JPH05249700A - Photomask matching device - Google Patents

Abstract

PURPOSE:To attain aligning in a short time by providing a mechanism for roughly positioning a printed wiring board and a photomask with pins before a matching operation by the confirmation of an image is executed. CONSTITUTION:A pin elevating/lowering mechanism 8 for roughly positioning is provided, and the pins 9 are inserted into holes previously formed on the photomask 1 and the printed wiring board 2 to roughly position them. In other words, at the time of starting work, the pins 9 are elevated by the pin elevating/ lowering mechanism 8, and the printed wiring board 2 is arranged. At this time, the printed wiring board 2 has the formation of the hole whose outer diameter is a little larger than that of the pin 9 to fit it into the hole. Then, the photomask 1 is arranged, and the hole into which the pin 9 is fitted is formed on this photomask 9, like the printed wiring board 2, as well. Then, the pin 9 is lowered, a camera 4 reads a matched mark, and a controller 5 calculates a deviation value and judges an error. When the error exceeds a permissible level, the photomask 1 is moved by a sucking/moving arm 7, and then, reading with the camera 4 can be reexecuted.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photomask aligning device which includes a photomask on which a printed wiring pattern is formed and which aligns the photomask with the printed wiring board.

[0002]

2. Description of the Related Art Conventionally, in a manufacturing process of a printed wiring board, a photomask having a printed wiring pattern formed thereon and a printed wiring board to which the pattern is transferred are generally aligned by visual alignment. .. That is, a means has been adopted in which alignment marks are provided on the photomask and the printed wiring board, and the positional deviation between the marks is visually recognized to correct the position. On the other hand, recently, with the increase in the density of printed wiring, there has been a demand for higher accuracy in these alignments.
Therefore, in this type of device, a mechanism for matching the photomask and the printed wiring board has been developed and put into practical use by applying the image recognition technology.

FIGS. 3A and 3B are schematic views showing an example of a conventional photomask matching apparatus. As shown in FIG. 3, this photomask aligning apparatus is provided with a table 3 on which a photomask 1 and a printed wiring board 2 are set, and an alignment table provided on the table 3 and on the photomask 1 and the printed wiring board 2. A camera 4 for picking up an image of the mark, converting the image into a video signal, and outputting the video signal; and a control device 5 for inputting the video signal, calculating a positional deviation between the photomask 1 and the printed wiring board 2, and outputting a correction signal. , And a suction moving arm 7 for moving the photomask 1 according to the correction signal so as to match the alignment marks.

This photomask aligning device can automatically align the photomask 1 on the fixed printed wiring board and the camera 4 can recognize the alignment mark.

[0005]

However, in the conventional photomask alignment apparatus, the alignment mark between the photomask 1 and the printed wiring board 2 must be within the field of view of the camera 4 as a condition for performing the above alignment operation. Yes, for this reason, before operating the photomask matching device, the camera 4
It was necessary to align the positions of the photomask 1 and the printed wiring board 2 while observing the image obtained from. And this work is not only very troublesome, but also consumes a lot of time compared with the actual aligning operation time.

[0006] An object of the present invention is to provide a photomask aligning apparatus which does not require rough positioning by manual work in order to solve such a problem.

[0007]

A photomask matching apparatus of the present invention includes a table on which a photomask and a printed wiring board to be matched are installed, and a camera which reads a registration mark of the photomask and the printed wiring board. A suction movement arm for moving the photomask, a control device for recognizing a video signal output from the camera, calculating a positional deviation between the photomask and the alignment mark of the printed wiring, and moving the suction movement arm. And a pin driving mechanism that is attached to the table and that inserts and removes pins into and from the positioning holes of the photomask and the printed wiring board.

[0008]

The present invention will be described below with reference to the drawings.

FIG. 1 is a diagram showing the outline of an embodiment of the photomask matching apparatus of the present invention, and FIG. 2 is a flow chart for explaining the operation of the photomask matching apparatus of FIG. This photomask matching device, as shown in FIG.
The pin up / down mechanism 8 for rough positioning is provided. This is to perform rough positioning by inserting the pins 9 into the holes formed in the photomask 1 and the printed wiring board 2 in advance.

Next, the operation of this photomask matching device will be described. First, at the start of work in step A of FIG. 2, the pin 9 is raised by the pin up / down mechanism 8. Next, step B
The printed wiring board 2 is arranged by. At this time, a hole slightly larger than the outer diameter of the pin 9 is formed in the printed wiring board 2 in advance so that the hole fits with the pin 9. Next, in step C, the photomask 1 is placed. Like the printed wiring board 2, holes are formed in advance so as to fit the pins 9. Next, in step D, the pin 9 descends. Next, in step E, the alignment mark is read by the camera 4, the deviation amount is calculated by the control device in step F, and the error determination is performed in step G. If the error exceeds the allowable amount, in step H, the suction moving arm is detected. After the photomask 1 is moved by 7, the reading operation by the camera 4 is performed again from step E. If the error is equal to or less than the allowable amount in step G, the work ends.

If the rough positioning mechanism is provided in this manner, conventionally, it is not necessary to perform the positioning operation while viewing the image, and it is sufficient to simply insert the printed wiring board and the photomask into the protruding pins and mount them. There is an effect. Note that the field of view of the camera is usually 4 mm to 10 mm square, and if the clearance for fitting the pins is 50 μm, the fitting will be smooth. In consideration of this and the variation in the hole positions of the printed wiring board and the photomask, the fitting clearance is set to 1 mm. For example, when the field of view is 4 mm square, the pin diameter is 2 mm and the clearance is 1.
Even in mm, sufficient rough positioning can be performed.

[0012]

As described above, according to the present invention, a mechanism for preliminarily performing the rough positioning of the printed wiring board 2 and the photomask 1 by the pin 9 is provided by hand before the alignment operation by image recognition. There is an effect that it is possible to obtain a photomask matching device that can perform alignment in a shorter time without performing rough positioning work.

[Brief description of drawings]

FIG. 1 is a diagram schematically showing an embodiment of a photomask matching device of the present invention.

FIG. 2 is a flow chart for explaining the operation of the photomask matching device in FIG.

FIG. 3 is a diagram schematically showing an example of a conventional photomask matching device.

[Explanation of symbols]

 1 Photomask 2 Printed wiring board 3 Table 4 Camera 5 Control device 7 Adsorption moving arm 8 pin Vertical mechanism 9 pin

Claims (1)

[Claims] 1. A table on which a photomask and a printed wiring board to be aligned are set, a camera for reading alignment marks of the photomask and the printed wiring board, a suction movement arm for moving the photomask, and A control device for recognizing a video signal output from a camera, calculating a positional shift between the photomask and the alignment mark of the printed wiring, and moving the suction moving arm, the photomask attached to the table, and the printing A photomask matching device, comprising: a pin driving mechanism for inserting and removing pins into a positioning hole of a wiring board.