JPH05277914A - Flat plate polishing method and its device - Google Patents

Flat plate polishing method and its device

Info

Publication number
JPH05277914A
JPH05277914A JP4110769A JP11076992A JPH05277914A JP H05277914 A JPH05277914 A JP H05277914A JP 4110769 A JP4110769 A JP 4110769A JP 11076992 A JP11076992 A JP 11076992A JP H05277914 A JPH05277914 A JP H05277914A
Authority
JP
Japan
Prior art keywords
polishing
flat plate
polished
polishing member
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4110769A
Other languages
Japanese (ja)
Other versions
JP2724427B2 (en
Inventor
Kazuo Yoshihara
一夫 吉原
Tadamasa Jojima
忠正 城島
Nobuo Yoshihara
信夫 吉原
Masateru Kanbe
応輝 掃部
Yoshito Yoshihara
義人 吉原
Yasuhiro Sawada
康弘 澤田
Kazuo Morishita
一夫 森下
Tamaki Kurano
玉樹 倉野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KANSAI PLANT KOGYO KK
Original Assignee
KANSAI PLANT KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KANSAI PLANT KOGYO KK filed Critical KANSAI PLANT KOGYO KK
Priority to JP4110769A priority Critical patent/JP2724427B2/en
Priority to CA 2093046 priority patent/CA2093046A1/en
Priority to DE1993613333 priority patent/DE69313333T2/en
Priority to EP19930105411 priority patent/EP0563954B1/en
Priority to TW82102453A priority patent/TW223601B/zh
Priority to CN 93103507 priority patent/CN1077406A/en
Publication of JPH05277914A publication Critical patent/JPH05277914A/en
Application granted granted Critical
Publication of JP2724427B2 publication Critical patent/JP2724427B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • B24B41/047Grinding heads for working on plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

PURPOSE:To provide a polishing method in which the surface of a metal or non-metal flat plate, especially a large-size flat plate, to be polished can be precisely and uniformly polished as if it were a specular surface. CONSTITUTION:A flat-plate polishing member 9 is rotated via a crank while pushing against the surface of a flat plate 10 to be polished at a preset pressure to flatly polish time surface of the flat plate 10. Since the polishing member 9 is rotated via the crank while pushing against the surface of the flat plate 10 at a preset pressure in this way, a preset pressure is uniformly distributed over the whole polished surface to allow precise, uniform and specular polishing of the flat plate, if larger.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、金属板や非金属板の表
面を平面研摩するための平板の研摩方法及びその装置に
関するもので、特に大形の平板の研摩に好適な研摩方法
及び装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat plate polishing method and a device for flatly polishing the surface of a metal plate or a non-metal plate, and particularly to a polishing method and a device suitable for polishing a large flat plate. It is about.

【0002】[0002]

【従来の技術】従来より、この種の研摩方法としては、
次のように種々のものが実施されている。 (a)回転バフ研摩法 この方法は、3000RPM程度の高速回転が可能であ
るので研摩速度が速く、オシレーションを掛ければ比較
的良好な均一研摩が得られる。 (b)回転ロール研摩法 この方法は、主としてフェルトロールを使用し、作業環
境及び均一研摩性が良好で、湿式研摩に適しているが、
乾式研摩も可能である。 (c)真円回転ラッピング研摩法 この方法は、研摩した鏡面ステンレス等の鏡面解像度に
優れ、湿式及び乾式の両研摩が可能であり、作業環境は
比較的良好で、研摩コストも比較的安価である。また、
酸化剤使用の湿式研摩においては、ステンレス板に厚い
不導体化皮膜を生成し、耐蝕性に優れる。 (d)多軸式真円回転ラッピング研摩法 この方法は、前記(c)の方法と同一の特徴を有する
が、自動化により研摩能率が良くなる。 (e)電解複合研摩法 この方法は、電解作用、機械的研摩作用及び化学的研摩
作用の複合研摩で、研摩速度が速く、均一研摩性に優
れ、自動化も可能である。カラーステンレス用及びエッ
チング用材に比較的適している。また、平面研摩以外に
も適用可能で、研摩速度も速い。
2. Description of the Related Art Conventionally, as this type of polishing method,
Various things are implemented as follows. (A) Rotational buff polishing method This method can rotate at a high speed of about 3000 RPM, so the polishing speed is fast, and relatively good uniform polishing can be obtained by applying oscillation. (B) Rotating roll polishing method This method mainly uses felt rolls, has a good working environment and uniform polishing property, and is suitable for wet polishing.
Dry polishing is also possible. (C) True circle rotary lapping polishing method This method has excellent mirror surface resolution of polished mirror surface stainless steel, etc., both wet and dry polishing are possible, working environment is relatively good, and polishing cost is relatively low. is there. Also,
In wet polishing using an oxidizer, a thick non-conducting film is formed on a stainless steel plate and it has excellent corrosion resistance. (D) Multi-axis true circle lapping polishing method This method has the same characteristics as the above-mentioned method (c), but the polishing efficiency is improved by automation. (E) Electrolytic composite polishing method This method is a composite polishing of electrolytic action, mechanical polishing action and chemical polishing action, and has a high polishing rate, excellent uniform polishing property, and can be automated. It is relatively suitable for color stainless steel and etching materials. It can also be applied to other than planar polishing and has a high polishing speed.

【0003】[0003]

【発明が解決しようとする課題】しかし、上記従来の研
摩方法には、それぞれ下記のような問題点がある。 (a)回転バフ研摩法 高速回転のため危険であり、また研摩対象の平板が走る
ためバキューム止めやクリップ止めをしなければ危険で
ある。乾式研摩のためバフ滓等が周囲に飛散し作業環境
を悪化させる。またバフ目が残るため鏡面度が悪く、鏡
面カラーステンレス材及び鏡面エッチングステンレス材
に不向きで、精密且つ均一研摩が不可能である。
However, each of the above conventional polishing methods has the following problems. (A) Rotating buff polishing method It is dangerous because it rotates at high speed, and the flat plate to be polished runs, so it is dangerous unless vacuuming or clipping is performed. Due to dry polishing, buff slag and the like scatter around and deteriorate the working environment. Further, since the buffs remain, the mirror surface is not good, and it is not suitable for the mirror surface color stainless steel material and the mirror surface etching stainless steel material, and precise and uniform polishing is impossible.

【0004】(b)回転ロール研摩法 バフ面、ロール面を完全に除去できない。研摩接触面積
が少ないため研摩速度が遅く、研摩対象の平板をバキュ
ーム止めやクリップ止めにより固定しなければ危険であ
る。完全鏡面は困難で、カラー材、エッチング材及びメ
ッキ材には不向きである。また廃水処理施設を要し、設
備コストが高くなる。
(B) Rotating roll polishing method The buff surface and the roll surface cannot be completely removed. Since the polishing contact area is small, the polishing speed is slow, and it is dangerous unless the flat plate to be polished is fixed by vacuuming or clipping. A perfect mirror surface is difficult and not suitable for color materials, etching materials and plating materials. In addition, it requires a wastewater treatment facility, which increases equipment costs.

