JPH0526514Y2 - - Google Patents
Info
- Publication number
- JPH0526514Y2 JPH0526514Y2 JP1984027656U JP2765684U JPH0526514Y2 JP H0526514 Y2 JPH0526514 Y2 JP H0526514Y2 JP 1984027656 U JP1984027656 U JP 1984027656U JP 2765684 U JP2765684 U JP 2765684U JP H0526514 Y2 JPH0526514 Y2 JP H0526514Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- substrate
- pair
- substrates
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 26
- 238000004891 communication Methods 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 8
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 4
- 210000004027 cell Anatomy 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 210000002858 crystal cell Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2765684U JPS60139239U (ja) | 1984-02-28 | 1984-02-28 | 圧力センサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2765684U JPS60139239U (ja) | 1984-02-28 | 1984-02-28 | 圧力センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60139239U JPS60139239U (ja) | 1985-09-14 |
| JPH0526514Y2 true JPH0526514Y2 (de) | 1993-07-05 |
Family
ID=30524816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2765684U Granted JPS60139239U (ja) | 1984-02-28 | 1984-02-28 | 圧力センサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60139239U (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5021783A (de) * | 1973-05-24 | 1975-03-07 |
-
1984
- 1984-02-28 JP JP2765684U patent/JPS60139239U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5021783A (de) * | 1973-05-24 | 1975-03-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60139239U (ja) | 1985-09-14 |
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