JPH052612Y2 - - Google Patents
Info
- Publication number
- JPH052612Y2 JPH052612Y2 JP1219987U JP1219987U JPH052612Y2 JP H052612 Y2 JPH052612 Y2 JP H052612Y2 JP 1219987 U JP1219987 U JP 1219987U JP 1219987 U JP1219987 U JP 1219987U JP H052612 Y2 JPH052612 Y2 JP H052612Y2
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- plate
- molding
- forming
- side plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 50
- 239000010453 quartz Substances 0.000 claims description 45
- 239000013078 crystal Substances 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000007493 shaping process Methods 0.000 claims description 6
- 238000000465 moulding Methods 0.000 description 38
- 238000006073 displacement reaction Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000004031 devitrification Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1219987U JPH052612Y2 (enrdf_load_stackoverflow) | 1987-01-31 | 1987-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1219987U JPH052612Y2 (enrdf_load_stackoverflow) | 1987-01-31 | 1987-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63123674U JPS63123674U (enrdf_load_stackoverflow) | 1988-08-11 |
| JPH052612Y2 true JPH052612Y2 (enrdf_load_stackoverflow) | 1993-01-22 |
Family
ID=30800108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1219987U Expired - Lifetime JPH052612Y2 (enrdf_load_stackoverflow) | 1987-01-31 | 1987-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH052612Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-01-31 JP JP1219987U patent/JPH052612Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63123674U (enrdf_load_stackoverflow) | 1988-08-11 |
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