【0005】(c)真円回転ラッピング研摩法 研摩速度が遅いため研摩能率が悪く、操作が複雑である
ため生産性も悪い。鏡面ステンレス材には適用できる
が、ミクロ的には研摩ムラが多い。鏡面カラーステンレ
ス材や鏡面エッチング材にはムラが多いため不向きであ
り、また局部集中湿式研摩のため研摩対象の平板にピッ
チング等の局部腐食を起こし、メッキ材、特に金メッキ
材には適用できない。
(C) True-Circular Rotation Lapping Polishing Method Since the polishing speed is slow, the polishing efficiency is poor, and the productivity is poor because the operation is complicated. Although it can be applied to mirror-finished stainless steel materials, there are many irregularities in polishing on a microscopic scale. It is unsuitable for mirror-colored stainless steel materials and mirror-etched materials because there are many irregularities, and it causes local corrosion such as pitching on the flat plate to be polished due to localized concentrated wet polishing, and cannot be applied to plated materials, especially gold plated materials.

【0006】(d)多軸式真円回転ラッピング研摩法 前記(c)の方法と同一の欠点を有する上に、設備費が
高く、故障が多く、完全自動化は不可能である。また、
不良率も高い。
(D) Multi-axis true circle lapping polishing method In addition to the same drawbacks as the method (c), the equipment cost is high, there are many failures, and complete automation is impossible. Also,
The defect rate is also high.

【0007】(e)電解複合研摩法 湿式しか適用できず、操作が複雑である。電気容量が大
きく、廃水処理が困難で、設備費及びランニングコスト
が高価である。研摩後の鏡面色が好まれず、また不良率
が高いので修正研摩の必要性が高い。電解を併用する
も、基本的には前記(d)の方法であるため、局部的及
びミクロ的にはムラがあり、ステンレスのカラー材、エ
ッチング材及びメッキ材に不向きである。電解併用のた
めピッチング等の局部腐食のおそれが高い。
(E) Electrolytic compound polishing method Only the wet method can be applied, and the operation is complicated. The electric capacity is large, wastewater treatment is difficult, and the equipment cost and running cost are high. Since the mirror surface color after polishing is not preferred and the defective rate is high, the need for correction polishing is high. Even if electrolysis is used in combination, the method (d) is basically used, so there is local and microscopic unevenness, and it is unsuitable for a stainless color material, etching material, and plating material. Due to the combined use of electrolysis, there is a high risk of local corrosion such as pitching.

【0008】以上述べた従来の研摩方法の欠点は、研摩
対象の平板が大形の場合に特に顕著である。そのため、
(a)、(b)の方法は大形平板の完全鏡面研摩が不可
能であり、また(c)、(d)、(e)の方法は完全鏡
面研摩が可能であるが欠点も多く、特に鏡面カラーステ
ンレス材や鏡面エッチング材については良好な製品を得
ることが困難である。本発明は、このような従来の問題
点に鑑みなされたものであって、研摩対象の平板がいか
なるものであっても、均一鏡面研摩に優れた研摩方法及
びその装置を提供することを目的とする。
The above-described drawbacks of the conventional polishing method are particularly remarkable when the flat plate to be polished is large. for that reason,
The methods (a) and (b) do not allow perfect mirror polishing of large flat plates, and the methods (c), (d) and (e) do allow perfect mirror polishing but have many drawbacks. In particular, it is difficult to obtain a good product for a mirror surface color stainless material and a mirror surface etching material. The present invention has been made in view of such conventional problems, and an object thereof is to provide a polishing method and an apparatus therefor, which are excellent in uniform mirror polishing, whatever the flat plate to be polished. To do.

【0009】[0009]

【課題を解決するための手段】上記目的を達成するため
に、本発明の平板の研摩方法は、平板状の研摩部材を研
摩対象の平板の表面に所定圧力で押し付けながらクラン
クを介して回転運動させることにより、前記平板の表面
を平面研摩する。そして、研摩部材をその回転運動の長
軸方向に搖動させると、オシレーション効果が増大し
て、より良好な均一研摩が可能となる。また、研摩部材
をその回転運動の短軸方向に走行させたり、研摩対象の
平板を研摩部材の回転運動の短軸方向に送給すると、生
産性が向上する。なお、研摩部材の回転運動の毎分回転
数を50〜600回転にすることが好ましい。これは、
50回転未満では研摩効果が悪く、600回転を越える
と機構上複雑となる等の問題があるからである。
In order to achieve the above object, a method of polishing a flat plate according to the present invention is such that a flat plate-shaped polishing member is pressed against the surface of a flat plate to be polished with a predetermined pressure while rotating through a crank. By doing so, the surface of the flat plate is polished. Then, when the polishing member is swung in the direction of the long axis of its rotational movement, the oscillation effect is increased, and better uniform polishing becomes possible. Further, when the polishing member is run in the minor axis direction of its rotary motion, or when the flat plate to be polished is fed in the minor axis direction of the rotary motion of the polish member, productivity is improved. The rotational speed of the polishing member is preferably 50 to 600 rotations per minute. this is,
If it is less than 50 rotations, the polishing effect is poor, and if it exceeds 600 rotations, there is a problem that the mechanism becomes complicated.

【0010】また、上記研摩方法を実施するために、本
発明の平板の研摩装置は、上面に研摩対象の平板を載置
するテーブルを架台上に水平状態に設け、前記架台上に
門型架構を前記テーブルの上方を跨ぐように立設し、該
門型架構に昇降手段を介して研摩ヘッドを昇降自在に吊
り下げ、該研摩ヘッドに平板状の研摩部材と該研摩部材
を水平面内でクランクを介して回転運動させる回転手段
とを設け、前記研摩部材の回転運動の長軸方向を前記門
型架構の開脚方向としている。
In order to carry out the above-mentioned polishing method, the flat plate polishing apparatus of the present invention is provided with a table on the upper surface of which a flat plate to be polished is placed in a horizontal state, and a gate-type frame structure is mounted on the platform. Is erected so as to straddle the upper part of the table, and the polishing head is hung up and down on the portal frame through the elevating means, and the polishing head has a flat plate-shaped polishing member and the polishing member is cranked in a horizontal plane. And a rotating means for rotating the polishing member via the blade. The long axis direction of the rotating motion of the polishing member is the opening direction of the portal frame.

