JPH0528823B2 - - Google Patents
Info
- Publication number
- JPH0528823B2 JPH0528823B2 JP9851885A JP9851885A JPH0528823B2 JP H0528823 B2 JPH0528823 B2 JP H0528823B2 JP 9851885 A JP9851885 A JP 9851885A JP 9851885 A JP9851885 A JP 9851885A JP H0528823 B2 JPH0528823 B2 JP H0528823B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- transparent substrate
- mask material
- defect inspection
- silicide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60098518A JPS61255025A (ja) | 1985-05-07 | 1985-05-07 | 欠陥検査用ウエハマスク材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60098518A JPS61255025A (ja) | 1985-05-07 | 1985-05-07 | 欠陥検査用ウエハマスク材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61255025A JPS61255025A (ja) | 1986-11-12 |
| JPH0528823B2 true JPH0528823B2 (cs) | 1993-04-27 |
Family
ID=14221869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60098518A Granted JPS61255025A (ja) | 1985-05-07 | 1985-05-07 | 欠陥検査用ウエハマスク材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61255025A (cs) |
-
1985
- 1985-05-07 JP JP60098518A patent/JPS61255025A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61255025A (ja) | 1986-11-12 |
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