JPH0530354Y2 - - Google Patents
Info
- Publication number
- JPH0530354Y2 JPH0530354Y2 JP1986000430U JP43086U JPH0530354Y2 JP H0530354 Y2 JPH0530354 Y2 JP H0530354Y2 JP 1986000430 U JP1986000430 U JP 1986000430U JP 43086 U JP43086 U JP 43086U JP H0530354 Y2 JPH0530354 Y2 JP H0530354Y2
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- reactor core
- cap body
- reaction gas
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 32
- 239000012495 reaction gas Substances 0.000 claims description 23
- 239000000376 reactant Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 18
- 238000002347 injection Methods 0.000 claims description 9
- 239000007924 injection Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986000430U JPH0530354Y2 (es) | 1986-01-07 | 1986-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986000430U JPH0530354Y2 (es) | 1986-01-07 | 1986-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62112137U JPS62112137U (es) | 1987-07-17 |
| JPH0530354Y2 true JPH0530354Y2 (es) | 1993-08-03 |
Family
ID=30777397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986000430U Expired - Lifetime JPH0530354Y2 (es) | 1986-01-07 | 1986-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530354Y2 (es) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5973496A (ja) * | 1982-10-19 | 1984-04-25 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
-
1986
- 1986-01-07 JP JP1986000430U patent/JPH0530354Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5973496A (ja) * | 1982-10-19 | 1984-04-25 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62112137U (es) | 1987-07-17 |
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