【0011】そして、テーブル上面に研摩対象の平板と
同一の板厚を有する研摩部材保護用当て板を前記平板の
側面に沿うように設けて、前記平板の側面エッジ部によ
る研摩部材の損傷を防止したり、研摩部材がバフである
場合にその研摩面に複数条の研摩液貯留用凹溝を設け
て、研摩剤を含む研摩液が研摩面から散逸するのを防止
したり、研摩部材の門型架構の開脚方向の幅を研摩対象
の平板の前記開脚方向の幅よりも大きくして、より良好
な均一研摩を可能にすることが好ましい。なお、研摩部
材をその回転の長軸方向に搖動させるためには、門型架
構に研摩ヘッドを該門型架構の開脚方向に搖動させる搖
動手段を設ける。また、研摩部材をその回転運動の短軸
方向に走行させるためには、門型架構をその開脚方向と
直角方向に架台上を走行させる走行手段を設ける。その
場合、走行手段には門型架構の浮上り防止機構及び横揺
れ防止機構を設けて、研摩ムラを防止することが好まし
い。さらに、研摩対象の平板を研摩部材の回転運動の短
軸方向に送給するためには、研摩対象の平板を門型架構
の開脚方向と直角方向にテーブル上を送給する送給手段
を設ける。
A polishing member protection pad having the same thickness as the flat plate to be polished is provided along the side surface of the flat plate on the upper surface of the table to prevent the polishing member from being damaged by the side edge portion of the flat plate. When the polishing member is a buff, a plurality of grooves for storing the polishing liquid are provided on the polishing surface to prevent the polishing liquid containing the polishing agent from escaping from the polishing surface, and the gate of the polishing member. It is preferable that the width of the mold frame in the open leg direction is made larger than the width of the flat plate to be polished in the open leg direction to enable better uniform polishing. In order to swing the polishing member in the long axis direction of its rotation, a swinging means for swinging the polishing head in the opening leg direction of the portal frame is provided on the portal frame. In order to run the polishing member in the direction of the short axis of its rotational movement, running means is provided for running the portal frame on the pedestal in the direction perpendicular to the leg opening direction. In that case, it is preferable that the traveling means is provided with a lift-up mechanism and a roll-prevention mechanism of a gate type frame to prevent uneven polishing. Further, in order to feed the flat plate to be polished in the short axis direction of the rotary motion of the polishing member, a feeding means for feeding the flat plate to be polished on the table in the direction perpendicular to the opening leg direction of the gate frame is used. Set up.

【0012】[0012]

【作用】上記構成の本発明においては、研摩対象の平板
をテーブル上面に水平状態に載置し、昇降手段により研
摩ヘッドを下降させて研摩部材を平板の表面に所定圧力
で押し付けながら、回転手段により研摩部材を水平面内
でクランクを介して回転運動させることにより、平板の
表面を平面研摩する。この平板が大形の場合には研摩部
材も大形になるが、大形の研摩部材を従来のように単純
な円形に回転運動させるだけでは、研摩部材を平板に押
し付ける圧力が研摩面の中央部に集中して全体に均一に
分布しないため、中央部と周辺部とで研摩が不均一とな
り均一鏡面研摩をすることができない。そこで、本発明
では、研摩部材をクランクを介して回転運動させること
により、研摩部材を平板に押し付ける圧力が研摩面全体
に均一に分布するようにして、大形の平板に対しても精
密な均一鏡面研摩を可能にしている。
In the present invention having the above-mentioned structure, the flat plate to be ground is placed horizontally on the upper surface of the table, and the polishing head is lowered by the elevating means to press the polishing member against the surface of the flat plate with a predetermined pressure, while rotating means. By rotating the polishing member in the horizontal plane via the crank, the surface of the flat plate is polished. If this flat plate is large, the polishing member will also be large, but just by rotating the large polishing member into a simple circular shape as in the conventional case, the pressure that presses the polishing member against the flat plate will be the center of the polishing surface. Since it concentrates on a portion and is not uniformly distributed over the whole, polishing is not uniform in the central portion and the peripheral portion, and uniform mirror surface polishing cannot be performed. Therefore, in the present invention, by rotating the polishing member through the crank, the pressure for pressing the polishing member against the flat plate is uniformly distributed over the entire polishing surface, and even for a large flat plate, the pressure is uniform. Enables mirror polishing.

【0013】[0013]

【実施例】以下、本発明の一実施例を図1〜図5に基づ
いて説明する。本実施例に使用する研摩装置において
は、図1及び図2に示すように、架台1上にテーブル2
を設けるとともに、走行手段4を介して門型架構3を立
設し、門型架構3に搖動手段5及び昇降手段6を介して
研摩ヘッド7を吊り下げ、研摩ヘッド7に回転手段8を
介して研摩部材9を設けている。10は研摩対象の平板
である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In the polishing apparatus used in this example, as shown in FIGS. 1 and 2, a table 2 was mounted on a pedestal 1.
And the gate frame 3 is erected via the traveling means 4, the polishing head 7 is hung on the gate frame 3 via the swinging means 5 and the elevating means 6, and the polishing head 7 is rotated via the rotating means 8. A polishing member 9 is provided. 10 is a flat plate to be polished.

【0014】架台1は、平面形状が長方形で、上面に走
行レール11とラックレール12とが長辺に沿って2条
ずつ敷設されている。以後は説明の便宜上、長辺方向を
本装置全体についての前後方向とし、短辺方向を左右方
向とする(図2参照)。テーブル2は、上面に研摩対象
の平板10を載置するための定盤で、架台1上に水平状
態に設置されている。図2の平板10には、長方形の大
形切板を使用している。テーブル2の上面には、平板1
0と同一の板厚を有する当て板13が平板10の側面に
沿うように固設され、研摩部材9が平板10の側面エッ
ジ部により損傷するのを防止する。そのため、当て板1
3の幅は、研摩部材9の運動範囲が当て板13から食み
出さないように設定されている。門型架構3は、テーブ
ル2の上方を左右方向に跨ぐように架台1の走行レール
11上に立設され、走行手段4により前後方向(開脚方
向と直角方向)に走行駆動される。
The pedestal 1 has a rectangular planar shape, and two traveling rails 11 and two rack rails 12 are laid on the upper surface along the long sides. Hereinafter, for convenience of explanation, the long side direction will be referred to as the front-back direction for the entire apparatus, and the short side direction will be referred to as the left-right direction (see FIG. 2). The table 2 is a surface plate for mounting the flat plate 10 to be polished on its upper surface, and is installed horizontally on the pedestal 1. A large rectangular plate is used as the flat plate 10 in FIG. On the upper surface of the table 2, the flat plate 1
A backing plate 13 having the same plate thickness as that of 0 is fixed along the side surface of the flat plate 10 to prevent the polishing member 9 from being damaged by the side edge portion of the flat plate 10. Therefore, the backing plate 1
The width of 3 is set so that the range of motion of the polishing member 9 does not protrude from the pad plate 13. The gate-shaped frame 3 is erected on the traveling rail 11 of the gantry 1 so as to straddle the upper side of the table 2 in the left-right direction, and is driven by the traveling means 4 to travel in the front-rear direction (direction perpendicular to the leg opening direction).

【0015】走行手段4は、図3に示すように、門型架
構3の脚部に回動自在に取り付けた走行車輪14及び走
行ギヤ15からなり、さらに浮上り防止機構16及び横
搖れ防止機構17が付設されている。走行車輪14は、
門型架構3を支持して走行レール11上を転動する。走
行ギヤ15は、架台1のラックレール12と噛合し、走
行駆動装置18により回転されて門型架構3を走行させ
る。浮上り防止機構16と横搖れ防止機構17とは、そ
れぞれ前記脚部に回動自在に取り付けた浮上り防止ロー
ラ19と横搖れ防止ローラ20とからなり、浮上り防止
ローラ19は架台1の下面に沿って走行することにより
門型架構3が走行レール11から浮き上がるのを防止
し、また横搖れ防止ローラ20は走行レール11の側面
に沿って走行することにより門型架構3の横搖れを防止
し、いずれも研摩ムラの発生を防止する。
As shown in FIG. 3, the traveling means 4 comprises traveling wheels 14 and traveling gears 15 which are rotatably attached to the legs of the gate frame 3, and further comprises a floating prevention mechanism 16 and a lateral swinging prevention mechanism. 17 is attached. The traveling wheels 14 are
It supports the gate frame 3 and rolls on the traveling rail 11. The traveling gear 15 meshes with the rack rail 12 of the gantry 1 and is rotated by the traveling drive device 18 to drive the gate frame 3. The floating prevention mechanism 16 and the horizontal shaking prevention mechanism 17 each include a floating prevention roller 19 and a horizontal shaking prevention roller 20 rotatably attached to the leg portions, and the floating prevention roller 19 is the lower surface of the pedestal 1. The gate-shaped frame 3 is prevented from floating up from the traveling rail 11 by traveling along it, and the horizontal swing prevention roller 20 travels along the side surface of the traveling rail 11 to prevent the horizontal swing of the gate-shaped frame 3. However, both prevent the occurrence of uneven polishing.

