JPH053052B2 - - Google Patents
Info
- Publication number
- JPH053052B2 JPH053052B2 JP57230340A JP23034082A JPH053052B2 JP H053052 B2 JPH053052 B2 JP H053052B2 JP 57230340 A JP57230340 A JP 57230340A JP 23034082 A JP23034082 A JP 23034082A JP H053052 B2 JPH053052 B2 JP H053052B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic recording
- oxygen gas
- cylindrical
- recording medium
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005291 magnetic effect Effects 0.000 claims description 40
- 230000008021 deposition Effects 0.000 claims description 26
- 238000001704 evaporation Methods 0.000 claims description 23
- 239000003302 ferromagnetic material Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 21
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 230000005294 ferromagnetic effect Effects 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 240000002989 Euphorbia neriifolia Species 0.000 claims 1
- 239000007789 gas Substances 0.000 description 43
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 38
- 229910001882 dioxygen Inorganic materials 0.000 description 38
- 238000000151 deposition Methods 0.000 description 25
- 238000007738 vacuum evaporation Methods 0.000 description 22
- 230000008020 evaporation Effects 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 12
- 230000002265 prevention Effects 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 229910000990 Ni alloy Inorganic materials 0.000 description 3
- ZGDWHDKHJKZZIQ-UHFFFAOYSA-N cobalt nickel Chemical compound [Co].[Ni].[Ni].[Ni] ZGDWHDKHJKZZIQ-UHFFFAOYSA-N 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
- 229920000728 polyester Polymers 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
この発明は強磁性金属薄膜層を記録層とする磁
気記録媒体の製造方法に関し、その目的とすると
ころは特に磁気特性に優れた前記の磁気記録媒体
の製造方法を提供することにある。
強磁性金属薄膜層を記録層とする磁気記録媒体
は、通常、プラスチツクフイルムなどの基板を真
空蒸着装置内に取りつけた円筒状キヤンの周側面
に沿つて移動させ、この基板に強磁性材料を真空
蒸着することによつてつくられており、磁気特性
に優れた前記の磁気記録媒体を製造する場合に
は、斜め入射蒸着を行なつたり、また基板近傍に
種々の方法で酸素ガスを導入して酸素ガス雰囲気
中で真空蒸着したりしている。
ところが、単に斜め入射蒸着を行なうだけでは
それほど大きな保磁力が得られず、また従来の方
法で基板近傍を酸素ガス雰囲気にして真空蒸着を
行なう場合にも保磁力が充分に向上されない。
この発明者らはかかる現状に鑑み種々検討を行
なつた結果、真空雰囲気内で、円筒状キヤンの周
側面に沿つて移動する基板に、強磁性材を加熱蒸
発させて得た蒸気流をその入射角が20°以上とな
るように差し向けるとともに、最小入射角となる
部分に集中的に酸素ガス等の反応性ガスを吹きつ
け、反応性ガスの分圧と強磁性材の蒸着速度の比
（反応性ガス分圧／蒸着速度）を１×10-5〜１×
10-8トール・sec／Åの範囲内にして真空蒸着を
行うと、保磁力および角型の良好な強磁性金属薄
膜層が形成されて磁気特性に優れた磁気記録媒体
が得られることを見いだし、この発明をなすに至
つた。
即ち、この発明は真空蒸着を斜め入射蒸着によ
つて行なうとともにこの斜め入射蒸着時に最小入
射角となる部分に集中的に酸素ガス等の反応性ガ
スを吹きつけ、反応性ガスの分圧と強磁性材の蒸
着速度の比（反応性ガス分圧／蒸着速度）を１×
10-5〜１×10-8トール・sec／Åの範囲内にする
ことを特徴とするもので、反応性ガスを特に最小
入射角となる部分に集中的に吹きつけることによ
つて強磁性材と反応性ガスとの反応性蒸着を一段
と効率よくするとともに強磁性材を基板状に良好
に折出させて保磁力および角型を一段と向上した
ものである。
以下、図面を参照しながらこの発明について説
明する。
第１図は真空蒸着装置の断面図を示したもので
あり、１は真空槽でこの真空槽１の内部は排気系
２により真空に保持される。３は真空槽１の中央
部に配設された円筒状キヤンであり、プラスチツ
クフイルム等の基板４は原反ロール５よりガイド
ローラ６を介してこの円筒状キヤン３の周側面に
沿つて移動し、ガイドローラ７を介して巻き取り
ロール８に巻き取られる。この間円筒状キヤン３
の周側面に沿つて移動する基板４に対向して真空
槽１の下底に配設された強磁性材蒸発源９で強磁
