JPH0527502Y2 - - Google Patents

Info

Publication number
JPH0527502Y2
JPH0527502Y2 JP1985113338U JP11333885U JPH0527502Y2 JP H0527502 Y2 JPH0527502 Y2 JP H0527502Y2 JP 1985113338 U JP1985113338 U JP 1985113338U JP 11333885 U JP11333885 U JP 11333885U JP H0527502 Y2 JPH0527502 Y2 JP H0527502Y2
Authority
JP
Japan
Prior art keywords
susceptor
vapor phase
bell gear
phase growth
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985113338U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6221080U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985113338U priority Critical patent/JPH0527502Y2/ja
Publication of JPS6221080U publication Critical patent/JPS6221080U/ja
Application granted granted Critical
Publication of JPH0527502Y2 publication Critical patent/JPH0527502Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985113338U 1985-07-23 1985-07-23 Expired - Lifetime JPH0527502Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985113338U JPH0527502Y2 (enrdf_load_stackoverflow) 1985-07-23 1985-07-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985113338U JPH0527502Y2 (enrdf_load_stackoverflow) 1985-07-23 1985-07-23

Publications (2)

Publication Number Publication Date
JPS6221080U JPS6221080U (enrdf_load_stackoverflow) 1987-02-07
JPH0527502Y2 true JPH0527502Y2 (enrdf_load_stackoverflow) 1993-07-13

Family

ID=30995050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985113338U Expired - Lifetime JPH0527502Y2 (enrdf_load_stackoverflow) 1985-07-23 1985-07-23

Country Status (1)

Country Link
JP (1) JPH0527502Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5116693U (enrdf_load_stackoverflow) * 1974-07-24 1976-02-06

Also Published As

Publication number Publication date
JPS6221080U (enrdf_load_stackoverflow) 1987-02-07

Similar Documents

Publication Publication Date Title
EP1386981B1 (en) A thin film-forming apparatus
JPH04218916A (ja) 熱処理装置
JPH02186622A (ja) サセプタ
JPH06247789A (ja) 単結晶引上げ装置用不活性ガス整流・吹付け装置
CN116555904A (zh) 一种用于硅片外延生长的基座以及装置
JPH09219369A (ja) 半導体装置の製造装置および製造方法
JPH0527502Y2 (enrdf_load_stackoverflow)
JPS63144513A (ja) バレル型エピタキシヤル成長装置
JPH07277887A (ja) 単結晶の製造装置および製造方法
JP2681115B2 (ja) 単結晶製造方法
JP2004134625A (ja) 半導体装置の製造方法と製造装置
KR20190009533A (ko) 에피택셜 웨이퍼 제조 방법 및 장치
JPH1050615A (ja) 枚葉式気相成長装置
JPS6058613A (ja) エピタキシャル装置
JP4801869B2 (ja) 単結晶成長方法
JPH0530350Y2 (enrdf_load_stackoverflow)
JPH02212393A (ja) 気相成長方法及びその装置
JPH07111958B2 (ja) 半導体のエピタキシャル成長方法
JPH01129973A (ja) 反応処理装置
JP3613099B2 (ja) 気相成長装置
JP2730155B2 (ja) 気相成長装置
JPH0632676Y2 (ja) 気相成長装置
JPS63319288A (ja) 鍔付石英るつぼ
JPH06124909A (ja) 縦型熱処理装置
JPS60170233A (ja) 半導体製造装置