JPH05301212A - Green sheet non-contact reversing device - Google Patents

Abstract

PURPOSE:To realize a device receiving a green sheet, which has been transported to a top/rear side reversing part from a transport and suction part having a non-contact sucking head, in a non-contact manner, reversing it in a non- contact manner, and delivering it to a next inspection part in a ceramic green sheet inspection system. CONSTITUTION:A non-contact reversing device consists of a frame 4, a reversing drive mechanism 5, a reversing mechanism 6, a non-contact suction mechanism 7, a rotation mechanism part 8, and a travel mechanism 9. In this manner, a green sheet 1 can be delivered from a transport and suction part 3 in a non- contact manner. In addition, the green sheet 1 can be reversed in a non-contact manner by being held in a gap between non-contact suction parts 7A and 7B. Thus, a risk of generating a defect in the green sheet is eliminated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact type reversing device in a green sheet inspection system.

[0002]

2. Description of the Related Art Recently, a mini-sized semiconductor wiring component called a micro carrier chip (MCC) has been developed. An outline of the MCC manufacturing method will be described with reference to FIG. 3 (a). Based on a ceramic green sheet 1 having an appropriate size, for example, a side length w of about 20 cm and a thickness d of about 0.2 mm, Multiple MCC1a
Pattern is printed. After sintering this at an appropriate high temperature, it is cut into individual MCCs. Defects in MCC lead to deterioration in quality, so first, individual MCCs that were inspected at the unsintered green sheet stage and then cut
Be inspected against. Since the green sheet is flexible, defects such as dust and scratches are likely to occur, so it is necessary to handle it with extreme caution.

FIG. 3 (b) shows an outline of the inspection system 2 for the green sheet 1, in which a pallet containing a plurality of uninspected green sheets is mounted on a mounting table provided in the loading section 21, Are sequentially adsorbed by the adsorption head one by one from the upper side, and are conveyed to the surface inspection unit 22 by the conveyance mechanism. Here, the front surface side is inspected, and when this is completed, it is conveyed to the front and back reversing unit 23 and inverted, and then the back surface inspection unit 24 inspects the back surface side,
Depending on whether the inspection result is good or bad, it is conveyed to the good product unloading unit 25 or the bad product unloading unit 26 and accommodated in the good product pallet or the defective product pallet. In order to prevent the occurrence of defects due to contact, a transfer mechanism that performs each of the above-described transfers uses a suction head that sucks air in a non-contact manner based on Bernoulli's principle.

FIG. 4 shows a non-contact air type suction unit 3
A plurality of non-contact suction heads 31 are arranged in the suction portion 3 corresponding to the periphery of the green sheet 1, and the air A press-fitted from the suction holes 32 is jetted from the jet surface 311 of each suction head 31.
Green sheet 1 when the ejection surface 611 is close to the proper distance
Is adsorbed by air without contact.

[0005]

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention As described above,
Since defects are likely to occur in the green sheet, it is necessary to perform reversal by a non-contact method also in the front / back surface reversing section 23. If it is a contact type, the reversing operation is easy,
In the case of non-contact, some kind of ingenuity is required. On the other hand, it is effective to make two pairs of suction units having non-contact suction heads face each other with a certain gap, hold the green sheet in this gap in a non-contact manner, and invert both suction units at once. it is conceivable that. The present invention has been made based on the above idea, and receives a green sheet conveyed to a delivery position by a conveyance adsorption section having a non-contact adsorption head in a non-contact manner, and inverts the sheet in a non-contact manner to deliver the green sheet to the next inspection section. It is an object of the present invention to provide a reversing device that can be transported to the inside.

[0006]

SUMMARY OF THE INVENTION The present invention is a non-contact reversing device for a green sheet in the above inspection system, which comprises a reversing mechanism having two sets of guide rails and a gap for holding the green sheet in a non-contact manner. And face each other,
It is provided with two sets of air-type non-contact suction sections (hereinafter simply referred to as suction sections) that can be moved back and forth along the guide rails.
The reversing mechanism reciprocates between the rotation mechanism that rotates the upper suction part by reversing the reversing mechanism and opens the top end of the reversing mechanism, and the lower suction part by reversing the green sheet transfer position. And a moving mechanism that operates.

