JPH0525169B2 - - Google Patents

Info

Publication number
JPH0525169B2
JPH0525169B2 JP59224923A JP22492384A JPH0525169B2 JP H0525169 B2 JPH0525169 B2 JP H0525169B2 JP 59224923 A JP59224923 A JP 59224923A JP 22492384 A JP22492384 A JP 22492384A JP H0525169 B2 JPH0525169 B2 JP H0525169B2
Authority
JP
Japan
Prior art keywords
distance
focal length
optical system
adjusted
detection range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59224923A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61102036A (ja
Inventor
Yoshibumi Nishimoto
Masahiko Okunuki
Takuo Karya
Yasuo Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59224923A priority Critical patent/JPS61102036A/ja
Priority to FR8515821A priority patent/FR2572515B1/fr
Priority to GB08526374A priority patent/GB2167262B/en
Priority to DE3538062A priority patent/DE3538062C2/de
Publication of JPS61102036A publication Critical patent/JPS61102036A/ja
Priority to US07/218,447 priority patent/US4830498A/en
Publication of JPH0525169B2 publication Critical patent/JPH0525169B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/32—Measuring distances in line of sight; Optical rangefinders by focusing the object, e.g. on a ground glass screen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/30—Systems for automatic generation of focusing signals using parallactic triangle with a base line
    • G02B7/32—Systems for automatic generation of focusing signals using parallactic triangle with a base line using active means, e.g. light emitter

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59224923A 1984-10-25 1984-10-25 間隔調整装置 Granted JPS61102036A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP59224923A JPS61102036A (ja) 1984-10-25 1984-10-25 間隔調整装置
FR8515821A FR2572515B1 (fr) 1984-10-25 1985-10-24 Dispositif de detection de position
GB08526374A GB2167262B (en) 1984-10-25 1985-10-25 A position detecting device
DE3538062A DE3538062C2 (de) 1984-10-25 1985-10-25 Positionserfassungsgerät
US07/218,447 US4830498A (en) 1984-10-25 1988-07-12 Position detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59224923A JPS61102036A (ja) 1984-10-25 1984-10-25 間隔調整装置

Publications (2)

Publication Number Publication Date
JPS61102036A JPS61102036A (ja) 1986-05-20
JPH0525169B2 true JPH0525169B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-04-12

Family

ID=16821285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59224923A Granted JPS61102036A (ja) 1984-10-25 1984-10-25 間隔調整装置

Country Status (1)

Country Link
JP (1) JPS61102036A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS61102036A (ja) 1986-05-20

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term