JPH0527939B2 - - Google Patents

Info

Publication number
JPH0527939B2
JPH0527939B2 JP60142628A JP14262885A JPH0527939B2 JP H0527939 B2 JPH0527939 B2 JP H0527939B2 JP 60142628 A JP60142628 A JP 60142628A JP 14262885 A JP14262885 A JP 14262885A JP H0527939 B2 JPH0527939 B2 JP H0527939B2
Authority
JP
Japan
Prior art keywords
substrate
laser beam
foreign matter
vacuum
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60142628A
Other languages
English (en)
Japanese (ja)
Other versions
JPS625547A (ja
Inventor
Yoshasu Maehane
Hiroyuki Yamakawa
Hideji Yoshikawa
Hiroshi Yanagida
Yutaka Matsumi
Takeshi Katagawa
Muneharu Komya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP60142628A priority Critical patent/JPS625547A/ja
Publication of JPS625547A publication Critical patent/JPS625547A/ja
Publication of JPH0527939B2 publication Critical patent/JPH0527939B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60142628A 1985-07-01 1985-07-01 基板表面上の異物観察装置 Granted JPS625547A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60142628A JPS625547A (ja) 1985-07-01 1985-07-01 基板表面上の異物観察装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60142628A JPS625547A (ja) 1985-07-01 1985-07-01 基板表面上の異物観察装置

Publications (2)

Publication Number Publication Date
JPS625547A JPS625547A (ja) 1987-01-12
JPH0527939B2 true JPH0527939B2 (de) 1993-04-22

Family

ID=15319761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60142628A Granted JPS625547A (ja) 1985-07-01 1985-07-01 基板表面上の異物観察装置

Country Status (1)

Country Link
JP (1) JPS625547A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19780186T1 (de) * 1996-01-31 1998-04-23 Advantest Corp Verfahren und Gerät zur Erfassung und Analyse von Fremdmaterialien

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833154A (ja) * 1981-08-24 1983-02-26 Hitachi Ltd 検査装置
JPS58115741A (ja) * 1981-12-28 1983-07-09 Fujitsu Ltd 複合ビ−ム照射装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5833154A (ja) * 1981-08-24 1983-02-26 Hitachi Ltd 検査装置
JPS58115741A (ja) * 1981-12-28 1983-07-09 Fujitsu Ltd 複合ビ−ム照射装置

Also Published As

Publication number Publication date
JPS625547A (ja) 1987-01-12

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Legal Events

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R250 Receipt of annual fees

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LAPS Cancellation because of no payment of annual fees