JPH0529473Y2 - - Google Patents
Info
- Publication number
- JPH0529473Y2 JPH0529473Y2 JP1986036143U JP3614386U JPH0529473Y2 JP H0529473 Y2 JPH0529473 Y2 JP H0529473Y2 JP 1986036143 U JP1986036143 U JP 1986036143U JP 3614386 U JP3614386 U JP 3614386U JP H0529473 Y2 JPH0529473 Y2 JP H0529473Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- film
- mask
- pellicle body
- antireflection layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000428 dust Substances 0.000 claims description 8
- 238000002834 transmittance Methods 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 11
- 239000012790 adhesive layer Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000001459 lithography Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000010813 municipal solid waste Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986036143U JPH0529473Y2 (US20110232667A1-20110929-C00004.png) | 1986-03-14 | 1986-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986036143U JPH0529473Y2 (US20110232667A1-20110929-C00004.png) | 1986-03-14 | 1986-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62149043U JPS62149043U (US20110232667A1-20110929-C00004.png) | 1987-09-21 |
| JPH0529473Y2 true JPH0529473Y2 (US20110232667A1-20110929-C00004.png) | 1993-07-28 |
Family
ID=30846274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986036143U Expired - Lifetime JPH0529473Y2 (US20110232667A1-20110929-C00004.png) | 1986-03-14 | 1986-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0529473Y2 (US20110232667A1-20110929-C00004.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69019268T2 (de) * | 1989-09-06 | 1995-11-09 | Du Pont | Nichtreflektierende Filmabdeckung. |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60237450A (ja) * | 1984-05-11 | 1985-11-26 | Asahi Chem Ind Co Ltd | 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法 |
-
1986
- 1986-03-14 JP JP1986036143U patent/JPH0529473Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60237450A (ja) * | 1984-05-11 | 1985-11-26 | Asahi Chem Ind Co Ltd | 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62149043U (US20110232667A1-20110929-C00004.png) | 1987-09-21 |