【0016】搖動手段5は、門型架構3の桁部上に設け
た左右一対の搖動案内部材21により搖動板22を左右
方向(門型架構3の開脚方向)に搖動自在に支持し、搖
動板22に搖動シリンダ23を接続してなるものであ
る。昇降手段6は、搖動板22上に左右一対ずつ設けた
昇降シリンダ24及び圧力調整機構25からなり、これ
らが研摩ヘッド7を昇降自在に吊り下げている。昇降シ
リンダ24は、そのピストン棒26の出退により研摩ヘ
ッド7を昇降させる。圧力調整機構25は、搖動板22
上に立設した案内筒27に研摩ヘッド7を吊り下げた吊
り棒28を昇降自在に挿通し、吊り棒28の上端部に螺
着した調整ナット29と案内筒27の底部との間に圧縮
ばね30を介設してなり、昇降シリンダ24が圧縮ばね
30に抗して研摩部材9の研摩面を平板10に押し付け
る研摩圧力を調整ナット29の締め加減により適正値に
調整する。
The swinging means 5 supports the swinging plate 22 in the left-right direction (opening direction of the gate type frame 3) by a pair of left and right swing guide members 21 provided on the girder of the gate type frame 3, A rocking cylinder 23 is connected to the rocking plate 22. The elevating means 6 is composed of an elevating cylinder 24 and a pressure adjusting mechanism 25 which are provided on the rocking plate 22 in pairs of right and left, and these suspend the polishing head 7 so as to be vertically movable. The elevating cylinder 24 elevates and lowers the polishing head 7 by moving the piston rod 26 back and forth. The pressure adjusting mechanism 25 includes the swing plate 22.
A suspension rod 28, on which the polishing head 7 is suspended, is vertically inserted into a guide cylinder 27 provided upright, and compressed between an adjusting nut 29 screwed to the upper end of the suspension rod 28 and the bottom of the guide cylinder 27. The spring 30 is interposed, and the lifting cylinder 24 adjusts the polishing pressure that presses the polishing surface of the polishing member 9 against the flat plate 10 against the compression spring 30 by adjusting the adjustment nut 29 to a proper value.

【0017】研摩ヘッド7は、昇降手段6を介して搖動
板22に吊り下げられた支持梁31を門型架構3の両脚
部に設けた左右一対の昇降案内部材32の間に介設し、
支持梁31に回転手段8を介して回転板33を吊り下
げ、回転板33の下面にゴム等からなる緩衝部材34を
介して研摩部材取付板35を固設してなるものである。
回転手段8は、研摩ヘッド7の支持梁31と回転板33
との間に主クランク36と2個の補助クランク37とを
主クランク36を中央にして一列に並設し、支持梁31
上に回転駆動モータ38を設けてなるものである。主ク
ランク36は、上端部が回転駆動モータ38に接続さ
れ、下端部が回転板33に回動自在に接続されている。
また、補助クランク37は、上下両端部がそれぞれ支持
梁31及び回転板33に回動自在に接続されている。主
クランク36が回転すると両補助クランク37も回転板
33を介して連れ回りするので、回転板33は回転運動
する。この回転板33の回転運動の長軸は左右方向(門
型架構3の開脚方向)に向いている。回転駆動モータ3
8は、毎分最低50回転ないし最高600回転の回転速
度で主クランク36を回転させる。回転速度が50回転
未満では研摩効果が悪く、600回転を越えると機構上
複雑となる等の問題があるからである。
The polishing head 7 has a support beam 31 suspended from a rocking plate 22 via an elevating means 6 between a pair of left and right elevating guide members 32 provided on both legs of the gate frame 3.
The rotating plate 33 is suspended from the supporting beam 31 via the rotating means 8, and the polishing member mounting plate 35 is fixedly mounted on the lower surface of the rotating plate 33 via the cushioning member 34 made of rubber or the like.
The rotating means 8 includes a supporting beam 31 of the polishing head 7 and a rotating plate 33.
The main crank 36 and the two auxiliary cranks 37 are arranged side by side in a line with the main crank 36 at the center.
The rotary drive motor 38 is provided on the top. The upper end of the main crank 36 is connected to the rotary drive motor 38, and the lower end is rotatably connected to the rotary plate 33.
The upper and lower ends of the auxiliary crank 37 are rotatably connected to the support beam 31 and the rotary plate 33, respectively. When the main crank 36 rotates, both auxiliary cranks 37 rotate together with the rotary plate 33, so that the rotary plate 33 rotates. The long axis of the rotary motion of the rotary plate 33 is oriented in the left-right direction (the direction in which the gate frame 3 is opened). Rotary drive motor 3
8 rotates the main crank 36 at a rotational speed of at least 50 revolutions per minute and a maximum of 600 revolutions per minute. If the rotation speed is less than 50 rotations, the polishing effect is poor, and if it exceeds 600 rotations, there is a problem that the mechanism becomes complicated.

【0018】研摩部材9は、長方形板状の砥石、スコッ
チグライト、バフ等からなり、研摩ヘッド7の研摩部材
取付板35の下面に着脱自在に取り付けられ、回転板3
3とともに回転運動する。研摩部材9の左右方向(門型
架構3の開脚方向)の幅は、研摩対象の平板10の左右
方向の幅よりも大きく設定してあり、均一研摩を可能に
している。図1に示す研摩部材9は、バフの場合であっ
て、バフケース39に収容され、研摩面には図4及び図
5に示すような研摩液貯留用凹溝40が回転方向に傾斜
させて複数条形成されている。この凹溝40は、研摩面
に含浸させた研摩剤を含む研摩液を研摩時に掻き寄せて
保持し、研摩液が研摩面から散逸するのを防止するとと
もに、研摩中に貯留した研摩液を徐々に放出供給して研
摩効率を高める。
The polishing member 9 consists of a rectangular plate-shaped grindstone, Scotch glite, buff, etc., and is removably attached to the lower surface of the polishing member attachment plate 35 of the polishing head 7 and the rotary plate 3
Rotate with 3. The width of the polishing member 9 in the left-right direction (the opening leg direction of the gate frame 3) is set larger than the width of the flat plate 10 to be polished in the left-right direction, which enables uniform polishing. In the case of a buff, the polishing member 9 shown in FIG. 1 is accommodated in a buff case 39, and a plurality of polishing liquid storage concave grooves 40 as shown in FIGS. Is formed. The groove 40 holds the polishing liquid containing the polishing agent with which the polishing surface is impregnated by scraping and holding the polishing liquid at the time of polishing, preventing the polishing liquid from escaping from the polishing surface and gradually polishing the polishing liquid stored during polishing. To improve the polishing efficiency.

