JPH05234829A - Solid electrolytic capacitor - Google Patents

Solid electrolytic capacitor

Info

Publication number
JPH05234829A
JPH05234829A JP4033568A JP3356892A JPH05234829A JP H05234829 A JPH05234829 A JP H05234829A JP 4033568 A JP4033568 A JP 4033568A JP 3356892 A JP3356892 A JP 3356892A JP H05234829 A JPH05234829 A JP H05234829A
Authority
JP
Japan
Prior art keywords
solid electrolytic
electrolytic capacitor
lead frame
anode
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4033568A
Other languages
Japanese (ja)
Other versions
JP3441088B2 (en
Inventor
Kazumi Naito
一美 内藤
Yoshinobu Sakurai
好信 桜井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP03356892A priority Critical patent/JP3441088B2/en
Publication of JPH05234829A publication Critical patent/JPH05234829A/en
Application granted granted Critical
Publication of JP3441088B2 publication Critical patent/JP3441088B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To make the high-frequency performance of the title capacitor good by a method wherein a plurality of solid electrolytic capacitor elements are mounted in parallel on, and bonded to, one pair of protrusion parts on a lead frame provided with the pair of protrusion parts arranged so as to be faced and they are sealed with a resin by partly leaving the protrusion parts on the lead frame. CONSTITUTION:Three solid electrolytic capacitor elements in which up to conductor layers have been formed are mounted in parallel on a lead frame provided with one pair of protrusion parts on which conductor-layer formation parts are mounted, whose thickness is 0.1mm and whose material is 42 Alloy. The conductor-layer formation parts are formed of a silver paste; individual anode leads are connected electrically and mechanically by a welding operation. After that, the protrusion parts on the lead frame are left partly; they are sealed with an epoxy resin; a solid electrolytic capacitor is manufactured. As a result, an anode base body at the capacitor is divided into a plurality of anode base bodies. The distance over which an electric current flows to the lead frame through the conductor layers from the anode base bodies is made short to a certain extent. As a result, a resistance value between them is reduced, and the high-frequency performance of the capacitor becomes good.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は高周波性能の良好な固体
電解コンデンサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid electrolytic capacitor having good high frequency performance.

【0002】[0002]

【従来の技術】従来の固体電解コンデンサは、図3にそ
の構造を斜視図として示してあるように、1個の固体電
解コンデンサ素子2の表面に形成された導電体層3の一
部と陽極リード4bをリードフレーム1に一対の対向し
て配置された凸部1a、1bに載置し、それぞれ接合し
た後、リードフレームの凸部の一部のみを残して樹脂で
封口して外装部5を形成したものが知られている。
2. Description of the Related Art A conventional solid electrolytic capacitor has a structure in which a portion of a conductor layer 3 formed on the surface of one solid electrolytic capacitor element 2 and an anode are shown in FIG. The leads 4b are placed on the pair of projecting portions 1a, 1b arranged opposite to each other on the lead frame 1 and bonded to each other. Then, only a part of the projecting portion of the lead frame is sealed with a resin and the exterior portion 5 Is known to have formed.

【0003】[0003]

【発明が解決しようとする課題】一方、近年の電子機器
の高周波化に対応して、固体電解コンデンサにおいても
高周波性能の良好なものが望まれているが、例えば固体
電解コンデンサ素子が多孔性焼結体の場合、焼結体の強
度を維持するためにある程度の厚みを必要とし、その結
果、高周波性能が良好でないという欠点があった。
On the other hand, in response to the high frequency of electronic equipment in recent years, a solid electrolytic capacitor having good high frequency performance is desired. In the case of the bonded body, a certain amount of thickness is required to maintain the strength of the sintered body, and as a result, the high frequency performance is not good.

【0004】[0004]

【課題を解決するための手段】本発明は前述した問題点
を解決するためになされたものであって、その要旨は陽
極部を有し、弁作用金属よりなる陽極基体の表面に誘電
体酸化皮膜層、その上に半導体層、さらにその上に導電
体層を順次形成した複数の固体電解コンデンサ素子が、
一対の対向して配置された凸部を有するリードフレーム
の前記凸部に並列に載置して接合されており、前記リー
ドフレームの凸部の一部を残して樹脂封口している固体
電解コンデンサにある。
The present invention has been made to solve the above-mentioned problems, and its gist is to have a dielectric oxide on the surface of an anode substrate made of a valve metal having an anode portion. A plurality of solid electrolytic capacitor elements in which a film layer, a semiconductor layer on the film layer, and a conductor layer on the film layer are sequentially formed,
A solid electrolytic capacitor which is placed in parallel with and bonded to the convex portions of a lead frame having a pair of convex portions arranged to face each other, and which is sealed with a resin leaving a part of the convex portions of the lead frame. It is in.

