JPH0528071B2 - - Google Patents
Info
- Publication number
- JPH0528071B2 JPH0528071B2 JP60096225A JP9622585A JPH0528071B2 JP H0528071 B2 JPH0528071 B2 JP H0528071B2 JP 60096225 A JP60096225 A JP 60096225A JP 9622585 A JP9622585 A JP 9622585A JP H0528071 B2 JPH0528071 B2 JP H0528071B2
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive
- clamp
- disk
- control device
- piezoelectric actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60096225A JPS61258679A (ja) | 1985-05-07 | 1985-05-07 | 回転角制御装置 |
| US06/860,392 US4714855A (en) | 1985-05-07 | 1986-05-07 | Piezo-electric actuator and stepping device using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60096225A JPS61258679A (ja) | 1985-05-07 | 1985-05-07 | 回転角制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61258679A JPS61258679A (ja) | 1986-11-17 |
| JPH0528071B2 true JPH0528071B2 (enExample) | 1993-04-23 |
Family
ID=14159289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60096225A Granted JPS61258679A (ja) | 1985-05-07 | 1985-05-07 | 回転角制御装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4714855A (enExample) |
| JP (1) | JPS61258679A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014155461A1 (ja) * | 2013-03-26 | 2014-10-02 | 富士フイルム株式会社 | 撮像レンズおよび撮像装置 |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2525019B2 (ja) * | 1987-06-05 | 1996-08-14 | アルプス電気株式会社 | 超音波リニアモ―タ |
| JPH0295180A (ja) * | 1988-09-29 | 1990-04-05 | Canon Inc | 尺取り虫型駆動機構 |
| US5049775A (en) * | 1988-09-30 | 1991-09-17 | Boston University | Integrated micromechanical piezoelectric motor |
| JPH0767292B2 (ja) * | 1989-05-17 | 1995-07-19 | シーケーデイ株式会社 | 圧電または磁歪素子を用いたアクチュエータ |
| US5314175A (en) * | 1990-02-27 | 1994-05-24 | Matsushita Electric Industrial Co., Ltd. | Wire clamping device and wire clamping method |
| US5017820A (en) * | 1990-04-23 | 1991-05-21 | Rockwell International Corporation | Piezoelectric rotary union system |
| US5068566A (en) * | 1990-06-04 | 1991-11-26 | Rockwell International Corporation | Electric traction motor |
| JPH04275850A (ja) * | 1991-02-28 | 1992-10-01 | Nec Corp | 位置決め機構 |
| US5319257A (en) * | 1992-07-13 | 1994-06-07 | Martin Marietta Energy Systems, Inc. | Unitaxial constant velocity microactuator |
| EP0592030B1 (en) * | 1992-10-02 | 1998-05-20 | Koninklijke Philips Electronics N.V. | Electromechanical displacement device and actuator suitable for use in such an electromechanical displacement device |
| US5410206A (en) * | 1993-04-06 | 1995-04-25 | New Focus, Inc. | Piezoelectric actuator for optical alignment screws |
| FR2721675A1 (fr) * | 1994-06-27 | 1995-12-29 | Serge Prat | Dispositif d'entraînement en rotation utilisant plusieurs vérins de micro déplacements tangentiels. |
| JP2658930B2 (ja) * | 1994-12-27 | 1997-09-30 | 日本電気株式会社 | 圧電型回転駆動装置 |
| NL1001059C2 (nl) * | 1995-08-25 | 1997-02-27 | Stichting Fund Ond Material | Piëzo-elektrische motor. |
| US5780956A (en) * | 1996-11-12 | 1998-07-14 | Meritor Light Vehicle Systems, Inc. | Rotary piezoelectric motor for vehicle applications |
| FR2767980B1 (fr) * | 1997-09-03 | 1999-11-26 | Sfim Ind | Perfectionnements aux moteurs a vibrations |
| US6104125A (en) * | 1998-01-26 | 2000-08-15 | Industrial Technology Research Institute | Linear actuator |
| SE515985C2 (sv) * | 1999-06-13 | 2001-11-05 | Nanofactory Instruments Ab | Anordning för mikropositionering av objekt genom användning av mekanisk tröghet |
| US6246157B1 (en) * | 1999-08-23 | 2001-06-12 | Rockwell Science Center Llc | Push-pull high force piezoelectric linear motor |
| IL137206A0 (en) * | 1999-10-31 | 2001-07-24 | Nanomotion Ltd | Piezoelectric motors and motor driving configurations |
| US6836056B2 (en) * | 2000-02-04 | 2004-12-28 | Viking Technologies, L.C. | Linear motor having piezo actuators |