[0007]

In the non-contact reversing device described above, one of the two adsorbing portions is on the upper side and the other is on the lower side. When the reversing mechanism inverts the two, the upper side and the lower side are switched. The upper suction portion is rotated by the rotation mechanism to open the tip end upward. Further, the lower suction unit is moved back and forth by the moving mechanism along one guide rail of the reversing mechanism. When receiving the green sheet, first, the air injection of the upper suction unit is stopped, and the suction unit is rotated by the rotation mechanism to open the tip end upward. Then, the suction unit on the lower side is moved forward by the moving mechanism and stopped at the delivery position, and the green sheet conveyed to this position is suction-exchanged and received by the suction unit for conveyance without contact. In this suction replacement, if the air is jetted from the lower suction section and the air suction from the transport suction section approaching this is stopped to eliminate the suction force, the green sheet will not contact the lower side. Adsorbed. Then, the lower suction portion returns to the original position even when retracted, and when the rotation mechanism of the upper suction portion is rotated in the opposite direction, the open tip is closed and the lower suction portion is closed. Face each other with a gap in between. Here, when the upper suction unit ejects air to perform the suction operation, the green sheet is sandwiched in the middle of the gap without contact. In this state, when the adsorption unit is inverted by the inversion mechanism, the front surface and the back surface of the green sheet are vertically inverted. Next, at the time of delivery, the air injection of the suction portion that is on the upper side due to the above-mentioned reversal is stopped, the tip is opened, and the green sheet is suctioned only to the lower suction portion without contact. The moving mechanism moves the lower suction portion forward and stops at the delivery position, and the green sheet is suction-exchanged with the suction portion for transportation without contact. As described above, the green sheet is delivered in a non-contact manner to the transport suction section, and is also sandwiched in the gap between the upper and lower suction sections in a non-contact manner so that the front surface and the back surface are reversed and a defect occurs in the green sheet. Danger is avoided.

[0008]

1 is a vertical sectional view of an embodiment of the present invention, and FIG. 2 is an explanatory view of a green sheet reversing procedure in FIG. The non-contact reversing device 10 shown in FIG.
The frame 4, the reversing drive mechanism 5, the reversing mechanism 6, the non-contact suction mechanism 7, the rotating mechanism section 8, and the moving mechanism 9. The frame 4 is composed of a base plate 41, side plates 42 and hollow discs 43 fixed to the base plate 41. The inversion drive mechanism 5 includes a Geneva gear 52 in which a rotating shaft 51 is supported by a side plate 42,
It is composed of a rotating arm 53 that engages with this and a motor 54 that rotates the rotating arm 51, and one rotation of the rotating arm 53 causes the rotating shaft 51 to rotate exactly 180 °. Inversion mechanism 6
Is a disk 61 fixed to the rotary shaft 51 and supported by a plurality of rollers 621 in contact with the circumference, two sets of guide rails 631 and 632 fixed to the disk 61, and provided at the tip of each guide rail. , A plurality of rollers 64 contacting the hollow disc 43
1 and support plates 661 and 662 having moving elements 651 and 652 that slide along the guide rails 631 and 632, respectively. The non-contact suction mechanism 7 is configured by attaching two sets of non-contact suction parts 7A and 7B to each support plate,
Each of the suction portions 7A and 7B has a transport suction portion 3 of FIG.
Similarly, a plurality of non-contact air suction heads 71 are arranged. The rear end of each suction part is a mounting plate 721,722.
A stopper 73 is provided at the tip end of the green sheet 1 so that the suction heads 71 of both suction portions form a constant gap, and the green sheet 1 is sandwiched in the gap without contact. Next, the rotating mechanism section 7 is composed of rotating mechanisms 81 and 8 provided for the respective suction sections 7A and 7B, and the respective rotating mechanisms include the support plates 661 and 662.
The rotary actuators 811 and 821 are attached to and the coupling arms 812 and 814 are coupled to the suction portions 7A and 7B, respectively. Further, in the moving mechanism 9, engagement tools 91 and 92 having engagement protrusions 911 and 912 are fixed to the rear ends of the above-mentioned respective support plates, while the motor 93 fixed to the base board 41.
And a moving arm 94, 95 connected to its rotation axis, and a mover 97 attached to the tip of the driving arm 95 and moving along the slide rod 96, with which either the protrusion 911 or 921 is engaged. And consists of. In the figure, the suction part 7B
Is on the lower side, and the protrusion 921 of the engaging portion 92 is engaged with the mover 97, and the rotation of the motor 93 causes the drive arms 94, 95 to rotate.
Moves the mover 97 left and right, and the suction portion 7B reciprocates (arrows F and B) between the transfer position of the green sheet 1 shown by the dotted line.