【0019】平板10は、ステンレス板、真鍮板、アル
ミニウム板等の金属板やガラス板等の非金属板からなる
研摩対象である。図2に示す平板10は、長方形の大形
切板で、テーブル2の上面に水平状態に載置され、側面
が当て板13により固定されている。
The flat plate 10 is a polishing object made of a metal plate such as a stainless plate, a brass plate, an aluminum plate, or a non-metal plate such as a glass plate. The flat plate 10 shown in FIG. 2 is a large rectangular cut plate, which is placed horizontally on the upper surface of the table 2 and the side surfaces of which are fixed by a backing plate 13.

【0020】上記構成の研摩装置を使用して、本発明の
研摩方法により研摩対象の平板10を研摩するには、研
摩部材9の研摩面に研摩剤を含んだ研摩液を含浸させた
後、昇降シリンダ24により研摩ヘッド7を下降させて
研摩部材9を平板10の表面に所定圧力で押し付けなが
ら、回転駆動モータ38により各クランク36、37を
介して研摩部材9を水平面内で回転運動させる。この場
合の前記所定圧力は、0.5〜1.5kg/cm2 程度が適
正で、圧力調整機構25の調整ナット29の締め加減に
より予め調整しておく。また、回転駆動モータ38の回
転速度はベクトルインバータ制御により毎分100〜4
50回転に制御し、各クランク36、37の回転半径は
50mm程度としておく。
In order to polish the flat plate 10 to be polished by the polishing method of the present invention using the polishing apparatus having the above construction, after the polishing surface of the polishing member 9 is impregnated with the polishing liquid containing the polishing agent, While the polishing head 7 is lowered by the elevating cylinder 24 to press the polishing member 9 against the surface of the flat plate 10 with a predetermined pressure, the rotary driving motor 38 causes the polishing member 9 to rotate in the horizontal plane through the cranks 36 and 37. The predetermined pressure in this case is appropriate to be about 0.5 to 1.5 kg / cm 2, and is adjusted in advance by tightening or tightening the adjusting nut 29 of the pressure adjusting mechanism 25. Further, the rotation speed of the rotary drive motor 38 is 100 to 4 per minute by the vector inverter control.
It is controlled to 50 rotations, and the rotation radius of each crank 36, 37 is set to about 50 mm.

【0021】続いて、搖動シリンダ23により搖動板2
2を介して研摩ヘッド7を左右方向に搖動させると同時
に、走行駆動装置18により門型架構3を前後方向に走
行させる。この場合の搖動シリンダ23の搖動ストロー
クはインバータ制御により100〜200mmに制御する
とともに、搖動サイクルを毎分6〜30ストローク程度
にしておく。また、門型架構3の研摩時の走行速度は、
毎分1〜5m程度が好ましい。かくして、研摩部材9は
平板10の表面を適正な条件で平面研摩する。その際、
研摩部材9がクランクを介して回転運動するので、研摩
部材9が平板10を押し付ける圧力が研摩面全体に均一
に分布するとともに、研摩ヘッド7に伴って研摩部材9
も搖動するのでそのオシレーション効果が加わり、大形
の平板10に対しても精密な均一鏡面研摩が可能となっ
ている。
Then, the rocking plate 23 is moved by the rocking cylinder 23.
At the same time as the polishing head 7 is swung in the left-right direction via 2, the gate drive frame 3 is moved in the front-back direction by the traveling drive device 18. In this case, the swing stroke of the swing cylinder 23 is controlled to 100 to 200 mm by inverter control, and the swing cycle is set to about 6 to 30 strokes per minute. Also, the running speed of the gate frame 3 during polishing is
It is preferably about 1 to 5 m / min. Thus, the polishing member 9 planarly polishes the surface of the flat plate 10 under appropriate conditions. that time,
Since the polishing member 9 rotates through the crank, the pressure with which the polishing member 9 presses the flat plate 10 is evenly distributed over the entire polishing surface, and the polishing member 9 moves along with the polishing head 7.
Since it also swings, the oscillation effect is added, and precise uniform mirror polishing can be performed even on the large flat plate 10.

【0022】なお、本実施例では、研摩対象の平板10
を切板としたので、門型架構3を前後方向に走行させた
が、他の実施例として(図示省略)、研摩対象の平板1
0が帯板をコイル状に巻回したようなものである場合に
は、門型架構3を走行させる代わりに、コイル状の平板
10を解いて前後方向に送給する送給手段を設けてもよ
い。これにより、連続研摩が可能となり、生産性が著し
く向上する。
In this embodiment, the flat plate 10 to be polished is used.
Since the gate plate was used as a cutting plate, the gate-shaped frame 3 was run in the front-back direction, but as another example (not shown), the flat plate 1 to be polished was used.
If 0 is like winding a strip plate in a coil shape, instead of running the gate-shaped frame 3, a feeding means for unwinding the coiled flat plate 10 and feeding it in the front-back direction is provided. Good. As a result, continuous polishing becomes possible and the productivity is remarkably improved.

【0023】次に、本発明の研摩方法により種々の材質
の切板を研摩した実施例について説明する。 実施例1 研摩対象 材質・・・ステンレスSUS304光輝焼鈍材(BA
材) 寸法・・・1.5mm厚×2438mm×1219mm 研摩条件 方法・・・バフ研摩〔四三酸化鉄(ベニガラ)40g/
lと硝酸15%との複合研摩剤使用〕 回転数・・・200RPM 走行速度・・・300mm/min 圧着圧力・・・1.5kg/cm2 約10分間の研摩により完全鏡面ステンレス板を得た。
研摩後は水洗機で水洗及び仕上げ湯洗を行ない、乾燥後
に保護テープを貼付して仕上げた。
Next, an example in which a cut plate made of various materials is polished by the polishing method of the present invention will be described. Example 1 Material to be polished: Stainless steel SUS304 bright annealing material (BA
Material) Size: 1.5 mm thickness x 2438 mm x 1219 mm Polishing conditions Method: Buff polishing [ferrous tetroxide (red iron) 40 g /
Use of a compounded abrasive containing 1 and 15% nitric acid] Rotation speed: 200 RPM Travel speed: 300 mm / min Crimping pressure: 1.5 kg / cm 2 A perfect mirror-finished stainless steel plate was obtained by polishing for about 10 minutes. ..
After polishing, washing with a water washing machine and finishing hot water washing were performed, and after drying, a protective tape was attached to finish.