【0005】以下、本発明を図面を参照しながら説明す
る。図1は、本発明の固体電解コンデンサを説明する一
例を示す斜視図である。図1は、リードフレーム1に設
けられている一対の対向して配置された凸部1a、1b
に3個の固体電解コンデンサ素子2の表面にそれぞれ形
成された導電体層3の一部と陽極部となる陽極リード4
bが載置されており、前者は銀ペースト等で、後者は熔
接等で接続した状態を示している。そしてリードフレー
ムの一部を残して樹脂で封口して外装部5を形成してい
る。
The present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing an example for explaining the solid electrolytic capacitor of the present invention. FIG. 1 shows a pair of projecting portions 1 a, 1 b provided on the lead frame 1 and facing each other.
And a part of the conductor layer 3 formed on the surface of each of the three solid electrolytic capacitor elements 2 and an anode lead 4 serving as an anode part.
b is placed, the former is a silver paste or the like, and the latter is a state in which they are connected by welding or the like. Then, a part of the lead frame is left and sealed with a resin to form the exterior part 5.

【0006】3個の固体電解コンデンサ素子は、後述す
るように導電体層まで形成した後、リードフレームの凸
部に方向を揃えて並列に載置することが肝要で、この場
合、隙間なく載置することが、全体としての固体電解コ
ンデンサの小型化のために好都合である。なお、リード
フレームの一対の凸部に載置する固体電解コンデンサ素
子は3個に限定されるものではなく、複数個である。ま
た、リードフレームに対して垂直に固体電解コンデンサ
素子を重ねて載置することは、全体としての固体電解コ
ンデンサの高さが高くなるために不都合である。
It is essential that the three solid electrolytic capacitor elements are formed in parallel to the convex portions of the lead frame after being formed up to the conductor layer, as will be described later. It is convenient to place the solid electrolytic capacitor for miniaturization. The number of solid electrolytic capacitor elements mounted on the pair of convex portions of the lead frame is not limited to three and may be plural. Further, it is inconvenient to stack and mount the solid electrolytic capacitor element vertically to the lead frame because the height of the solid electrolytic capacitor as a whole becomes high.

【0007】本発明を構成する固体電解コンデンサ素子
は、以下のようにして作製される。まず、弁作用を有す
る陽極基体としては、例えばアルミニウム、タンタル、
及びこれらを基質とする合金等、弁作用を有する金属が
いずれも使用できる。そして陽極基体の形状としては、
アルミニウムの板やタンタルの焼結体がある。
The solid electrolytic capacitor element constituting the present invention is manufactured as follows. First, as the anode substrate having a valve action, for example, aluminum, tantalum,
Also, any metal having a valve action such as an alloy using these as a substrate can be used. And as the shape of the anode substrate,
There are aluminum plates and sintered tantalum.

【0008】陽極基体の表面に設ける誘電体酸化皮膜層
は、弁作用金属の表面上に設けられた他の誘電体酸化物
の層であってもよいが、特に弁作用金属自体の酸化物か
らなる層であることが好ましい。いずれの場合にも酸化
物層を設ける方法としては、電解液を用いた陽極化成法
など従来公知の方法を用いることができる。
The dielectric oxide film layer provided on the surface of the anode substrate may be a layer of another dielectric oxide provided on the surface of the valve metal, but especially from the oxide of the valve metal itself. It is preferable that the layer is In any case, as a method for providing the oxide layer, a conventionally known method such as an anodization method using an electrolytic solution can be used.

【0009】次に、誘電体酸化皮膜層上に半導体層を形
成させるが、誘電体酸化皮膜層まで形成した部分の一部
を図2に示したように陽極部4aとして設けるか、又は
図1で示したようにこの部分の一部に陽極リード4bを
接続して陽極部としておく。陽極リードを陽極部として
使用するには、前述した以外に、例えば陽極基体を作製
する時に、あらかじめ陽極リードの一部を陽極基体中に
埋設しておいてもよい。
Next, a semiconductor layer is formed on the dielectric oxide film layer. A part of the portion formed up to the dielectric oxide film layer is provided as the anode portion 4a as shown in FIG. The anode lead 4b is connected to a part of this portion as shown in FIG. In order to use the anode lead as the anode part, other than the above, for example, when the anode substrate is manufactured, a part of the anode lead may be embedded in the anode substrate in advance.

