JPH0530023Y2 - - Google Patents
Info
- Publication number
- JPH0530023Y2 JPH0530023Y2 JP8553886U JP8553886U JPH0530023Y2 JP H0530023 Y2 JPH0530023 Y2 JP H0530023Y2 JP 8553886 U JP8553886 U JP 8553886U JP 8553886 U JP8553886 U JP 8553886U JP H0530023 Y2 JPH0530023 Y2 JP H0530023Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- semiconductor wafer
- holder
- wafer holder
- conveyor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 64
- 210000000078 claw Anatomy 0.000 claims description 20
- 235000012431 wafers Nutrition 0.000 description 129
- 238000004544 sputter deposition Methods 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Special Conveying (AREA)
- Specific Conveyance Elements (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8553886U JPH0530023Y2 (enrdf_load_html_response) | 1986-06-05 | 1986-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8553886U JPH0530023Y2 (enrdf_load_html_response) | 1986-06-05 | 1986-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62197639U JPS62197639U (enrdf_load_html_response) | 1987-12-16 |
| JPH0530023Y2 true JPH0530023Y2 (enrdf_load_html_response) | 1993-07-30 |
Family
ID=30941035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8553886U Expired - Lifetime JPH0530023Y2 (enrdf_load_html_response) | 1986-06-05 | 1986-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530023Y2 (enrdf_load_html_response) |
-
1986
- 1986-06-05 JP JP8553886U patent/JPH0530023Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62197639U (enrdf_load_html_response) | 1987-12-16 |
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