JPH0529140B2 - - Google Patents
Info
- Publication number
- JPH0529140B2 JPH0529140B2 JP3695587A JP3695587A JPH0529140B2 JP H0529140 B2 JPH0529140 B2 JP H0529140B2 JP 3695587 A JP3695587 A JP 3695587A JP 3695587 A JP3695587 A JP 3695587A JP H0529140 B2 JPH0529140 B2 JP H0529140B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode terminal
- characteristic testing
- characteristic
- semiconductor substrate
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 description 19
- 239000000758 substrate Substances 0.000 description 11
- 239000000523 sample Substances 0.000 description 4
- 238000000605 extraction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3695587A JPS63204623A (ja) | 1987-02-19 | 1987-02-19 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3695587A JPS63204623A (ja) | 1987-02-19 | 1987-02-19 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63204623A JPS63204623A (ja) | 1988-08-24 |
JPH0529140B2 true JPH0529140B2 (enrdf_load_html_response) | 1993-04-28 |
Family
ID=12484166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3695587A Granted JPS63204623A (ja) | 1987-02-19 | 1987-02-19 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63204623A (enrdf_load_html_response) |
-
1987
- 1987-02-19 JP JP3695587A patent/JPS63204623A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS63204623A (ja) | 1988-08-24 |
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