【0010】そして半導体層は、これらの陽極部とした
部分を除いて誘電体酸化皮膜層上に設けられ、さらにそ
の上に導電体層を積層して導電体層形成部を形成する。
誘電体酸化皮膜層上に設けられる半導体層の種類には特
に制限は無く、従来公知の半導体層を使用できるが、と
りわけ本願出願人の出願による二酸化鉛、又は二酸化鉛
と硫酸鉛からなる半導体層(特開昭62−256423
号公報、特開昭63−51621号公報)が、作製した
コンデンサの高周波性能が良好なために好ましい。
The semiconductor layer is provided on the dielectric oxide film layer except for those portions which are anode portions, and a conductor layer is further laminated thereon to form a conductor layer forming portion.
The type of the semiconductor layer provided on the dielectric oxide film layer is not particularly limited, and a conventionally known semiconductor layer can be used. In particular, a lead dioxide filed by the applicant of the present application or a semiconductor layer composed of lead dioxide and lead sulfate. (Japanese Patent Laid-Open No. 62-256423
JP-A-63-51621) is preferable because the high-frequency performance of the produced capacitor is good.

【0011】また酸化剤と有機酸を用いて気相重合によ
ってポリアニリン、ポリピロール等の電導性高分子化合
物を半導体層として形成させる方法(特開昭62−47
109号公報)や、タリウムイオン及び過硫酸イオンを
含んだ反応母液から化学的に酸化第2タリウムを半導体
層として析出させる方法(特開昭62−38715号公
報)もその一例である。
Further, a method of forming a conductive polymer compound such as polyaniline or polypyrrole as a semiconductor layer by gas phase polymerization using an oxidizing agent and an organic acid (JP-A-62-47).
No. 109), or a method of chemically depositing thallium oxide as a semiconductor layer from a reaction mother liquor containing thallium ions and persulfate ions (Japanese Patent Laid-Open No. 62-38715).

【0012】このような半導体層上には、例えばカーボ
ンペースト及び/又は銀ペースト等の従来公知の導電ペ
ーストを積層して導電体層が形成されている。図1はこ
のようにして形成された固体電解コンデンサ素子2に陽
極リード4bが接続されており、図2は3個の固体電解
コンデンサ素子2が一対のリードフレームの凸部1a、
1bに載置された斜視図であり、固体電解コンデンサ素
子2自身の一部分に陽極部4aが形成されている。
On such a semiconductor layer, a conductor layer is formed by laminating a conventionally known conductive paste such as carbon paste and / or silver paste. In FIG. 1, an anode lead 4b is connected to the solid electrolytic capacitor element 2 thus formed, and in FIG. 2, three solid electrolytic capacitor elements 2 are formed by a pair of convex portions 1a of the lead frame,
1b is a perspective view of the solid electrolytic capacitor element 2 itself, on which a positive electrode portion 4a is formed.

【0013】このようにして形成された固体電解コンデ
ンサ素子は前述したように、複数個方向を揃えて、一対
の対向して配置されたリードフレームの凸部に載置後、
接合され、図1及び図2の破線部で示したようにリード
フレームの凸部1a、1bの一部を除いて封口され外装
部5が形成される。外装部5の封口材として、例えばエ
ポキシ樹脂、フェノール樹脂、アリルエステル樹脂等が
用いられ、トランスファー成型、射出成型、注型成型等
によって封口作業が行われる。
As described above, the solid electrolytic capacitor element thus formed is aligned in a plurality of directions and placed on the convex portions of the pair of lead frames arranged so as to face each other.
The exterior portion 5 is formed by joining and sealing the lead frame except a part of the convex portions 1a and 1b as shown by the broken line portions in FIGS. An epoxy resin, a phenol resin, an allyl ester resin, or the like is used as a sealing material for the outer casing 5, and the sealing work is performed by transfer molding, injection molding, cast molding or the like.

【0014】[0014]

【作用】一対の対向して配置されたリードフレームの凸
部に複数個の固体電解コンデンサ素子が並列に載置、接
合されており、結果として、陽極基体が複数個に分割さ
れていることになり、陽極基体内部から導電体層を通し
て、リードフレームへ流れる電流の距離がある程度短く
なるため、その間の抵抗値が小さくなり高周波性能が良
好になる。
A plurality of solid electrolytic capacitor elements are placed and joined in parallel on the convex portions of a pair of lead frames arranged so as to face each other, and as a result, the anode substrate is divided into a plurality of parts. Therefore, the distance of the current flowing from the inside of the anode substrate through the conductor layer to the lead frame is shortened to some extent, so that the resistance value between them is reduced and the high frequency performance is improved.

