JPH0527484Y2 - - Google Patents
Info
- Publication number
- JPH0527484Y2 JPH0527484Y2 JP3356088U JP3356088U JPH0527484Y2 JP H0527484 Y2 JPH0527484 Y2 JP H0527484Y2 JP 3356088 U JP3356088 U JP 3356088U JP 3356088 U JP3356088 U JP 3356088U JP H0527484 Y2 JPH0527484 Y2 JP H0527484Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- substrate
- thermometer
- heater
- dummy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 63
- 230000005855 radiation Effects 0.000 claims description 45
- 238000010438 heat treatment Methods 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 20
- 238000001704 evaporation Methods 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 9
- 238000007733 ion plating Methods 0.000 description 7
- 239000000126 substance Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 230000035515 penetration Effects 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3356088U JPH0527484Y2 (en, 2012) | 1988-03-14 | 1988-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3356088U JPH0527484Y2 (en, 2012) | 1988-03-14 | 1988-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01141758U JPH01141758U (en, 2012) | 1989-09-28 |
| JPH0527484Y2 true JPH0527484Y2 (en, 2012) | 1993-07-13 |
Family
ID=31260246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3356088U Expired - Lifetime JPH0527484Y2 (en, 2012) | 1988-03-14 | 1988-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527484Y2 (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007291475A (ja) * | 2006-04-27 | 2007-11-08 | Ulvac Japan Ltd | 近赤外線カットフィルター及びその製造方法 |
-
1988
- 1988-03-14 JP JP3356088U patent/JPH0527484Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01141758U (en, 2012) | 1989-09-28 |
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