the adhesive tape suction jig 5 of the main body portion of the pellet conveying device is formed of a sealed body having a ceiling plate 11 and a bottom plate (not shown). A hole 11a through which the push-up needle 12 can penetrate is provided in the center of the ceiling plate 11, and the tip of the push-up needle 12 can be moved up and down from the upper surface of the ceiling plate 11 by a vertical movement mechanism (not shown). And this jig has a suction port 8
Is provided, and when the tip of the push-up needle 12 is pulled in through the hole 11a and the non-adhesive surface of the adhesive tape contacts the ceiling plate 11, a vacuum pump (not shown) from the suction port 8 is provided.
If the air is exhausted by, for example, the pressure inside is reduced, and the pressure difference from the outside causes the pressure sensitive adhesive tape 13 to be attracted and fixed to the pressure sensitive adhesive tape suction jig (hereinafter, suction jig) 5 at a predetermined position. Is becoming The collet 9 shown on the upper side facing the jig is a collet for receiving the pellet 10 on the adhesive tape 13 by a method described later.

In the above-mentioned structure, after the back surface of the wafer is fixed in close contact with the adhesive surface of the adhesive tape in another apparatus, the wafer is diced to divide the wafer into a plurality of pellets. Further, the pellets 10 adhered on the adhesive tape 13 after the adjustment work of expanding the interval between the divided pellets on one tape by a usual process.
FIG. 6 shows a state in which is attached to the pellet conveying device.

As shown in FIG. 6, of the pellets 10 arranged on the adhesive surface of the adhesive tape 13, when the pellet 10 to be transported to another place is present at the center of the ceiling plate 11, When the air is exhausted through the suction port 8, the adhesive tape 13 together with the pellet 10 is fixed on the jig 5. In this state, when the push-up needle 12 is lifted and pushed up from the lower surface of the pellet 10, the adhesive tape 13 initially floats above the ceiling plate 11 while being in close contact with the pellet 10 (this state is shown in FIG. 6). .. When the push-up needle 12 is further raised so that the tip thereof penetrates the adhesive tape 13, the pellet 10 is detached from the adhesive tape 13, and almost all but the tip of the push-up needle 12 is removed. It will be in the state of being detached. In this case, the collet 9 standing by above the pellet 10 adsorbs the pellet 10, so that the pellet 10 is transported to another portion by the collet 9. The exhaust from the suction port 8 is stopped, the next pellet is set at a predetermined position, and the same operation as described above is performed, whereby the pellet is successively conveyed to other parts.

[0006]

When the adhesive force of the adhesive tape is increased or the adhesive area of the pellet is increased in the above-described conventional pellet conveying device and conveying method, the adhesive tape is penetrated. There is a problem that the pellet is not detached from the adhesive tape only by lifting the pellet by the ascending needle and detaching it from the adhesive tape and adsorbing it by the collet waiting above the pellet. In addition, since the adhesive force is strong when the adhesive tape is pushed up by penetrating the adhesive tape with a push-up needle, there is a problem that an excessive impact is applied to the back surface of the pellet and the pellet is scratched or chipped.

The present invention has been made in order to solve the above-mentioned problems, and is provided with a mechanism for reducing the adhesive force between the adhesive tape and the pellet when the push-up needle is raised, and the pellet is smoothly pulled from the adhesive tape. An object of the present invention is to provide a pellet conveying device that can be peeled off and a conveying method thereof.

[0008]

SUMMARY OF THE INVENTION A pellet conveying apparatus according to the present invention comprises a mounting jig for an adhesive tape whose internal pressure can be reduced by exhaust means, and an adhesive tape provided on the ceiling of the mounting jig. A spherical protrusion that supports the fixed pellet in a pushed-up state and a push-up needle that slides through the center of this spherical protrusion and that pushes out the adhesive tape and peels the pellet upward from the adhesive tape. And has.

Further, according to the pellet conveying method of the present invention, the center of a plurality of spherical protrusions symmetrically arranged apart from each other on the upper portion of the attachment jig of the adhesive tape arranged to face the collet. Holding the pellet fixed on the adhesive tape on the top, after peeling off the adhesive tape portion of the area between the spherical protrusions from the pellet by the internal decompression means of the attachment means,
The collet is peeled off in the collet direction by using a pellet push-up means mainly composed of a push-up needle that is slidably provided through the spherical protrusion.

[0010]

According to the present invention, in a device and method for conveying pellets to a pellet storage and mounting device, a plurality of spherical protrusions are provided on a surface of an adsorption jig for adsorbing the adhesive tape, the surface being in contact with the adhesive tape. Since the pellet is detached from the adhesive tape by providing a means for raising the push-up needle from the spherical convex center, the spherical convex shape of the pellet fixed to the adhesive tape is first caused by the pressure reduction inside the suction jig. The convex portion other than the place in contact with the raised convex portion is partially peeled off due to the pressure difference. When the pellet is pushed up by the push-up needle of the raised portion by the next operation, the adhesive area of this portion is small, so that the pellet can be easily peeled off from the adhesive tape.