【0024】実施例2 研摩対象 材質・・・ステンレスSUS304材(2B材) 寸法・・・1.5mm厚×2438mm×1219mm 研摩条件 方法・・・1段砥石研削(PVA砥石#800使用) 2段砥石研削(PVA砥石#1500使用) 3段バフ研摩(四三酸化鉄60g/lと硝酸15%との
複合研摩剤使用) 回転数・・・砥石、バフのいずれも200RPM 走行速度・・・砥石、バフのいずれも150mm/min 圧着圧力・・・砥石、バフのいずれも1.5kg/cm2 20分間×2回の砥石研削及び20分間のバフ研摩によ
り完全鏡面ステンレス板を得た。なお、砥石研削後は水
洗機で水洗し、バフ研摩により仕上げ鏡面加工した後、
水洗機で水洗及び仕上げ湯洗を行ない、乾燥後に保護テ
ープを貼付して仕上げた。
Example 2 Material to be ground: Stainless steel SUS304 material (2B material) Dimension: 1.5 mm thickness x 2438 mm x 1219 mm Polishing condition Method: 1-step grinding wheel grinding (PVA grinding wheel # 800) 2 steps Grinding wheel (using PVA whetstone # 1500) 3-step buffing (using compound abrasive of 60g / l of ferrosoferric oxide and 15% nitric acid) Rotation speed ... 200RPM for both whetstone and buff Running speed ... Whetstone , Buff 150 mm / min Pressure bonding ... Both grindstone and buff 1.5 kg / cm 2 20 minutes × 2 grindstone grinding and 20 minutes buff polishing to obtain a perfectly mirror-finished stainless steel plate. In addition, after grinding with a whetstone, after washing with a water washing machine and finishing mirror surface processing by buff polishing,
After washing with water and finishing hot water with a water washing machine, a protective tape was applied after drying to finish.

【0025】実施例3 研摩対象 材質・・・銅90%、亜鉛10%の真鍮板 寸法・・・2.0mm厚×1000mm×2000mm 研摩条件 方法・・・下地砥石研削(PVA砥石#1500で表面
傷除去) 仕上げバフ研摩〔ピカール(市販品)とアルミナ研摩剤
との混合液使用〕 回転数・・・200RPM 走行速度・・・300mm/min 圧着圧力・・・1.5kg/cm2 完全鏡面真鍮板を得た。バフ研摩後溶剤で汚れを除去
し、拭き取った後保護テープを貼付して仕上げた。
Example 3 Material to be Polished Material: Brass Plate with 90% Copper and 10% Zinc Dimensions: 2.0 mm Thickness x 1000 mm x 2000 mm Polishing Conditions Method: Ground Grinding Wheel (PVA Grinding Wheel # 1500 Surface Scratch removal) Finishing buff polishing [using a mixture of Picard (commercially available) and an alumina abrasive] Rotation speed: 200 RPM Travel speed: 300 mm / min Crimping pressure: 1.5 kg / cm 2 Perfect mirror brass I got a board. After buffing, stains were removed with a solvent, wiped off, and a protective tape was attached to finish.

【0026】実施例4 研摩対象 材質・・・ワインレッド色に2次電解発色したアルマイ
ト板(アルマイト皮膜27μm) 寸法・・・3.0mm厚×1000mm×2000mm 研摩条件 方法・・・バフ研摩〔四三化鉄40g/lとアルミナ2
0g/lの複合研摩剤使用(粒度2μm以下)〕 回転数・・・200RPM 走行速度・・・150mm/min 圧着圧力・・・2kg/cm2 アルマイト皮膜を損傷することなく、平均1〜2μmの
研摩で、艶やかな飴色のワインレッド色で、有機物のよ
うに漆調の光沢が出た。しかも、封孔処理された部分の
皮膜の脱落が起こらず、耐蝕性の劣化もなかった。
Example 4 Material to be Polished Material: An alumite plate (alumite film 27 μm) secondary electrolytically developed in wine red color Dimensions: 3.0 mm thickness × 1000 mm × 2000 mm Polishing conditions Method: Buff polishing [4 40 g / l iron trioxide and 2 alumina
Use of 0 g / l composite abrasive (particle size 2 μm or less)] Rotation speed: 200 RPM Travel speed: 150 mm / min Crimping pressure: 2 kg / cm 2 Average of 1 to 2 μm without damaging alumite coating By polishing, it was a lustrous candy-colored wine red color and had a lacquer-like luster like organic matter. Moreover, the coating on the sealed portion did not fall off, and the corrosion resistance did not deteriorate.

【0027】次の応用例1〜3は、実施例1、2で得た
完全鏡面ステンレス板にカラーリング、エッチング及び
金メッキを施した応用例を示す。 応用例1 カラーリングの条件 カラー用薬剤・・・硫酸450g/l、無水クロム酸2
50g/l(インコカラー法に準ずる) 液温・・・80℃ 処理工程・・・脱脂−水洗−酸化発色−回収−水洗−硬
膜処理−水洗−仕上げ水洗−乾燥 従来法で得た鏡面ステンレス板は、研摩ムラが多く、そ
れが着色ムラになって良好な製品にならなかったが、本
応用例で得たカラーステンレス板は、着色ムラが殆ど無
く、目視下では両者の差は歴然としていた。
The following application examples 1 to 3 are application examples in which the perfect mirror-finished stainless steel plates obtained in Examples 1 and 2 are subjected to coloring, etching and gold plating. Application Example 1 Coloring conditions Coloring agent: sulfuric acid 450 g / l, chromic anhydride 2
50g / l (according to Incocolor method) Liquid temperature ... 80 ° C Treatment process ... Degreasing-Washing-Oxidative color development-Recovery-Water washing-Hardening treatment-Water washing-Finishing water washing-Drying Mirror surface stainless steel obtained by the conventional method The plate had a lot of uneven polishing, and it was not a good product due to uneven coloring.However, the colored stainless steel plate obtained in this application example had almost no uneven coloring, and the difference between the two was clear under visual observation. I was there.

【0028】応用例2 エッチングの条件 エッチング用薬剤・・・塩化第2鉄溶液46°ボーメ
液、塩酸0.5%を含む。 液温・・・40℃ 処理工程・・・スクリーン印刷−乾燥−高圧シャワーエ
ッチング(10分間)−水洗−苛性ソーダ脱膜−水洗−
硝酸中和−水洗 従来法で研摩した鏡面ステンレス板は、研摩に使用する
研摩剤と酸化性薬品との複合研摩剤により生成される酸
化皮膜の厚さにムラがあるので、煩雑な下地の前処理を
施さずに直接エッチングすると、エッチングムラを起こ
し、良好な製品にならなかった。これに対し、本応用例
で得たエッチングステンレス板は、研摩の際に酸化皮膜
が均一に仕上がっているので殆どエッチングムラを起こ
さず、そのため特別な前処理をしなくても均一なエッチ
ング製品が得られた。
Application Example 2 Etching conditions Etching agent: Ferric chloride solution 46 ° Baume solution, containing 0.5% hydrochloric acid. Liquid temperature ・ ・ ・ 40 ℃ Treatment process ・ ・ ・ Screen printing-Drying-High pressure shower etching (10 minutes) -Washing-Caustic soda film removal-Water washing-
Nitric acid neutralization-washing With a mirror-finished stainless steel plate that has been polished by the conventional method, the thickness of the oxide film produced by the composite abrasive of the abrasive used for polishing and the oxidizing agent is uneven, so it is difficult If it was directly etched without any treatment, uneven etching was caused and a good product was not obtained. On the other hand, in the etched stainless steel plate obtained in this application example, since the oxide film is finished uniformly during polishing, there is almost no etching unevenness, so that a uniform etched product can be obtained without special pretreatment. Was obtained.