性材１０が加熱蒸発され、この蒸発が円筒状キヤ
ン３の下方に設置された防着板１１の作用で基板
４に斜め入射蒸着されるが、このとき同時に円筒
状キヤン３の近傍に導入配設されたガス導入管１
２から最小入射角となる部分に反応性ガスが集中
的に吹きつけられる。このように反応性ガスが最
小入射角となる部分に集中的に吹きつけられると
基板４上に折出される強磁性材粒子の初期の成長
が阻害されることもなく、折出速度の最も早い最
小入射角となる部分で反応性ガスが最も有効に作
用するため強磁性材と反応性ガスとの反応性蒸着
が効率よく行なわれ、保持力および角型が一段と
優れた磁気記録媒体が得られる。
斜め入射蒸着する際の入射角αは、20°より小
さくすると基板４上に析出する強磁性材の成長が
良好に行なわれず保磁力を充分に向上することが
できないため20°以上にするのが好ましい。
また、斜め入射蒸着の際、基板４に吹きつける
反応性ガスは最小入射角とする部分に集中的に吹
きつけるのが好ましく、この部分では強磁性材の
折出速度が最も早く反応性ガスが最も有効に作用
するため強磁性材と反応性ガスとの反応性蒸着が
効率よく行なわれ、保持力および角型が一段と向
上する。これに対して反応性ガスを最大入射角と
なる部分に吹きつけた場合には基板上に折出する
強磁性材粒子の初期の成長が阻害されてかえつて
保磁力および角型が低下し、また円筒状キヤンの
周側面に沿つて移動する基板に均一に差し向けた
のでは保磁力および角型を充分に向上することが
できない。
最小入射角となる部分に吹きつける反応性ガス
のガス圧は、強磁性材の蒸着速度と密接に関係
し、反応性ガスの分圧と蒸着速度の比（反応性ガ
ス分圧／蒸着速度）と得られる磁気記録媒体の保
磁力とは相関関係があつてこの比の値が１×10-5
〜１×10-8トール・sec／Åのとき最も良好な保
磁力が得られる。このためこのような条件下で斜
め入射蒸着を行なうのが好ましく、このような方
法で真空蒸着を行なうと真空槽内全体を反応性ガ
ス雰囲気に保持する場合に比べて格段と保磁力お
よび角型が向上される。
反応性ガスとしては、酸素ガスが良好なものと
して使用され、この他窒素ガス、アルゴンガス、
ヘリウムガス等も好適なものとして使用される。
基板としては、ポリエステル、ポリイミド、ポ
リアミド等一般に使用されている高分子成形物か
らなるプラスチツクスフイルムおよび銅などの非
磁性金属からなる金属フイルムが使用され、ま
た、強磁性金属薄膜層を形成する強磁性材として
は、コバルト、ニツケル、鉄などの金属単体の
他、これらの合金あるいは酸化物、およびCo−
Ｐ、Co−Ni−Ｐなど一般に真空蒸着に使用され
る強磁性材がいずれも使用される。
次に、この発明の実施例について説明する。
実施例 １
第１図に示す真空蒸着装置を使用し、約10μ厚
のポリエステルベースフイルム４を、原反ロール
５よりガイドローラ６を介して直径25cmの円筒状
キヤン３の周側面に沿つて移動させ、ガイドロー
ラ７を介して巻き取りロール８に巻き取るように
セツトするとともに、蒸発源９内にコバルト−ニ
ツケル合金（重量比８：２）１０をセツトした。
次いで排気系２で真空槽１内を約５×10-6トール
にまで真空排気し、コバルト−ニツケル合金１０
を加熱蒸発させて入射角50°で斜め入射蒸着を開
始すると同時に、ガス導入管１２か最小入射角と
なる部分に酸素ガスを種々にガス圧を変化させて
吹きつけ、ポリエステルベースフイルム４上にコ
バルト−ニツケル合金からなる磁性層を形成して
多数の磁気記録媒体をつくつた。なおガス導入管
１２はそのノズル先端から円筒状キヤン３の軸心
までの距離が20cmとなるように配設して使用し
た。
第２図はこのようにして得られた磁気記録媒体
の保磁力と、蒸着時の酸素ガス分圧と蒸着速度の
比（酸素ガス分圧／蒸着速度）との関係をグラフ
で表わしたものであり、このグラフから明らかな
ように、この比の値が５×10-5〜２×10-8の範囲
内では比較的高い保磁力が得られるのがわかる。
実施例 ２
実施例１において、蒸着速度を600Å／secと一
定にし、ガス導入管から吹きつける酸素ガスの圧
力を種々に変えた以外は実施例１と同様にして多
数の磁気記録媒体をつくつた。
実施例 ３
実施例２において、ガス導入管のノズル先端か
ら円筒状キヤンの軸心に至る距離を15cmに変更し
た以外は実施例２と同様にして多数の磁気記録媒
体をつくつた。
実施例 ４
実施例２において、ガス導入管のノズル先端か
ら円筒状キヤンの軸心に至る距離を25cmに変更し
た以外は実施例２と同様にして多数の磁気記録媒
体をつくつた。
第３図および第４図はそれぞれ実施例２乃至４
で得られた磁気記録媒体の保磁力と酸素ガス圧と
の関係および角型比と酸素ガス圧との関係をグラ
フで表わしたものであり、グラフＡは実施例２で
得られた磁気記録媒体、グラフＢは実施例３で得
られた磁気記録媒体、グラフＣは実施例４で得ら
れた磁気記録媒体のそれぞれの関係をグラフで示
したものである。
これらのグラフから明らかなようにガス導入管
のノズル先端から円筒状キヤンの軸心に至る距離
の変更によつて最適な酸素ガス圧が若干変動する
ものの保磁力および角型がいずれも高く、このこ
とからこの発明によれば磁気特性に優れた磁気記
録媒体が得られるのがわかる。
比較例 １
第１図に示す真空蒸着装置に代えて、第５図に
示すように円筒状キヤン３の近傍に３本の並行な
ガス導入枝管１２ａ，１２ｂ，１２ｃを導入配設
した真空蒸着装置を使用し、これらのガス導入枝
管１２ａ，１２ｂ，１２ｃから円筒状キヤン周側
面の基板４の被蒸着面に酸素ガスをそのガス圧を
種々に変えながら均一に差し向けた以外は実施例
２と同様にして多数の磁気記録媒体をつくつた。
第６図および第７図はこのようにして得られた
磁気記録媒体の保磁力と酸素ガス圧との関係およ
び角型比と酸素ガス圧との関係をグラフで表わし
たものである。これらのグラフから明らかなよう
に、保磁力は酸素ガス圧が高くなるに従つて高く
なるものの角型比は逆に低くなり、角型比をそれ
ほど低下せずに保磁力を500エルステツド以上に
することは難かしく、このことからたとえ斜め入
射蒸着によるものであつても酸素ガスを基板の被
蒸着面に均一に差し向けたのでは保磁力および角
型比を充分に向上できないことがわかる。
比較例 ２
実施例１において使用する第１図の真空蒸着装
置に代えて、第８図に示すように防着板１１ａ，
１１ｂを円筒状キヤン３の近傍両側に配設すると
ともに強磁性材蒸発源９を円筒状キヤン３の直下
に配設し、かつガス導入管１２ｄを円筒状キヤン
３の近傍に配設した真空蒸着装置を使用し、ガス
