JPH0528755Y2 - - Google Patents

Info

Publication number
JPH0528755Y2
JPH0528755Y2 JP1986097448U JP9744886U JPH0528755Y2 JP H0528755 Y2 JPH0528755 Y2 JP H0528755Y2 JP 1986097448 U JP1986097448 U JP 1986097448U JP 9744886 U JP9744886 U JP 9744886U JP H0528755 Y2 JPH0528755 Y2 JP H0528755Y2
Authority
JP
Japan
Prior art keywords
wafer
quartz glass
end opening
glass tube
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986097448U
Other languages
English (en)
Japanese (ja)
Other versions
JPS633136U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986097448U priority Critical patent/JPH0528755Y2/ja
Publication of JPS633136U publication Critical patent/JPS633136U/ja
Application granted granted Critical
Publication of JPH0528755Y2 publication Critical patent/JPH0528755Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986097448U 1986-06-24 1986-06-24 Expired - Lifetime JPH0528755Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986097448U JPH0528755Y2 (cs) 1986-06-24 1986-06-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986097448U JPH0528755Y2 (cs) 1986-06-24 1986-06-24

Publications (2)

Publication Number Publication Date
JPS633136U JPS633136U (cs) 1988-01-11
JPH0528755Y2 true JPH0528755Y2 (cs) 1993-07-23

Family

ID=30964375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986097448U Expired - Lifetime JPH0528755Y2 (cs) 1986-06-24 1986-06-24

Country Status (1)

Country Link
JP (1) JPH0528755Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5588323A (en) * 1978-12-27 1980-07-04 Hitachi Ltd Manufacture of semiconductor device
JPH0719136Y2 (ja) * 1985-03-15 1995-05-01 東芝機械株式会社 シリンダ型気相成長装置

Also Published As

Publication number Publication date
JPS633136U (cs) 1988-01-11

Similar Documents

Publication Publication Date Title
US5587019A (en) Apparatus for use in epitaxial crystal growth
US7699934B2 (en) Epitaxial wafer production apparatus and susceptor structure
US7314526B1 (en) Reaction chamber for an epitaxial reactor
US20230354478A1 (en) Methods for semiconductor wafer processing using a radiant heat cap in a semiconductor wafer reactor
RU2006101147A (ru) Устройство для выращивания кристаллов карбида кремния
JP2002521817A (ja) 赤外線透過性熱リアクタカバー部材
JPH0528755Y2 (cs)
JPS6227725B2 (cs)
JPH09260298A (ja) 半導体製造装置の反応ガス導入ノズル支持構造
JP4031601B2 (ja) 縦型熱処理装置
JP3203536B2 (ja) 縦型熱処理装置
JP2615081B2 (ja) 縦型熱処理炉
JPH03130366A (ja) 炭化珪素膜製造装置
JPS6327426B2 (cs)
JPH0544825B2 (cs)
JP2575742B2 (ja) 熱処理炉
JPS6054443A (ja) プラズマ気相成長装置
JPH0625000Y2 (ja) 炉芯管構造
JPH0310596B2 (cs)
JPH03291916A (ja) サセプタ
JP3837073B2 (ja) 半導体製造装置
JPH07183223A (ja) エピタキシヤル成長装置
JPH11240795A (ja) エピタキシャル成長装置
JPH0691018B2 (ja) 光励起処理装置
KR20050005035A (ko) 화학기상증착 공정용 반도체소자 제조설비