JPH0525043B2 - - Google Patents

Info

Publication number
JPH0525043B2
JPH0525043B2 JP10148185A JP10148185A JPH0525043B2 JP H0525043 B2 JPH0525043 B2 JP H0525043B2 JP 10148185 A JP10148185 A JP 10148185A JP 10148185 A JP10148185 A JP 10148185A JP H0525043 B2 JPH0525043 B2 JP H0525043B2
Authority
JP
Japan
Prior art keywords
light source
signal generator
laser scanner
modulated
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10148185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61260106A (ja
Inventor
Shigeru Kawai
Keiichi Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP10148185A priority Critical patent/JPS61260106A/ja
Publication of JPS61260106A publication Critical patent/JPS61260106A/ja
Publication of JPH0525043B2 publication Critical patent/JPH0525043B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP10148185A 1985-05-15 1985-05-15 ３次元計測方法および装置 Granted JPS61260106A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10148185A JPS61260106A (ja) 1985-05-15 1985-05-15 ３次元計測方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10148185A JPS61260106A (ja) 1985-05-15 1985-05-15 ３次元計測方法および装置

Publications (2)

Publication Number Publication Date
JPS61260106A JPS61260106A (ja) 1986-11-18
JPH0525043B2 true JPH0525043B2 (enrdf_load_stackoverflow) 1993-04-09

Family

ID=14301906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10148185A Granted JPS61260106A (ja) 1985-05-15 1985-05-15 ３次元計測方法および装置

Country Status (1)

Country Link
JP (1) JPS61260106A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4962852B2 (ja) * 2007-03-05 2012-06-27 株式会社ニコン 形状測定方法および形状測定装置
CN109323665B (zh) * 2018-01-31 2020-03-27 黑龙江科技大学 一种线结构光驱动全息干涉的精密三维测量方法

Also Published As

Publication number Publication date
JPS61260106A (ja) 1986-11-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term