導入管１２ｄから酸素ガスを基板４の被蒸着面に
均一に差し向け、酸素ガス分圧と蒸着速度の比
（酸素ガス分圧／蒸着速度）を２×10-7トール・
sec／Åとした以外は実施例１と同様にして磁気
記録媒体をつくつた。
比較例 ３
実施例１において使用する第１図の真空蒸着装
置に代えて、第９図に示すように、防着板１１ｃ
を円筒状キヤン３の下方に配設するとともに、強
磁性材蒸発源９を円筒状キヤン３の直下に配設
し、かつ防着板１１ｃの上方円筒状キヤン３側に
ガス導入管１２ｅを配設した真空蒸着装置を使用
し、ガス導入管１２ｅから酸素ガスを円筒状キヤ
ン３の接線方向に吹きつけ、酸素ガス分圧と蒸着
速度の比（酸素ガス分圧／蒸着速度）を２×10-7
トール・sec／Åとした以外は、実施例１と同様
にして磁気記録媒体をつくつた。
比較例 ４
実施例１において使用する第１図の真空蒸着装
置に代えて、第１０図に示すように、防着板１１
ｄを円筒状キヤン３の下方に配設するとともに、
強磁性材蒸発源９を円筒状キヤン３の直下に配設
し、かつ円筒状キヤン３の周面に沿つてガス導入
管１２ｆを配設した真空蒸着装置を使用し、ガス
導入管１２ｆに設けた多数のガス吹き出し口12ｇ
から酸素ガスを最小入射角となる部分に最も多く
なるように調整しながら吹きつけ、酸素ガス分圧
と蒸着速度の比（酸素ガス分圧／蒸着速度）を２
×10-7トール・sec／Åとした以外は、実施例１
と同様にして磁気記録媒体をつくつた。
比較例 ５
実施例１において使用する第１図の真空蒸着装
置に代えて、第１１図に示すように、防着板１１
ｅを円筒状キヤン３の下方に配設するとともに、
強磁性材蒸発源９を円筒状キヤン３の直下に配設
し、かつ防着板１１ｅの下面に沿つてガス導入管
１２ｈを配設した真空蒸着装置を使用し、ガス導
入管１２ｈの先端から酸素ガスを噴射し、酸素ガ
ス分圧と蒸着速度の比（酸素ガス分圧／蒸着速
度）を２×10-7トール・sec／Åとした以外は、
実施例１と同様にして磁気記録媒体をつくつた。
実施例１で酸素ガス分圧と蒸着速度の比（酸素
ガス分圧／蒸着速度）を２×10-7トール・sec／
Åとして得られた磁気記録媒体（試料１）と比較
例２ないし５で得られた磁気記録媒体について保
磁力および角型比を測定した。
下表はその結果である。
The present invention relates to a method of manufacturing a magnetic recording medium having a ferromagnetic metal thin film layer as a recording layer, and an object of the invention is to provide a method of manufacturing the above-mentioned magnetic recording medium particularly having excellent magnetic properties. A magnetic recording medium with a ferromagnetic metal thin film layer as a recording layer is usually produced by moving a substrate such as a plastic film along the circumferential side of a cylindrical can installed in a vacuum evaporation device, and depositing a ferromagnetic material onto this substrate under vacuum. When manufacturing the above-mentioned magnetic recording medium, which is made by vapor deposition and has excellent magnetic properties, it is possible to perform oblique incidence vapor deposition or introduce oxygen gas near the substrate by various methods. Vacuum deposition is performed in an oxygen gas atmosphere. However, simply performing oblique incidence evaporation does not provide a very large coercive force, and the conventional method of performing vacuum evaporation in an oxygen gas atmosphere near the substrate does not sufficiently improve the coercive force. The inventors conducted various studies in view of the current situation, and found that a vapor flow obtained by heating and vaporizing a ferromagnetic material was applied to a substrate moving along the circumferential side of a cylindrical can in a vacuum atmosphere. The angle of incidence is 20° or more, and a reactive gas such as oxygen gas is sprayed concentratedly on the area where the angle of incidence is minimum, and the ratio of the partial pressure of the reactive gas to the deposition rate of the ferromagnetic material is determined. (Reactive gas partial pressure/evaporation rate) from 1×10 -5 to 1×
