JPH0530349Y2 - - Google Patents

Info

Publication number
JPH0530349Y2
JPH0530349Y2 JP595688U JP595688U JPH0530349Y2 JP H0530349 Y2 JPH0530349 Y2 JP H0530349Y2 JP 595688 U JP595688 U JP 595688U JP 595688 U JP595688 U JP 595688U JP H0530349 Y2 JPH0530349 Y2 JP H0530349Y2
Authority
JP
Japan
Prior art keywords
wafer
light
resist
light guide
guide fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP595688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01112037U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP595688U priority Critical patent/JPH0530349Y2/ja
Publication of JPH01112037U publication Critical patent/JPH01112037U/ja
Application granted granted Critical
Publication of JPH0530349Y2 publication Critical patent/JPH0530349Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP595688U 1988-01-22 1988-01-22 Expired - Lifetime JPH0530349Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP595688U JPH0530349Y2 (OSRAM) 1988-01-22 1988-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP595688U JPH0530349Y2 (OSRAM) 1988-01-22 1988-01-22

Publications (2)

Publication Number Publication Date
JPH01112037U JPH01112037U (OSRAM) 1989-07-27
JPH0530349Y2 true JPH0530349Y2 (OSRAM) 1993-08-03

Family

ID=31209782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP595688U Expired - Lifetime JPH0530349Y2 (OSRAM) 1988-01-22 1988-01-22

Country Status (1)

Country Link
JP (1) JPH0530349Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH01112037U (OSRAM) 1989-07-27

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