A non-contact method for transferring and reversing the green sheet 1 will be described with reference to FIGS. 1 and 2. In FIG. 1, it is assumed that both suction portions 7A and 7B are in the illustrated state, and the green sheet 1 is not held in the gap between both suction portions. When the rotary actuator 811 of the rotating mechanism 81 is operated to rotate in the direction of arrow C, the upper suction portion 7A
Is opened in the direction of arrow E around the pivot point of the mounting plate 721, and when the lower suction portion 7B moves forward as shown by arrow F and stops at the delivery position by the operation of the moving mechanism 9, The state of FIG. 2 is obtained. At the transfer position, the green sheet 1 is adsorbed and conveyed by the conveyance adsorption unit 3 in a non-contact manner. , The suction portion 3 descends as indicated by the arrow D, the green sheet 1 is suction-exchanged by the suction portion 7B by the control of the air injection described above, and then the suction portion 3 moves up by the arrow U and the suction portion 7B. Will return to its original position when it retreats as indicated by arrow B. At this time, the rotary actuator 811 is rotated in the reverse direction and the suction unit 7 is rotated.
When the tip of A is closed in the direction of arrow G, and the suction portion 7A further injects air, the green sheet 1 is sandwiched in the gap between the two without contact. Then, when the reversing mechanism 6 is driven by the reversing drive mechanism 5 to reverse, both the suction portions 7A and 7B are reversed by the arrow R, so that the front surface and the back surface of the green sheet 1 are reversed. In, the tip end of the suction portion 7B that has become the upper side by reversing is opened and the lower suction portion 7A is moved forward, and as shown in, the suction portion 3 is lowered and the green sheet 1 is sucked and replaced. Ascend and transport to the inspection section. As a result, the non-contact delivery and reversal of the green sheet 1 is completed, and both the suction portions 7A and 7B return to the state of and wait for the next green sheet.

[0010]

As described above, according to the non-contact reversing device according to the present invention, the green sheet is delivered in a non-contact manner to the transport suction portion, and is not in the gap between the upper and lower suction portions. It is sandwiched by the contact and the front and back surfaces are reversed, which avoids the risk of defects in the green sheet and contributes to the improvement of the reliability of the ceramic green sheet inspection system for micro carrier chips. Is big.

[Brief description of drawings]

FIG. 1 shows a vertical sectional view in an embodiment of the present invention.

FIG. 2 is an explanatory diagram of a green sheet delivery and reversal procedure with respect to FIG.

FIG. 3A is an explanatory diagram of a micro carrier chip (MCC) formed on a ceramic green sheet, and FIG. 3B is an outline configuration diagram of an inspection system for the green sheet.

FIG. 4 is an explanatory diagram of a non-contact air type suction unit for conveying a green sheet.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Ceramic green sheet, 1a ... Micro carrier chip, 2 ... Green sheet inspection system, 3 ... Adsorption part for conveyance, 31 ... Adsorption head, 311 ... Injection surface, 32 ... Suction hole, 4 ... Frame, 41 ... base plate, 42 ... side plate, 43 ... hollow disc, 5 ... reversing drive mechanism, 51 ... rotating shaft, 52
... Geneva gear, 53 ... Rotating arm, 54 ... Motor, 6 ... Inversion mechanism, 61 ... Disc, 621, 621, 641, 641 ... Roller, 631, 63
2 ... Guide rail, 651, 652 ... Mover, 661, 662 ... Support plate, 7 ... Non-contact suction mechanism, 7A, 7B ... Non-contact suction part,
71 ... Suction head, 721,722 ... Mounting plate, 73 ... Stopper, 8 ... Rotation mechanism section, 81,82 ... Rotation mechanism, 811,821 ... Rotary actuator, 812,822 ... Coupling arm, 9 ... Movement mechanism, 91,92 ... Engagement Tool, 911,921 ... Engaging projection, 93 ... Motor, 94,95 ... Drive arm, 96 ... Slide bar, 97 ... Mover, 10 ... Non-contact reversing device of this invention.

Claims (1)

[Claims] 1. An inspection system for a ceramic green sheet used for a semiconductor component, wherein the green sheet is adsorbed to a non-contact air type adsorption head and conveyed, and two sets of guide rails are provided. And a reversing mechanism having two pairs of air-type non-contact adsorbing portions that face each other with a gap for sandwiching the green sheet in a non-contact manner and that can move back and forth along the guide rail. The green sheet delivery position is defined by a rotating mechanism that rotates the upper non-contact adsorption portion by reversing the reversing mechanism and opens the tip of the non-contact adsorption portion upward, and a lower non-contact adsorption portion by the reversal. A non-contact reversing device for a green sheet, characterized in that it is provided with a moving mechanism for reciprocating between it and.