It was discovered that when vacuum evaporation is performed within the range of 10 -8 Torr sec/Å, a ferromagnetic metal thin film layer with good coercive force and square shape is formed, and a magnetic recording medium with excellent magnetic properties can be obtained. , and came to make this invention. That is, this invention performs vacuum evaporation by oblique incidence evaporation, and during this oblique incidence evaporation, a reactive gas such as oxygen gas is sprayed concentratedly at the part where the angle of incidence is the minimum, and the partial pressure and intensity of the reactive gas are adjusted. The ratio of deposition rate of magnetic material (reactive gas partial pressure/deposition rate) is 1×
10 -5 to 1 × 10 -8 Torr・sec/Å, and it is characterized by the fact that the ferromagnetism is achieved by blowing a reactive gas concentratedly on the part where the angle of incidence is the minimum. The reactive vapor deposition of the material and the reactive gas is made more efficient, and the ferromagnetic material is better deposited into the substrate shape, thereby further improving the coercive force and square shape. The present invention will be described below with reference to the drawings. FIG. 1 shows a cross-sectional view of a vacuum evaporation apparatus, in which numeral 1 denotes a vacuum chamber, and the inside of the vacuum chamber 1 is maintained in a vacuum by an exhaust system 2. 3 is a cylindrical can disposed in the center of the vacuum chamber 1, and a substrate 4 such as a plastic film is moved along the circumferential side of the cylindrical can 3 from a raw roll 5 via a guide roller 6. , and is wound onto a winding roll 8 via a guide roller 7. During this time, the cylindrical can 3
The ferromagnetic material 10 is heated and evaporated by a ferromagnetic material evaporation source 9 disposed at the bottom of the vacuum chamber 1 facing the substrate 4 moving along the circumferential side of the can. Due to the action of the deposition prevention plate 11 installed at
From 2 onwards, the reactive gas is sprayed intensively onto the part where the angle of incidence is the minimum. In this way, when the reactive gas is blown intensively to the part where the incident angle is the minimum, the initial growth of the ferromagnetic material particles deposited on the substrate 4 is not inhibited, and the deposition rate is the fastest. Since the reactive gas acts most effectively at the part where the incident angle is the minimum, reactive vapor deposition between the ferromagnetic material and the reactive gas is performed efficiently, resulting in a magnetic recording medium with even better coercive force and square shape. . When performing oblique incidence deposition, the incident angle α should be set to 20° or more because if it is smaller than 20°, the ferromagnetic material deposited on the substrate 4 will not grow well