JPH0310251A - Plate-like work carrier device - Google Patents

Plate-like work carrier device

Info

Publication number
JPH0310251A
JPH0310251A JP14424689A JP14424689A JPH0310251A JP H0310251 A JPH0310251 A JP H0310251A JP 14424689 A JP14424689 A JP 14424689A JP 14424689 A JP14424689 A JP 14424689A JP H0310251 A JPH0310251 A JP H0310251A
Authority
JP
Japan
Prior art keywords
work
plate
carrying
holding
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14424689A
Inventor
Noboru Horie
Yasuhiro Ito
Satoru Iwama
Toshiyuki Kozuka
Hiroshi Suzuki
Original Assignee
Hitachi Electron Eng Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electron Eng Co Ltd filed Critical Hitachi Electron Eng Co Ltd
Priority to JP14424689A priority Critical patent/JPH0310251A/en
Publication of JPH0310251A publication Critical patent/JPH0310251A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To improve the reliability of the carrying and to shorten carrying time by providing a holding and carrying mean with four carrier claws which inwardly moving the means from the outside of a plate-like work at a prescribed stroke with the aid of a driving mechanism, oppositely pinching the four coner parts and supporting the corners from bottom surface sides.
CONSTITUTION: The device moves inwardly from the outside of the plate-like work 1 at a prescribed stroke with the aid of the driving mechanism and oppositely pinches its four corners. The plate-like work 1 is held by the holding/ carrying means 2 provided with four carrier claws 12 which support the corner parts from the bottom sides. The holding/carrying means 2 can be raised, sent, lowered and returned between a first work stage 16 and other work stage 17, and the plate-like work 1 can be carried from the first stage 16 to other work stage 17. Therefore, the rellabillity of carrying the plate-like work 1 can be improved, and the carrying time can be shortened.
COPYRIGHT: (C)1991,JPO&Japio
JP14424689A 1989-06-08 1989-06-08 Plate-like work carrier device Pending JPH0310251A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14424689A JPH0310251A (en) 1989-06-08 1989-06-08 Plate-like work carrier device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14424689A JPH0310251A (en) 1989-06-08 1989-06-08 Plate-like work carrier device

Publications (1)

Publication Number Publication Date
JPH0310251A true JPH0310251A (en) 1991-01-17

Family

ID=15357640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14424689A Pending JPH0310251A (en) 1989-06-08 1989-06-08 Plate-like work carrier device

Country Status (1)

Country Link
JP (1) JPH0310251A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018110271A (en) * 2009-05-15 2018-07-12 株式会社ニコン Mobile device, exposure device, device manufacturing method, and method for manufacturing flat panel display

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018110271A (en) * 2009-05-15 2018-07-12 株式会社ニコン Mobile device, exposure device, device manufacturing method, and method for manufacturing flat panel display

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