JPH0527483Y2 - - Google Patents

Info

Publication number
JPH0527483Y2
JPH0527483Y2 JP13171687U JP13171687U JPH0527483Y2 JP H0527483 Y2 JPH0527483 Y2 JP H0527483Y2 JP 13171687 U JP13171687 U JP 13171687U JP 13171687 U JP13171687 U JP 13171687U JP H0527483 Y2 JPH0527483 Y2 JP H0527483Y2
Authority
JP
Japan
Prior art keywords
sample
ions
chamber
irradiated
plasma chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13171687U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6437650U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13171687U priority Critical patent/JPH0527483Y2/ja
Publication of JPS6437650U publication Critical patent/JPS6437650U/ja
Application granted granted Critical
Publication of JPH0527483Y2 publication Critical patent/JPH0527483Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Physical Vapour Deposition (AREA)
JP13171687U 1987-08-28 1987-08-28 Expired - Lifetime JPH0527483Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13171687U JPH0527483Y2 (enrdf_load_stackoverflow) 1987-08-28 1987-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13171687U JPH0527483Y2 (enrdf_load_stackoverflow) 1987-08-28 1987-08-28

Publications (2)

Publication Number Publication Date
JPS6437650U JPS6437650U (enrdf_load_stackoverflow) 1989-03-07
JPH0527483Y2 true JPH0527483Y2 (enrdf_load_stackoverflow) 1993-07-13

Family

ID=31388043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13171687U Expired - Lifetime JPH0527483Y2 (enrdf_load_stackoverflow) 1987-08-28 1987-08-28

Country Status (1)

Country Link
JP (1) JPH0527483Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01214380A (ja) * 1988-02-24 1989-08-28 K & K Kogyo Kk 脚部のプロテクタ
JPH0647314U (ja) * 1991-06-04 1994-06-28 有限会社ラフアンドロードスポーツ 下肢プロテクタ

Also Published As

Publication number Publication date
JPS6437650U (enrdf_load_stackoverflow) 1989-03-07

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