and the coercive force will not be sufficiently improved. preferable. In addition, during oblique incidence deposition, it is preferable that the reactive gas blown onto the substrate 4 be concentrated on the part where the angle of incidence is the minimum, and in this part the deposition rate of the ferromagnetic material is fastest and the reactive gas is blown onto the substrate 4. Because it works most effectively, the reactive vapor deposition of the ferromagnetic material and the reactive gas is performed efficiently, further improving the coercive force and square shape. On the other hand, if the reactive gas is blown onto the part where the incident angle is maximum, the initial growth of the ferromagnetic material particles deposited on the substrate will be inhibited, and the coercive force and squareness will decrease. Furthermore, if the beam is uniformly directed at the substrate moving along the circumferential side of the cylindrical can, the coercive force and square shape cannot be sufficiently improved. The gas pressure of the reactive gas that is blown onto the part with the minimum incidence angle is closely related to the deposition rate of the ferromagnetic material, and is the ratio of the reactive gas partial pressure to the deposition rate (reactive gas partial pressure/deposition rate). There is a correlation between the coercive force of the magnetic recording medium obtained and the value of this ratio is 1×10 -5
The best coercive force is obtained when it is ~1×10 −8 Tor·sec/Å. For this reason, it is preferable to perform oblique incidence evaporation under these conditions. When vacuum evaporation is performed using this method, the coercivity and rectangular shape are significantly reduced compared to when the entire vacuum chamber is maintained in a reactive gas atmosphere. is improved. As a reactive gas, oxygen gas is used as a good one, and other gases such as nitrogen gas, argon gas,
Helium gas and the like are also suitably used. As substrates, plastic films made of commonly used polymer moldings such as polyester, polyimide, polyamide, etc., and metal films made of non-magnetic metals such as copper are used. Magnetic materials include single metals such as cobalt, nickel, and iron, as well as their alloys or oxides, and Co-
Any ferromagnetic material commonly used in vacuum deposition, such as P or Co-Ni-P, can be used. Next, embodiments of the invention will be described. Example 1 Using the vacuum evaporation apparatus shown in FIG. 1, a polyester base film 4 with a thickness of approximately 10 μm was moved from a raw roll 5 via a guide roller 6 along the circumferential side of a cylindrical can 3 with a diameter of 25 cm. The material was then set so as to be wound onto a take-up roll 8 via a guide roller 7, and a cobalt-nickel alloy (weight ratio 8:2) 10 was set in the evaporation source 9.
