JPH0527246B2 - - Google Patents

Info

Publication number
JPH0527246B2
JPH0527246B2 JP59068497A JP6849784A JPH0527246B2 JP H0527246 B2 JPH0527246 B2 JP H0527246B2 JP 59068497 A JP59068497 A JP 59068497A JP 6849784 A JP6849784 A JP 6849784A JP H0527246 B2 JPH0527246 B2 JP H0527246B2
Authority
JP
Japan
Prior art keywords
conductive layer
layer
type conductive
silicon
engraving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59068497A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60211945A (ja
Inventor
Masaki Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP59068497A priority Critical patent/JPS60211945A/ja
Publication of JPS60211945A publication Critical patent/JPS60211945A/ja
Publication of JPH0527246B2 publication Critical patent/JPH0527246B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Pressure Sensors (AREA)
  • Weting (AREA)
JP59068497A 1984-04-06 1984-04-06 薄膜形成の方法 Granted JPS60211945A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59068497A JPS60211945A (ja) 1984-04-06 1984-04-06 薄膜形成の方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59068497A JPS60211945A (ja) 1984-04-06 1984-04-06 薄膜形成の方法

Publications (2)

Publication Number Publication Date
JPS60211945A JPS60211945A (ja) 1985-10-24
JPH0527246B2 true JPH0527246B2 (en:Method) 1993-04-20

Family

ID=13375388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59068497A Granted JPS60211945A (ja) 1984-04-06 1984-04-06 薄膜形成の方法

Country Status (1)

Country Link
JP (1) JPS60211945A (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376440A (ja) * 1986-09-19 1988-04-06 Nec Corp エツチング方法

Also Published As

Publication number Publication date
JPS60211945A (ja) 1985-10-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term