【0029】応用例3 金メッキの条件 金メッキ液・・・塩酸酸性金メッキ液 液温・・・40℃ 電流密度・・・3A/dm 処理工程・・・アルカリ電解脱脂−水洗−活性化酸洗−
水洗−フラッシュ金メッキ(45秒間)−回収−水洗−
中和−水洗−湯洗 従来の真円回転ラッピング研摩法では、バフ面が小さく
て局部的に集中研摩するので、その部分が摩擦熱により
100℃程度に熱せられ、硝酸等の研摩剤によりピッチ
ング等の局部腐食を起こす。これは150倍程度の顕微
鏡で確認できる。そのため、この方法で研摩した鏡面ス
テンレス板に金メッキを施すと、部分的に光沢の薄れた
状態が顕著に現れる。しかし、本発明の方法で研摩した
鏡面ステンレス板には殆どピッチング現象は見られな
い。したがって、本応用例で金メッキ(97%純度)し
た鏡面金メッキステンレス板には白濁状のぼやけた状況
は見られない。
Application Example 3 Gold Plating Conditions Gold plating solution ... Hydrochloric acid acidic gold plating solution Liquid temperature ... 40 ° C. Current density ... 3 A / dm Treatment process ... Alkaline electrolytic degreasing-Washing-Activated pickling-
Washing-Flash gold plating (45 seconds) -Recovery-Washing-
Neutralization-Washing-Washing In the conventional perfect circular lapping polishing method, since the buff surface is small and the localized polishing is performed locally, that portion is heated to about 100 ° C by friction heat and pitched with an abrasive such as nitric acid. Local corrosion such as. This can be confirmed with a microscope of about 150 times. Therefore, when the mirror-finished stainless steel plate polished by this method is gold-plated, the state where the luster is partly reduced appears remarkably. However, almost no pitting phenomenon is observed in the mirror-finished stainless steel plate polished by the method of the present invention. Therefore, in this application example, no opaque and cloudy condition is observed on the specular gold-plated stainless steel plate plated with gold (97% purity).

【0030】[0030]

【発明の効果】本発明は、以上説明したように構成され
ているので、以下の利点を有する。 (1)平板状の研摩部材を研摩対象の平板の表面に所定
圧力で押し付けながらクランクを介して回転運動させる
ことにより前記平板の表面を平面研摩するので、前記所
定圧力が研摩面全体に均一に分布し、大形の平板に対し
ても精密な均一鏡面研摩をすることができる。そのた
め、大形の鏡面カラーステンレス材、鏡面エッチングス
テンレス材、鏡面純金メッキステンレス材等の製造に最
適である。 (2)金属板のみならず、非金属板にも適用可能であ
る。 (3)研摩部材をその回転運動の長軸方向に搖動させる
と、オシレーション効果が増大して、より良好な均一鏡
面研摩が可能となる。 (4)研摩部材をその回転運動の短軸方向に走行させる
と、大形の切板の研摩対象を能率よく研摩することがで
きる。 (5)研摩対象の平板を研摩部材の回転運動の短軸方向
に送給するようにすると、研摩対象が帯板をコイル状に
巻回したようなものである場合に連続研摩が可能とな
り、生産性が著しく向上する。 (6)その他、次のような種々の利点を有する。 完全鏡面材の製造の生産性が従来法よりも著しく優れ
ている。 装置の操作及びメンテナンスが非常に簡単で、故障も
少ない。 電気容量が比較的少ないエネルギー節約タイプで、ラ
ンニングコストが非常に安価である。 湿式、乾式両用に適している。 廃水処理を必要とするが、乾式と比較して作業環境が
良く、また電解複合研摩法と比較して廃水処理は非常に
簡単でる。
Since the present invention is constructed as described above, it has the following advantages. (1) Since the flat plate-shaped polishing member is pressed against the surface of the flat plate to be polished with a predetermined pressure and rotated by a crank, the surface of the flat plate is ground flat, so that the predetermined pressure is uniformly applied to the entire polishing surface. It is distributed and can perform precise uniform mirror polishing even on a large flat plate. Therefore, it is optimal for manufacturing large-sized mirror-colored stainless steel materials, mirror-surface etched stainless steel materials, mirror-surface pure gold plated stainless steel materials, and the like. (2) It is applicable not only to metal plates but also to non-metal plates. (3) When the polishing member is swung in the direction of the long axis of its rotary motion, the oscillation effect is increased, and better uniform mirror polishing is possible. (4) By running the polishing member in the direction of the short axis of its rotational motion, it is possible to efficiently polish an object to be polished on a large-sized cutting plate. (5) When the flat plate to be polished is fed in the short axis direction of the rotary motion of the polishing member, continuous polishing becomes possible when the target to be polished is a strip plate wound in a coil shape. Productivity is significantly improved. (6) In addition, it has the following various advantages. The productivity of manufacturing perfect mirror surface material is significantly superior to the conventional method. The operation and maintenance of the device is very easy and there are few failures. It is an energy-saving type with a relatively small electric capacity, and the running cost is very low. Suitable for both wet and dry types. Although it requires wastewater treatment, it has a better working environment compared to the dry method, and the wastewater treatment is much easier than the electrolytic composite polishing method.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の研摩方法に使用する研摩装置の一実施
例を示す正面図である。
FIG. 1 is a front view showing an embodiment of a polishing apparatus used in a polishing method of the present invention.

【図2】図1の平面図である。FIG. 2 is a plan view of FIG.

【図3】図1の研摩装置に使用した走行装置の拡大図で
ある。
FIG. 3 is an enlarged view of a traveling device used in the polishing device of FIG.

【図4】図1の研摩装置に使用したバフの拡大正面図で
ある。
FIG. 4 is an enlarged front view of a buff used in the polishing apparatus of FIG.

【図5】図4に示したバフの平面図である。5 is a plan view of the buff shown in FIG.

【符号の説明】[Explanation of symbols]

1 架台 2 テーブル 3 門型架構 4 走行手段 5 搖動手段 6 昇降手段 7 研摩ヘッド 8 回転手段 9 研摩部材 10 平板 13 当て板 16 浮上り防止機
構 17 横搖れ防止機構 40 研摩液貯留用
凹溝
1 Platform 2 Table 3 Gate-type Frame 4 Traveling Means 5 Swinging Means 5 Lifting Means 6 Elevating Means 7 Polishing Heads 8 Rotating Means 9 Polishing Members 10 Flat Plates 13 Abutting Plates 16 Floating Prevention Mechanisms 17 Side Shaking Prevention Mechanisms 40 Abrasive Grooves

───────────────────────────────────────────────────── フロントページの続き (72)発明者 吉原 義人 兵庫県加古川市尾上町池田美サシ830 (72)発明者 澤田 康弘 大阪府東大阪市四条町19−5 (72)発明者 森下 一夫 大阪府大阪市中央区瓦屋町3−2−24本田 実ビル (72)発明者 倉野 玉樹 大阪府大東市諸福5丁目7−10 ボンジュ ール木村302 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Yoshito Yoshihara 830 Misa Ikeda, Onoe Town, Kakogawa City, Hyogo Prefecture (72) Inventor Yasuhiro Sawada 19-5 Shijo Town, Higashi Osaka City, Osaka Prefecture (72) Inventor Kazuo Morishita, Osaka Prefecture Honda Minoru Building, 3-2-24 Karaya-cho, Chuo-ku, Osaka (72) Inventor Tamaki Kurano 5-7-10 Morofuku, Daito City, Osaka Prefecture Bonjour Kimura 302

Claims (13)