Next, the inside of the vacuum chamber 1 is evacuated to approximately 5×10 -6 Torr using the exhaust system 2, and the cobalt-nickel alloy 10
At the same time, oxygen gas is blown onto the polyester base film 4 by heating and evaporating it and starting oblique incidence deposition at an incident angle of 50°.At the same time, oxygen gas is sprayed at various gas pressures onto the gas introduction pipe 12 or the part where the minimum incidence angle is found. A large number of magnetic recording media were created by forming a magnetic layer made of a cobalt-nickel alloy. The gas introduction pipe 12 was used so that the distance from its nozzle tip to the axis of the cylindrical can 3 was 20 cm. Figure 2 is a graph showing the relationship between the coercive force of the magnetic recording medium obtained in this way and the ratio of the oxygen gas partial pressure during vapor deposition to the vapor deposition rate (oxygen gas partial pressure/evaporation rate). As is clear from this graph, a relatively high coercive force can be obtained when the value of this ratio is within the range of 5×10 −5 to 2×10 −8 . Example 2 A large number of magnetic recording media were manufactured in the same manner as in Example 1, except that the deposition rate was kept constant at 600 Å/sec and the pressure of oxygen gas blown from the gas introduction tube was varied. . Example 3 A large number of magnetic recording media were manufactured in the same manner as in Example 2, except that the distance from the nozzle tip of the gas introduction tube to the axis of the cylindrical can was changed to 15 cm. Example 4 A large number of magnetic recording media were manufactured in the same manner as in Example 2, except that the distance from the nozzle tip of the gas introduction tube to the axis of the cylindrical can was changed to 25 cm. 3 and 4 are examples 2 to 4, respectively.
Graph A shows the relationship between coercive force and oxygen gas pressure and the relationship between squareness ratio and oxygen gas pressure of the magnetic recording medium obtained in Example 2. Graph A is for the magnetic recording medium obtained in Example 2. , graph B is a graph showing the relationship between the magnetic recording medium obtained in Example 3, and graph C is a graph showing the relationship between the magnetic recording medium obtained in Example 4. As is clear from these graphs, although the optimal oxygen gas pressure varies slightly by changing the distance from the nozzle tip of the gas introduction tube to the axis of the cylindrical can, both coercive force and square shape are high, and this This shows that according to the present invention, a magnetic recording medium with excellent magnetic properties can be obtained. Comparative Example 1 Instead of the vacuum evaporation apparatus shown in FIG. 1, three parallel gas introduction branch pipes 12a, 12b, and 12c were installed near the cylindrical can 3 as shown in FIG. 5 for vacuum evaporation. Example except that oxygen gas was uniformly directed to the deposition surface of the substrate 4 on the circumferential side of the cylindrical can from these gas introduction branch pipes 12a, 12b, and 12c using a device while varying the gas pressure. A large number of magnetic recording media were made in the same manner as in 2. FIGS. 6 and 7 are graphical representations of the relationship between coercive force and oxygen gas pressure and the relationship between squareness ratio and oxygen gas pressure of the magnetic recording medium thus obtained. As is clear from these graphs, although the coercive force increases as the oxygen gas pressure increases, the squareness ratio decreases, and the coercive force can be increased to 500 oersted or more without significantly decreasing the squareness ratio. This shows that even if oblique incidence evaporation is used, the coercive force and squareness ratio cannot be sufficiently improved by uniformly directing oxygen gas to the surface of the substrate to be evaporated. Comparative Example 2 In place of the vacuum evaporation apparatus shown in FIG. 1 used in Example 1, a deposition prevention plate 11a, as shown in FIG. 8, was used.
11b are arranged on both sides near the cylindrical can 3, a ferromagnetic material evaporation source 9 is arranged directly below the cylindrical can 3, and a gas introduction pipe 12d is arranged near the cylindrical can 3. Using the device, oxygen gas is uniformly directed to the deposition surface of the substrate 4 from the gas introduction pipe 12d, and the ratio of oxygen gas partial pressure to deposition rate (oxygen gas partial pressure/deposition rate) is set to 2×10 -7 Torr.・
A magnetic recording medium was produced in the same manner as in Example 1 except that the ratio was sec/Å. Comparative Example 3 Instead of the vacuum evaporation device shown in FIG. 1 used in Example 1, as shown in FIG. 9, a deposition prevention plate 11c was used.