[0011]

1 and 5 are schematic explanatory views showing an embodiment of a pellet conveying device according to the present invention. FIG. 1 is a longitudinal sectional view of a main part, and FIG. 5 is a top view thereof. In both figures, the adhesive tape suction jig 5 is provided with a suction port 8 for vacuum suction in the lower part, and a projection 4 having a plurality of spherical surfaces on the upper surface. They are movably engaged so that they can be spaced at arbitrary intervals (Fig. 5).
reference). The protrusion 4 is 0.0 from the upper plane of the suction jig 5.
It is arranged so as to project by about 5 to 1 mm. Further, a slide guide hole is provided at the center of the protrusion 4 so that the push-up needle 6 can be moved up and down. Then, the plurality of push-up needles 6 are attached so that a slide guide hole provided in the center of the protrusion 4 can be moved up and down by a vertical moving means (not shown). In the pellet conveying device having the above structure, first, the individually divided pellets 2 on the adhesive tape 3 are positioned at the center of the suction jig 5 by a positioning device (not shown).

The operation of the pellet conveying apparatus having the above-mentioned structure will be described below, but the explanation of the embodiment of the pellet conveying method according to the present invention will be replaced with the operation explanation. Figure 2
FIG. 4 is an operation state diagram showing in sequence the operation of the pellet conveying device according to the present invention.

1 to 4, after the pellet 2 is positioned on the suction jig 5 as shown in FIG. 1, as shown in FIG. 2, vacuum suction is performed from the suction port 8 by a vacuum pump or the like (white thick arrow). Then, the adhesive tape 3 is adsorbed on the upper surface of the adsorption jig 5, and the tape is peeled off from the pellet 2 in a state where the pellet 2 is supported only by the apexes of the protrusions 4. Next, as shown in FIG. 3, when the plurality of push-up needles 6 are lifted up and their tip portions penetrate the adhesive tape 3, the pellet 2 is completely separated from the adhesive tape 3, and the pellet 2 waits upward. Be brought in. Then, as shown in FIG. 4, at the same time, while the collet 1 holds the pellet 2 by vacuum suction, the storage trace at a predetermined position is moved to the lead frame and transferred for storage or mounting.
That is, the present apparatus is designed to repeat this carrying operation sequentially for each pellet.

As described above, the adsorption jig having the plurality of spherical protrusions and the push-up needles associated therewith facilitates the separation (peeling) of the pellets from the adhesive tape, and the push-up needles are used to remove the adhesive tape. It was possible to develop a pellet conveying apparatus and a pellet conveying method that alleviate the impact on the pellet that occurs when it penetrates and pushes up and does not cause scratches or chips on the pellet. In addition, in the above-mentioned embodiment, the case where the number of spherical protrusions is four is shown, but it is needless to say that the present invention is not limited to this.

[0015]

As described in detail above, according to the pellet conveying apparatus and the pellet conveying method of the present invention, i) a plurality of spherical protrusions is provided on the suction jig. Since the means for raising the push-up needle from the center is provided, it is easier to remove the pellet from the adhesive tape, and the impact force applied to the pellet during push-up of the pellet is reduced, resulting in damage to the pellet. ,
Reduction of chipping can be achieved.

[Brief description of drawings]

FIG. 1 is a sectional view of an essential part showing an embodiment of the present invention.

FIG. 2 is an operation state explanatory diagram (part 1) of the apparatus according to the embodiment of FIG.

FIG. 3 is an operation state explanatory diagram (part 2) of the apparatus according to the embodiment of FIG.

FIG. 4 is an operational state explanatory diagram (part 3) of the apparatus according to the embodiment of FIG. 1;

5 is a top view of the apparatus according to the embodiment of FIG. 1. FIG.

FIG. 6 is a sectional view of a main part of a conventional pellet conveying device.

[Explanation of symbols]

 1,9 Collet 2,10 Pellet 3,13 Adhesive tape 4 Convex 5 Adhesive tape suction jig 6,12 Push-up needle 7 Shaft 8 Suction port 11 Ceiling board 11a Hole

Claims (2)

[Claims] 1. A jig for mounting an adhesive tape, which is configured to be capable of decompressing the inside by an exhaust means, and a state in which a pellet provided on a ceiling portion of the mounting jig and adhesively fixed to the adhesive tape is pushed up. And a push-up needle that is slidably provided through the center of the spherical projection and that pushes out the adhesive tape and pulls the pellets held from the adhesive tape upward. A pellet conveying device characterized by having. 2. The adhesive tape is adhered and fixed to the central portions of a plurality of spherical protrusions symmetrically arranged on the upper part of a jig for attaching the adhesive tape arranged to face the collet. After holding the pellet and peeling off the adhesive tape portion in the region between the spherical projections from the pellet by the internal pressure reducing means provided in the mounting jig, the push-up slidably provided through the spherical projection. A method of transporting pellets, characterized in that the pellets are pulled up in the collet direction by using a pellet pushing-up means including needles.