JPS62112137U - - Google Patents
Info
- Publication number
- JPS62112137U JPS62112137U JP43086U JP43086U JPS62112137U JP S62112137 U JPS62112137 U JP S62112137U JP 43086 U JP43086 U JP 43086U JP 43086 U JP43086 U JP 43086U JP S62112137 U JPS62112137 U JP S62112137U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- core tube
- reactor core
- reactive gas
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000376 reactant Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986000430U JPH0530354Y2 (es) | 1986-01-07 | 1986-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986000430U JPH0530354Y2 (es) | 1986-01-07 | 1986-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62112137U true JPS62112137U (es) | 1987-07-17 |
| JPH0530354Y2 JPH0530354Y2 (es) | 1993-08-03 |
Family
ID=30777397
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986000430U Expired - Lifetime JPH0530354Y2 (es) | 1986-01-07 | 1986-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530354Y2 (es) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5973496A (ja) * | 1982-10-19 | 1984-04-25 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
-
1986
- 1986-01-07 JP JP1986000430U patent/JPH0530354Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5973496A (ja) * | 1982-10-19 | 1984-04-25 | Matsushita Electric Ind Co Ltd | 気相成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530354Y2 (es) | 1993-08-03 |
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