JPH0530357Y2 - - Google Patents
Info
- Publication number
- JPH0530357Y2 JPH0530357Y2 JP15529987U JP15529987U JPH0530357Y2 JP H0530357 Y2 JPH0530357 Y2 JP H0530357Y2 JP 15529987 U JP15529987 U JP 15529987U JP 15529987 U JP15529987 U JP 15529987U JP H0530357 Y2 JPH0530357 Y2 JP H0530357Y2
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- reaction tube
- internal
- oxide film
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010453 quartz Substances 0.000 description 57
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 57
- 239000012495 reaction gas Substances 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 11
- 239000007789 gas Substances 0.000 description 9
- 230000003028 elevating effect Effects 0.000 description 8
- 239000002245 particle Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15529987U JPH0530357Y2 (US07902200-20110308-C00004.png) | 1987-10-09 | 1987-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15529987U JPH0530357Y2 (US07902200-20110308-C00004.png) | 1987-10-09 | 1987-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0160533U JPH0160533U (US07902200-20110308-C00004.png) | 1989-04-17 |
| JPH0530357Y2 true JPH0530357Y2 (US07902200-20110308-C00004.png) | 1993-08-03 |
Family
ID=31432805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15529987U Expired - Lifetime JPH0530357Y2 (US07902200-20110308-C00004.png) | 1987-10-09 | 1987-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530357Y2 (US07902200-20110308-C00004.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4593814B2 (ja) * | 2001-03-19 | 2010-12-08 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
-
1987
- 1987-10-09 JP JP15529987U patent/JPH0530357Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0160533U (US07902200-20110308-C00004.png) | 1989-04-17 |
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