【特許請求の範囲】[Claims] 【請求項1】 平板状の研摩部材を研摩対象の平板の表
面に所定圧力で押し付けながらクランクを介して回転運
動させることにより、前記平板の表面を平面研摩するこ
とを特徴とする平板の研摩方法。
1. A method for polishing a flat plate, wherein the flat plate-shaped polishing member is pressed against the surface of the flat plate to be polished by a predetermined pressure to rotate the flat plate to rotate the surface of the flat plate. ..
【請求項2】 研摩部材をその回転運動の長軸方向に搖
動させる請求項1記載の平板の研摩方法。
2. The method of polishing a flat plate according to claim 1, wherein the polishing member is swung in the longitudinal direction of its rotary motion.
【請求項3】 研摩部材をその回転運動の短軸方向に走
行させる請求項1又は2記載の平板の研摩方法。
3. The method of polishing a flat plate according to claim 1, wherein the polishing member is caused to run in the minor axis direction of its rotary motion.
【請求項4】 研摩対象の平板を研摩部材の回転運動の
短軸方向に送給する請求項1又は2記載の平板の研摩方
法。
4. The method of polishing a flat plate according to claim 1, wherein the flat plate to be polished is fed in the minor axis direction of the rotary motion of the polishing member.
【請求項5】 研摩部材の回転運動の毎分回転数を50
〜600回転とする請求項1、2、3又は4記載の平板
の研摩方法。
5. The rotational speed of the polishing member is 50 rpm.
The method for polishing a flat plate according to claim 1, 2, 3 or 4, wherein the number of rotations is about 600 rotations.
【請求項6】 上面に研摩対象の平板を載置するテーブ
ルを架台上に水平状態に設け、前記架台上に門型架構を
前記テーブルの上方を跨ぐように立設し、該門型架構に
昇降手段を介して研摩ヘッドを昇降自在に吊り下げ、該
研摩ヘッドに平板状の研摩部材と該研摩部材を水平面内
でクランクを介して回転運動させる回転手段とを設け、
前記研摩部材の回転運動の長軸方向を前記門型架構の開
脚方向としたことを特徴とする平板の研摩装置。
6. A table on which a flat plate to be ground is placed is provided on an upper surface in a horizontal state, and a gate frame is erected on the frame so as to extend over the table. The polishing head is hung up and down via the elevating means, and the polishing head is provided with a flat plate-like polishing member and a rotating means for rotating the polishing member in a horizontal plane through a crank.
A flat plate polishing apparatus, wherein a long axis direction of a rotary motion of the polishing member is set to an opening leg direction of the portal frame.
【請求項7】 テーブル上面に研摩対象の平板と同一の
板厚を有する研摩部材保護用当て板を前記平板の側面に
沿うように設けた請求項6記載の平板の研摩装置。
7. The flat plate polishing apparatus according to claim 6, wherein a polishing member protection pad having the same thickness as the flat plate to be polished is provided on the upper surface of the table along the side surface of the flat plate.
【請求項8】 研摩部材が研摩面に複数条の研摩液貯留
用凹溝を設けたバフである請求項6記載の平板の研摩装
置。
8. The flat plate polishing apparatus according to claim 6, wherein the polishing member is a buff having a plurality of grooves for storing polishing liquid on the polishing surface.
【請求項9】 研摩部材の門型架構の開脚方向の幅を研
摩対象の平板の前記開脚方向の幅よりも大きくした請求
項6又は8記載の平板の研摩装置。
9. The flat plate polishing apparatus according to claim 6, wherein the width of the polishing member in the opening leg direction of the gate frame is larger than the width of the flat plate to be polished in the opening leg direction.
【請求項10】 門型架構に研摩ヘッドを該門型架構の
開脚方向に搖動させる搖動手段を設けた請求項6記載の
平板の研摩装置。
10. The flat-plate polishing apparatus according to claim 6, wherein the gate-shaped frame is provided with rocking means for rocking the polishing head in the opening direction of the gate-shaped frame.
【請求項11】 門型架構をその開脚方向と直角方向に
架台上を走行させる走行手段を設けた請求項6又は10
記載の平板の研摩装置。
11. A traveling means for traveling the portal frame in a direction at right angles to the direction in which the legs are opened.
The flat plate polishing apparatus described.
【請求項12】 走行手段に門型架構の浮上り防止機構
及び横揺れ防止機構を設けた請求項11記載の平板の研
摩装置。
12. The flat plate polishing apparatus according to claim 11, wherein the traveling means is provided with a lift-prevention mechanism and a roll-prevention mechanism of a gate frame.
【請求項13】 研摩対象の平板を門型架構の開脚方向
と直角方向にテーブル上を送給する送給手段を設けた請
求項6又は10記載の平板の研摩装置。
13. The flat plate polishing apparatus according to claim 6, further comprising a feeding means for feeding the flat plate to be polished on the table in a direction perpendicular to the opening leg direction of the portal frame.
JP4110769A 1992-04-02 1992-04-02 Polishing method and apparatus for flat plate Expired - Lifetime JP2724427B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP4110769A JP2724427B2 (en) 1992-04-02 1992-04-02 Polishing method and apparatus for flat plate
CA 2093046 CA2093046A1 (en) 1992-04-02 1993-03-31 Method for polishing plate and apparatus therefor
DE1993613333 DE69313333T2 (en) 1992-04-02 1993-04-01 Plate polishing method and apparatus therefor
EP19930105411 EP0563954B1 (en) 1992-04-02 1993-04-01 Method for polishing plate and apparatus therefor
TW82102453A TW223601B (en) 1992-04-02 1993-04-01
CN 93103507 CN1077406A (en) 1992-04-02 1993-04-02 The method and apparatus of polished board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4110769A JP2724427B2 (en) 1992-04-02 1992-04-02 Polishing method and apparatus for flat plate

Publications (2)

Publication Number Publication Date
JPH05277914A true JPH05277914A (en) 1993-10-26
JP2724427B2 JP2724427B2 (en) 1998-03-09

Family

ID=14544122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4110769A Expired - Lifetime JP2724427B2 (en) 1992-04-02 1992-04-02 Polishing method and apparatus for flat plate

Country Status (6)

Country Link
EP (1) EP0563954B1 (en)
JP (1) JP2724427B2 (en)
CN (1) CN1077406A (en)
CA (1) CA2093046A1 (en)
DE (1) DE69313333T2 (en)
TW (1) TW223601B (en)

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US7175508B2 (en) 2003-06-03 2007-02-13 Nikon Corporation Polishing apparatus, method of manufacturing semiconductor device using the same, and semiconductor device manufactured by this method
KR102027934B1 (en) * 2018-06-14 2019-10-02 홍기수 Grinding Apparatus Of Pallet Steel Plate For Brick Manufacturing
KR20220014703A (en) * 2020-07-29 2022-02-07 주식회사 포스코 Apparatus for grinding steel sheet

Also Published As

Publication number Publication date
CN1077406A (en) 1993-10-20
CA2093046A1 (en) 1993-10-03
DE69313333T2 (en) 1998-03-26
EP0563954A1 (en) 1993-10-06
JP2724427B2 (en) 1998-03-09
TW223601B (en) 1994-05-11
DE69313333D1 (en) 1997-10-02
EP0563954B1 (en) 1997-08-27

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