JPH0525789Y2 - - Google Patents
Info
- Publication number
- JPH0525789Y2 JPH0525789Y2 JP1986050820U JP5082086U JPH0525789Y2 JP H0525789 Y2 JPH0525789 Y2 JP H0525789Y2 JP 1986050820 U JP1986050820 U JP 1986050820U JP 5082086 U JP5082086 U JP 5082086U JP H0525789 Y2 JPH0525789 Y2 JP H0525789Y2
- Authority
- JP
- Japan
- Prior art keywords
- sliding guide
- carriage
- air
- air pads
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000000694 effects Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000036316 preload Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986050820U JPH0525789Y2 (no) | 1986-04-07 | 1986-04-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986050820U JPH0525789Y2 (no) | 1986-04-07 | 1986-04-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62161938U JPS62161938U (no) | 1987-10-15 |
JPH0525789Y2 true JPH0525789Y2 (no) | 1993-06-29 |
Family
ID=30874524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986050820U Expired - Lifetime JPH0525789Y2 (no) | 1986-04-07 | 1986-04-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0525789Y2 (no) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4547562B2 (ja) * | 2005-01-17 | 2010-09-22 | レーザーテック株式会社 | 検査装置 |
JP2014059035A (ja) * | 2012-09-19 | 2014-04-03 | Takenori Kawazoe | 移動機構および高さ測定器 |
EP3239649B1 (en) * | 2015-01-30 | 2019-04-17 | Tokyo Seimitsu Co., Ltd. | Three-dimensional coordinate measurement apparatus |
JP7206577B2 (ja) * | 2021-03-16 | 2023-01-18 | 株式会社東京精密 | 三次元座標測定装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5058454A (no) * | 1973-09-21 | 1975-05-21 | ||
JPS5419283A (en) * | 1977-07-11 | 1979-02-13 | Dea Spa | Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe |
JPS58177245A (ja) * | 1982-04-12 | 1983-10-17 | Toyoda Mach Works Ltd | 静圧軸受を用いた可動台のバ−ガイド装置 |
-
1986
- 1986-04-07 JP JP1986050820U patent/JPH0525789Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5058454A (no) * | 1973-09-21 | 1975-05-21 | ||
JPS5419283A (en) * | 1977-07-11 | 1979-02-13 | Dea Spa | Machine tool or measuring machine having sliding portion by pneumatic shoe and magnetic shoe |
JPS58177245A (ja) * | 1982-04-12 | 1983-10-17 | Toyoda Mach Works Ltd | 静圧軸受を用いた可動台のバ−ガイド装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS62161938U (no) | 1987-10-15 |
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