| US6518689B2 (en) * | 2000-02-18 | 2003-02-11 | Honeywell Federal Manufacturing & Technologies, Llc | Piezoelectric wave motor |
| AU2001243481A1 (en) | 2000-03-07 | 2001-09-17 | Viking Technologies, Inc. | Method and system for automatically tuning a stringed instrument |
| US6717332B2 (en) * | 2000-04-18 | 2004-04-06 | Viking Technologies, L.C. | Apparatus having a support structure and actuator |
| US6548938B2 (en) * | 2000-04-18 | 2003-04-15 | Viking Technologies, L.C. | Apparatus having a pair of opposing surfaces driven by a piezoelectric actuator |
| US6390104B1 (en) * | 2000-05-19 | 2002-05-21 | Steven P. Gagnon | Denture wash |
| US6429573B2 (en) | 2000-06-23 | 2002-08-06 | The Penn State Research Foundation | Smart material motor with mechanical diodes |
| US6759790B1 (en) | 2001-01-29 | 2004-07-06 | Viking Technologies, L.C. | Apparatus for moving folded-back arms having a pair of opposing surfaces in response to an electrical activation |
| US6879087B2 (en) | 2002-02-06 | 2005-04-12 | Viking Technologies, L.C. | Apparatus for moving a pair of opposing surfaces in response to an electrical activation |
| US6388364B1 (en) | 2001-03-15 | 2002-05-14 | Optovation (Canada) Corp. | Piezoelectric rotator |
| JP4758098B2 (ja) * | 2002-06-21 | 2011-08-24 | バイキング テクノロジィーズ エル.シー. | 単体圧電モータ |
| US7368856B2 (en) | 2003-04-04 | 2008-05-06 | Parker-Hannifin Corporation | Apparatus and process for optimizing work from a smart material actuator product |
| US7196453B2 (en) * | 2005-05-23 | 2007-03-27 | United States Of America As Represented By The Secretary Of The Army | High-efficiency radial piezoelectric motor |
| JP4511437B2 (ja) * | 2005-09-09 | 2010-07-28 | Necトーキン株式会社 | 音響信号発生用圧電装置 |
| WO2008087469A2 (en) * | 2007-01-18 | 2008-07-24 | Newport Corporation | Optical adjustment mounts with piezoelectric inertia driver |
| EP2112759A3 (de) * | 2008-04-21 | 2011-09-07 | Helmut Wurm | Piezoelektrischer Motor |
| DE102008034285A1 (de) * | 2008-07-22 | 2010-02-04 | Carl Zeiss Smt Ag | Aktuator zur hochpräzisen Positionierung bzw. Manipulation von Komponenten und Projektionsbelichtungsanlage für die Mikrolithographie |
| WO2012009379A2 (en) | 2010-07-15 | 2012-01-19 | Newport Corporation | Optical adjustable mounts with absolute position feedback |
| US9312790B2 (en) | 2013-09-13 | 2016-04-12 | Physik Instrumente (Pi) Gmbh & Co. Kg | Compact versatile stick-slip piezoelectric motor |
| US9425711B2 (en) | 2014-04-15 | 2016-08-23 | Newport Corporation | Integral preload mechanism for piezoelectric actuator |
| CN107210687A (zh) | 2015-01-29 | 2017-09-26 | 新港公司 | 集成式微微型电动机座架 |
| US11482658B1 (en) | 2018-06-06 | 2022-10-25 | Government Of The United States As Represented By The Secretary Of The Air Force | Piezoelectric rotary optical mount |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3666975A (en) * | 1970-05-18 | 1972-05-30 | Ultrasonic Systems | Ultrasonic motors |
| US4219755A (en) * | 1977-03-18 | 1980-08-26 | Physics International Company | Electromotive actuator |
| US4547086A (en) * | 1982-12-06 | 1985-10-15 | Nec Corporation | Piezoelectrically driven printing mechanism for dot matrix printers |
| JPS602081A (ja) * | 1983-06-16 | 1985-01-08 | Matsushita Electric Ind Co Ltd | 回転駆動アクチユエ−タ |
-
1985
- 1985-05-07 JP JP60096225A patent/JPS61258679A/ja active Granted
-
1986
- 1986-05-07 US US06/860,392 patent/US4714855A/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014155461A1 (ja) * | 2013-03-26 | 2014-10-02 | 富士フイルム株式会社 | 撮像レンズおよび撮像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61258679A (ja) | 1986-11-17 |
| US4714855A (en) | 1987-12-22 |
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