JPH0529601B2 - - Google Patents

Info

Publication number
JPH0529601B2
JPH0529601B2 JP28374988A JP28374988A JPH0529601B2 JP H0529601 B2 JPH0529601 B2 JP H0529601B2 JP 28374988 A JP28374988 A JP 28374988A JP 28374988 A JP28374988 A JP 28374988A JP H0529601 B2 JPH0529601 B2 JP H0529601B2
Authority
JP
Japan
Prior art keywords
gas
metal
fluoride
gaseous
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP28374988A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02133302A (ja
Inventor
Isao Harada
Toshihiko Nishitsuji
Akio Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP63283749A priority Critical patent/JPH02133302A/ja
Priority to DE68916988T priority patent/DE68916988T2/de
Priority to EP89104364A priority patent/EP0333084B1/de
Priority to US07/322,415 priority patent/US4960581A/en
Priority to CA000593574A priority patent/CA1314128C/en
Priority to KR1019890003287A priority patent/KR910004855B1/ko
Publication of JPH02133302A publication Critical patent/JPH02133302A/ja
Publication of JPH0529601B2 publication Critical patent/JPH0529601B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Chemical Vapour Deposition (AREA)
JP63283749A 1988-03-16 1988-11-11 ガス状金属弗化物の製造方法 Granted JPH02133302A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP63283749A JPH02133302A (ja) 1988-11-11 1988-11-11 ガス状金属弗化物の製造方法
DE68916988T DE68916988T2 (de) 1988-03-16 1989-03-11 Verfahren zur Herstellung von gasförmigen Fluoriden.
EP89104364A EP0333084B1 (de) 1988-03-16 1989-03-11 Verfahren zur Herstellung von gasförmigen Fluoriden
US07/322,415 US4960581A (en) 1988-03-16 1989-03-13 Method for preparing gaseous metallic fluoride
CA000593574A CA1314128C (en) 1988-03-16 1989-03-14 Method for preparing gaseous metallic fluoride
KR1019890003287A KR910004855B1 (ko) 1988-03-16 1989-03-16 가스상 금속 불화물의 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63283749A JPH02133302A (ja) 1988-11-11 1988-11-11 ガス状金属弗化物の製造方法

Publications (2)

Publication Number Publication Date
JPH02133302A JPH02133302A (ja) 1990-05-22
JPH0529601B2 true JPH0529601B2 (de) 1993-05-06

Family

ID=17669613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63283749A Granted JPH02133302A (ja) 1988-03-16 1988-11-11 ガス状金属弗化物の製造方法

Country Status (1)

Country Link
JP (1) JPH02133302A (de)

Also Published As

Publication number Publication date
JPH02133302A (ja) 1990-05-22

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