JPH0529798B2 - - Google Patents
Info
- Publication number
- JPH0529798B2 JPH0529798B2 JP14899287A JP14899287A JPH0529798B2 JP H0529798 B2 JPH0529798 B2 JP H0529798B2 JP 14899287 A JP14899287 A JP 14899287A JP 14899287 A JP14899287 A JP 14899287A JP H0529798 B2 JPH0529798 B2 JP H0529798B2
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- gas
- pump
- exhaust
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 28
- 230000006835 compression Effects 0.000 description 20
- 238000007906 compression Methods 0.000 description 20
- 238000003780 insertion Methods 0.000 description 13
- 230000037431 insertion Effects 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000002470 thermal conductor Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14899287A JPS63314397A (ja) | 1987-06-17 | 1987-06-17 | 真空ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14899287A JPS63314397A (ja) | 1987-06-17 | 1987-06-17 | 真空ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63314397A JPS63314397A (ja) | 1988-12-22 |
| JPH0529798B2 true JPH0529798B2 (de) | 1993-05-06 |
Family
ID=15465279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14899287A Granted JPS63314397A (ja) | 1987-06-17 | 1987-06-17 | 真空ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63314397A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR950007378B1 (ko) * | 1990-04-06 | 1995-07-10 | 가부시끼 가이샤 히다찌 세이사꾸쇼 | 진공펌프 |
| JPH04330388A (ja) * | 1991-04-30 | 1992-11-18 | Ebara Corp | 真空ポンプ装置 |
| US7469617B2 (en) | 2004-07-22 | 2008-12-30 | Honda Motor Co., Ltd. | Tension compensating assembly for mechanical control cables |
-
1987
- 1987-06-17 JP JP14899287A patent/JPS63314397A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63314397A (ja) | 1988-12-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4835114A (en) | Method for LPCVD of semiconductors using oil free vacuum pumps | |
| JP4732750B2 (ja) | 真空排気装置 | |
| US6095754A (en) | Turbo-Molecular pump with metal matrix composite rotor and stator | |
| US4904155A (en) | Vacuum pump | |
| KR100861143B1 (ko) | 터보-분자 펌프, 그 펌프를 포함하는 진공 처리 시스템 및 가스 배기 장치 | |
| JP3047292B1 (ja) | ターボ分子ポンプ及び真空装置 | |
| JP4000611B2 (ja) | 真空排気システム | |
| JP3831113B2 (ja) | 真空ポンプ | |
| US20070274822A1 (en) | Vacuum Pump | |
| JPH0529798B2 (de) | ||
| JP6353257B2 (ja) | 排気口部品、および真空ポンプ | |
| US6699009B2 (en) | Vacuum pump | |
| JP3941147B2 (ja) | 真空排気装置及びそのメンテナンス方法 | |
| EP4088034A1 (de) | Vakuumpumpe, vakuumpumpensatz zum evakuieren einer halbleiterverarbeitungskammer und verfahren zum evakuieren einer halbleiterverarbeitungskammer | |
| JP4661378B2 (ja) | ターボ分子ポンプ | |
| CN115066557A (zh) | 具有弯曲转子和定子叶片的轴流式真空泵 | |
| JP4111763B2 (ja) | 縦置きスクリュー式真空ポンプ | |
| TW201932715A (zh) | 拖曳式泵及包含拖曳式泵之一組真空泵 | |
| JPS62192582A (ja) | 真空排気装置 | |
| JP2559436B2 (ja) | ガスパージつき真空ポンプ | |
| KR200274618Y1 (ko) | 반도체소자 가공용 가스에서 발생되는 화학응고물포집장치 | |
| JPH03145598A (ja) | 排気装置 | |
| JPS63266813A (ja) | 半導体装置の製造方法及びそれに使用する処理装置 | |
| JPH081191B2 (ja) | 真空ポンプ | |
| JPH01167497A (ja) | 真空ポンプ |