JPH051814Y2 - - Google Patents
Info
- Publication number
- JPH051814Y2 JPH051814Y2 JP10691785U JP10691785U JPH051814Y2 JP H051814 Y2 JPH051814 Y2 JP H051814Y2 JP 10691785 U JP10691785 U JP 10691785U JP 10691785 U JP10691785 U JP 10691785U JP H051814 Y2 JPH051814 Y2 JP H051814Y2
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- inspected
- window
- foreign matter
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 17
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 19
- 235000012431 wafers Nutrition 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 239000000428 dust Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10691785U JPH051814Y2 (de) | 1985-07-15 | 1985-07-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10691785U JPH051814Y2 (de) | 1985-07-15 | 1985-07-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6216463U JPS6216463U (de) | 1987-01-31 |
JPH051814Y2 true JPH051814Y2 (de) | 1993-01-18 |
Family
ID=30982717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10691785U Expired - Lifetime JPH051814Y2 (de) | 1985-07-15 | 1985-07-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH051814Y2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0518368Y2 (de) * | 1987-11-16 | 1993-05-17 |
-
1985
- 1985-07-15 JP JP10691785U patent/JPH051814Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6216463U (de) | 1987-01-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6345086B1 (en) | X-ray fluorescence system and method | |
KR850000308B1 (ko) | 물질표면의 입자를 검출하는 방법 | |
US5466945A (en) | Apparatus for detecting proper positioning of objects in a holder | |
US5355213A (en) | Inspection system for detecting surface flaws | |
GB1315654A (en) | Detection of faults in transparent material using lasers | |
JPH11501727A (ja) | 製品表面の検査システムおよび方法 | |
KR930011703B1 (ko) | 십자선 검사장치 및 방법 | |
US4330205A (en) | Optical apparatus for measuring the size and location of optical in an article | |
JP2002188999A (ja) | 異物・欠陥検出装置及び検出方法 | |
JPH051814Y2 (de) | ||
JPH051813Y2 (de) | ||
JPH051812Y2 (de) | ||
JPH10239242A (ja) | サンプルの平滑面を検査するための装置と方法 | |
JP2000214102A (ja) | 異物検出装置および異物検出装置を含むプロセスライン | |
JPS6212844A (ja) | 真空中で使用可能な表面異物検査装置 | |
JPS5837551A (ja) | 材料ウエブの検査方法及び装置 | |
CN221007330U (zh) | 一种太赫兹硅片检测装置 | |
JP2603078B2 (ja) | 欠陥検査装置 | |
JPH07229843A (ja) | 真空中表面異物検査装置 | |
JPS625547A (ja) | 基板表面上の異物観察装置 | |
JPS6211135A (ja) | 透明試料板の表面検査装置 | |
JPH09218162A (ja) | 表面欠陥検査装置 | |
JPH03152447A (ja) | 傷検査装置 | |
JPS61207951A (ja) | 透明物体欠陥検査装置 | |
JPH05215690A (ja) | 異物検査装置 |