is disposed below the cylindrical can 3, a ferromagnetic material evaporation source 9 is disposed directly below the cylindrical can 3, and a gas introduction pipe 12e is disposed above the deposition prevention plate 11c on the side of the cylindrical can 3. Using the provided vacuum evaporation equipment, oxygen gas is blown in the tangential direction of the cylindrical can 3 from the gas introduction pipe 12e, and the ratio of oxygen gas partial pressure to evaporation rate (oxygen gas partial pressure/evaporation rate) is 2×10. -7
A magnetic recording medium was produced in the same manner as in Example 1, except that Tor·sec/Å was used. Comparative Example 4 Instead of the vacuum evaporation apparatus shown in FIG. 1 used in Example 1, a deposition prevention plate 11 was used as shown in FIG. 10.
d is disposed below the cylindrical can 3, and
A vacuum evaporation device is used in which a ferromagnetic material evaporation source 9 is arranged directly below the cylindrical can 3 and a gas introduction pipe 12f is arranged along the circumferential surface of the cylindrical can 3. Multiple gas outlets 12g
Then, adjust the amount of oxygen gas to the part with the minimum incident angle so that it is the most abundant, and then adjust the ratio of oxygen gas partial pressure to evaporation rate (oxygen gas partial pressure/evaporation rate) to 2.
Example 1 except that ×10 -7 Tor·sec/Å
He created a magnetic recording medium in the same way. Comparative Example 5 Instead of the vacuum evaporation apparatus shown in FIG. 1 used in Example 1, a deposition prevention plate 11 was used as shown in FIG.
e is disposed below the cylindrical can 3, and
A vacuum evaporation apparatus is used in which a ferromagnetic material evaporation source 9 is disposed directly below the cylindrical can 3 and a gas introduction pipe 12h is arranged along the lower surface of the deposition prevention plate 11e. Except for injecting oxygen gas and setting the ratio of oxygen gas partial pressure to evaporation rate (oxygen gas partial pressure/deposition rate) to 2×10 -7 Torr·sec/Å.
A magnetic recording medium was produced in the same manner as in Example 1. In Example 1, the ratio between oxygen gas partial pressure and evaporation rate (oxygen gas partial pressure/evaporation rate) was set to 2×10 -7 Torr・sec/
The coercive force and squareness ratio of the magnetic recording medium obtained as Å (Sample 1) and the magnetic recording media obtained in Comparative Examples 2 to 5 were measured. The table below shows the results.
【表】
上表から明らかなように、この発明で得られた
磁気記録媒体（試料１）は従来の磁気記録媒体
（比較例２ないし５）に比し保磁力および角型比
がいずれも高く、このことからこの発明方法によ
れば一段と磁気特性に優れた磁気記録媒体が得ら
れるのがわかる。[Table] As is clear from the above table, the magnetic recording medium obtained by the present invention (Sample 1) has higher coercive force and squareness ratio than the conventional magnetic recording media (Comparative Examples 2 to 5). From this, it can be seen that according to the method of the present invention, a magnetic recording medium with even better magnetic properties can be obtained.
第１図はこの発明の製造方法を実施するために
使用する真空蒸着装置の概略断面図、第２図は実
施例１の製造方法によつて得られた磁気記録媒体
の保磁力と、製造時の酸素ガス分圧／蒸着速度と
の関係図、第３図は実施例２で得られた磁気記録
媒体の保磁力と酸素ガス圧との関係図、第４図は
同磁気記録媒体の角型比と酸素ガス圧との関係
図、第５図は比較例１の製造方法を実施するため
に使用する真空蒸着装置の概略断面図、第６図は
比較例１で得られた磁気記録媒体の保磁力と酸素
ガス圧との関係図、第７図は同磁気記録媒体の角
型比と酸素ガス圧との関係図、第８図は比較例２
の製造方法を実施するために使用する真空蒸着装
置の概略断面図、第９図は比較例３の製造方法を
実施するために使用する真空蒸着装置の概略断面
図、第１０図は比較例４の製造方法を実施するた
めに使用する真空蒸着装置の概略断面図、第１１
図は比較例５の製造方法を実施するために使用す
る真空蒸着装置の概略断面図である。
１……真空槽、３……円筒状キヤン、４……基
板、９……蒸発源、１０……強磁性材、１１……
防着板、１２……ガス導入管。
FIG. 1 is a schematic cross-sectional view of a vacuum evaporation apparatus used to carry out the manufacturing method of the present invention, and FIG. 2 shows the coercive force of the magnetic recording medium obtained by the manufacturing method of Example 1 and the manufacturing time. FIG. 3 is a diagram showing the relationship between the coercive force and oxygen gas pressure of the magnetic recording medium obtained in Example 2, and FIG. 4 is a diagram showing the relationship between the coercive force and oxygen gas pressure of the magnetic recording medium obtained in Example 2. 5 is a schematic cross-sectional view of the vacuum evaporation apparatus used to carry out the manufacturing method of Comparative Example 1, and FIG. 6 is a diagram of the relationship between the ratio and oxygen gas pressure. Figure 7 is a diagram showing the relationship between coercive force and oxygen gas pressure. Figure 7 is a diagram showing the relationship between squareness ratio and oxygen gas pressure of the same magnetic recording medium. Figure 8 is Comparative Example 2.
