JPH0526734Y2 - - Google Patents
Info
- Publication number
- JPH0526734Y2 JPH0526734Y2 JP1984136248U JP13624884U JPH0526734Y2 JP H0526734 Y2 JPH0526734 Y2 JP H0526734Y2 JP 1984136248 U JP1984136248 U JP 1984136248U JP 13624884 U JP13624884 U JP 13624884U JP H0526734 Y2 JPH0526734 Y2 JP H0526734Y2
- Authority
- JP
- Japan
- Prior art keywords
- circumferential surface
- gas supply
- central axis
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 18
- 238000001947 vapour-phase growth Methods 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Pipeline Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984136248U JPH0526734Y2 (US20100056889A1-20100304-C00004.png) | 1984-09-10 | 1984-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984136248U JPH0526734Y2 (US20100056889A1-20100304-C00004.png) | 1984-09-10 | 1984-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6151729U JPS6151729U (US20100056889A1-20100304-C00004.png) | 1986-04-07 |
| JPH0526734Y2 true JPH0526734Y2 (US20100056889A1-20100304-C00004.png) | 1993-07-07 |
Family
ID=30694712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984136248U Expired - Lifetime JPH0526734Y2 (US20100056889A1-20100304-C00004.png) | 1984-09-10 | 1984-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526734Y2 (US20100056889A1-20100304-C00004.png) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50124256U (US20100056889A1-20100304-C00004.png) * | 1974-03-25 | 1975-10-11 |
-
1984
- 1984-09-10 JP JP1984136248U patent/JPH0526734Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6151729U (US20100056889A1-20100304-C00004.png) | 1986-04-07 |
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