JPH05279875A - アルカリアンモニア性エッチング液によるエッチングおよび該エッチング液の再生を行うための装置と方法 - Google Patents
アルカリアンモニア性エッチング液によるエッチングおよび該エッチング液の再生を行うための装置と方法Info
- Publication number
- JPH05279875A JPH05279875A JP11708791A JP11708791A JPH05279875A JP H05279875 A JPH05279875 A JP H05279875A JP 11708791 A JP11708791 A JP 11708791A JP 11708791 A JP11708791 A JP 11708791A JP H05279875 A JPH05279875 A JP H05279875A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- waste
- processing
- liquid
- etchant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US49688890A | 1990-03-21 | 1990-03-21 | |
US496888 | 2000-02-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05279875A true JPH05279875A (ja) | 1993-10-26 |
Family
ID=23974613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11708791A Pending JPH05279875A (ja) | 1990-03-21 | 1991-02-28 | アルカリアンモニア性エッチング液によるエッチングおよび該エッチング液の再生を行うための装置と方法 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0448870A1 (de) |
JP (1) | JPH05279875A (de) |
CA (1) | CA2029444A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030012087A (ko) * | 2001-07-30 | 2003-02-12 | 일성기계공업 주식회사 | 섬유가공시 발생되는 암모니아 가스의 재사용을 위한설비시스템 |
RU2622072C1 (ru) * | 2016-01-11 | 2017-06-09 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "Пензенский государственный университет") | Способ утилизации отработанного медно-аммиачного раствора |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993009267A1 (de) * | 1991-11-09 | 1993-05-13 | Hans Höllmüller Maschinenbau GmbH & Co. | Verfahren zur regeneration eines ammoniakalischen ätzmittels sowie vorrichtung zur durchführung dieses verfahrens |
DE4339320A1 (de) * | 1993-11-18 | 1995-05-24 | Elochem Aetztechnik Gmbh | Verfahren zum beschleunigten Ätzen und Abscheiden von Metallen in ammoniakalischen Ätzanlagen |
FR2854905B1 (fr) * | 2003-05-16 | 2006-07-14 | Airbus France | Procede de recuperation du cuivre d'une solution de gravure ammoniacale usee et de regeneration d'un sel d'ammonium |
DE102006037084A1 (de) * | 2005-11-11 | 2007-05-16 | Eve Recycling Sarl | Verfahren zum Behandeln von Leiterplatten mittels einer Ätzlösung |
CN110172701B (zh) * | 2019-05-08 | 2021-02-09 | 深圳市祺鑫环保科技有限公司 | 酸性蚀刻液再生回用系统 |
CN114752940B (zh) * | 2022-04-21 | 2024-02-06 | 盛隆资源再生(无锡)有限公司 | 一种碱性含铜蚀刻废液的回收方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2133806B (en) * | 1983-01-20 | 1986-06-04 | Electricity Council | Regenerating solutions for etching copper |
DE3340342A1 (de) * | 1983-11-08 | 1985-05-15 | ELO-CHEM Ätztechnik GmbH, 7758 Meersburg | Verfahren und anlage zum regenerieren einer ammoniakalischen aetzloesung |
DE3608516A1 (de) * | 1986-03-14 | 1987-09-17 | Markus Maria Dipl In Bringmann | Vorrichtung zum kontinuierlichen elektrolytischen regenerieren einer zumindest teilweise verbrauchten kupfertetraminkomplex-aetzloesung |
DE3738022A1 (de) * | 1987-11-09 | 1989-05-18 | Holzer Walter | Verfahren zur regenerierung von alkalischen aetzmitteln und vorrichtungen zur ausuebung des verfahrens |
-
1990
- 1990-11-07 CA CA 2029444 patent/CA2029444A1/en not_active Abandoned
- 1990-12-05 EP EP90313186A patent/EP0448870A1/de not_active Withdrawn
-
1991
- 1991-02-28 JP JP11708791A patent/JPH05279875A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030012087A (ko) * | 2001-07-30 | 2003-02-12 | 일성기계공업 주식회사 | 섬유가공시 발생되는 암모니아 가스의 재사용을 위한설비시스템 |
RU2622072C1 (ru) * | 2016-01-11 | 2017-06-09 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "Пензенский государственный университет") | Способ утилизации отработанного медно-аммиачного раствора |
Also Published As
Publication number | Publication date |
---|---|
EP0448870A1 (de) | 1991-10-02 |
CA2029444A1 (en) | 1991-09-22 |
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