9 is a schematic sectional view of a vacuum evaporation apparatus used to carry out the manufacturing method of Comparative Example 3, and FIG. 10 is a schematic sectional view of a vacuum evaporation apparatus used to carry out the manufacturing method of Comparative Example 3. Schematic sectional view of a vacuum evaporation apparatus used to carry out the manufacturing method, No. 11
The figure is a schematic cross-sectional view of a vacuum evaporation apparatus used to carry out the manufacturing method of Comparative Example 5. DESCRIPTION OF SYMBOLS 1... Vacuum chamber, 3... Cylindrical can, 4... Substrate, 9... Evaporation source, 10... Ferromagnetic material, 11...
Anti-adhesion plate, 12...Gas introduction pipe.
Claims (1)
つて移動する基板に、強磁性材を加熱蒸発させて
得た蒸気流をその入射角が20°以上となるように
差し向けるとともに、最小入射角となる部分に集
中的に反応性ガスを吹きつけ、反応性ガスの分圧
と強磁性材の蒸着速度の比（反応性ガス分圧／蒸
着速度）を１×10-5〜１×10-8トール・sec／Å
の範囲内にして、基板上に強磁性金属薄膜層を形
成することを特徴とする磁気記録媒体の製造方
法。1 In a vacuum atmosphere, a vapor flow obtained by heating and evaporating a ferromagnetic material is directed onto a substrate moving along the circumferential side of a cylindrical can so that the incident angle is 20° or more, and the minimum incident angle is Reactive gas is sprayed intensively on the corners, and the ratio of the partial pressure of the reactive gas to the deposition rate of the ferromagnetic material (reactive gas partial pressure/deposition rate) is set to 1×10 -5 to 1×10 -8 Thor・sec/Å
1. A method of manufacturing a magnetic recording medium, comprising forming a ferromagnetic metal thin film layer on a substrate within the range of .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23034082A JPS59124035A (en) | 1982-12-30 | 1982-12-30 | Manufacture of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23034082A JPS59124035A (en) | 1982-12-30 | 1982-12-30 | Manufacture of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59124035A JPS59124035A (en) | 1984-07-18 |
| JPH053052B2 true JPH053052B2 (en) | 1993-01-13 |
Family
ID=16906305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23034082A Granted JPS59124035A (en) | 1982-12-30 | 1982-12-30 | Manufacture of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59124035A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0685216B2 (en) * | 1985-04-11 | 1994-10-26 | 富士写真フイルム株式会社 | Method of manufacturing magnetic recording medium |
| JP2650300B2 (en) * | 1988-02-19 | 1997-09-03 | ソニー株式会社 | Method for manufacturing perpendicular magnetic recording medium |
| JP2988188B2 (en) * | 1992-09-09 | 1999-12-06 | 松下電器産業株式会社 | Magnetic recording medium and method of manufacturing the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5832234A (en) * | 1981-08-20 | 1983-02-25 | Matsushita Electric Ind Co Ltd | Production of magnetic recording medium |
| JPS5837843A (en) * | 1981-08-31 | 1983-03-05 | Sony Corp | Production of magnetic recording medium |
-
1982
- 1982-12-30 JP JP23034082A patent/JPS59124035A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5832234A (en) * | 1981-08-20 | 1983-02-25 | Matsushita Electric Ind Co Ltd | Production of magnetic recording medium |
| JPS5837843A (en) * | 1981-08-31 | 1983-03-05 | Sony Corp | Production of magnetic recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59124035A (en) | 1984-07-18 |
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