【0015】[0015]

【実施例】以下、実施例及び比較例を示して本発明を説
明する。 実施例1、2 りん酸水溶液中で化成処理して表面に誘電体酸化皮膜層
を形成し、タンタルの陽極リードの一部を埋設したタン
タル焼結体を陽極基体として用意しその寸法を表1に示
した。次に酢酸鉛三水和物2.4モル/lの水溶液と過
硫酸アンモニウム4.0モル/l水溶液の混合液に、前
記陽極基体を浸漬し、60℃で20分放置した。この操
作を4回行って、二酸化鉛と硫酸鉛からなる半導体層を
形成した。次いで、半導体層上にカーボンペースト及び
銀ペーストを順に積層して導電体層を形成した。
EXAMPLES The present invention will be described below with reference to Examples and Comparative Examples. Examples 1 and 2 A tantalum sintered body, in which a dielectric oxide film layer was formed on the surface by chemical conversion treatment in a phosphoric acid aqueous solution and a part of a tantalum anode lead was embedded, was prepared as an anode substrate, and its dimensions are shown in Table 1. It was shown to. Next, the anode substrate was immersed in a mixed solution of a 2.4 mol / l aqueous solution of lead acetate trihydrate and a 4.0 mol / l aqueous solution of ammonium persulfate and left at 60 ° C. for 20 minutes. This operation was repeated 4 times to form a semiconductor layer composed of lead dioxide and lead sulfate. Next, a carbon paste and a silver paste were sequentially laminated on the semiconductor layer to form a conductor layer.

【0016】一方、別に用意した厚さ0.1mm、材質が
42アロイ、導電体層形成部が載る凸部の寸法を表1に
並記した一対の凸部を有するリードフレームに、前記し
た導電体層まで形成した固体電解コンデンサ素子を3
個、並列に載置し、導電体層形成部は銀ペーストで、陽
極リードは熔接で各々電気的かつ機械的に接続した後、
リードフレームの凸部の一部を残して、エポキシ樹脂で
封口し、固体電解コンデンサを作製した。
On the other hand, a separately prepared lead frame having a thickness of 0.1 mm, a material of 42 alloy and a pair of convex portions in which the dimensions of the convex portions on which the conductor layer forming portion is mounted are listed in Table 1 are used. 3 solid electrolytic capacitor elements formed up to the body layer
Placed in parallel, the conductor layer forming part is made of silver paste, and the anode leads are electrically and mechanically connected by welding, respectively,
A solid electrolytic capacitor was produced by sealing a part of the lead frame with epoxy resin while leaving a part of the projecting part.

【0017】実施例3、4 実施例1、2で、陽極基体を表1に寸法を記載した長方
形状で、りん酸アンモニウム水溶液で誘電体酸化皮膜層
を形成したエッチングアルミニウム板にし、陽極基体の
一部(端面から2mm)を陽極部とし、さらに半導体層を
酢酸鉛三水和物2.0モル/l水溶液に陽極基体の一部
を浸漬して、別に用意した白金陰極との間で電気化学的
に形成して二酸化鉛にした以外は実施例1、2と同様に
3個の固体電解コンデンサ素子を並列に接合して固体電
解コンデンサを作製した。
Examples 3 and 4 In Examples 1 and 2, the anode substrate was a rectangular aluminum plate having dimensions described in Table 1 and formed into an etched aluminum plate having a dielectric oxide film layer formed with an aqueous solution of ammonium phosphate. A part (2 mm from the end face) is used as the anode part, and the semiconductor layer is further immersed in a 2.0 mol / l aqueous solution of lead acetate trihydrate to immerse a part of the anode substrate in order to generate electricity between a separately prepared platinum cathode. Three solid electrolytic capacitor elements were joined in parallel in the same manner as in Examples 1 and 2 except that they were chemically formed into lead dioxide to produce a solid electrolytic capacitor.

【0018】比較例1 実施例1でタンタル焼結体の大きさを表1に記載した大
きさにし、リードフレームに固体電解コンデンサ素子を
1個載置して接合した以外は実施例1と同様にして固体
電解コンデンサを作製した。
Comparative Example 1 The same as Example 1 except that the size of the tantalum sintered body was set to the size shown in Table 1 and one solid electrolytic capacitor element was placed on the lead frame and bonded. Then, a solid electrolytic capacitor was produced.

【0019】[0019]

【表1】 以上作製した直後の固体電解コンデンサの性能を表2に
まとめて示した。なお、全数値はn=20点の平均値で
ある。
[Table 1] The performance of the solid electrolytic capacitor immediately after the above production is summarized in Table 2. All numerical values are average values of n = 20 points.

【0020】[0020]

【表2】 [Table 2]

【0021】[0021]

【発明の効果】本発明の固体電解コンデンサは、固体電
解コンデンサ素子を複数個並列にリードフレームの一つ
の凸部に載置して接合しているので作製した固体電解コ
ンデンサは高周波性能が良好である。
In the solid electrolytic capacitor of the present invention, a plurality of solid electrolytic capacitor elements are placed in parallel on one convex portion of the lead frame and joined, so that the solid electrolytic capacitor produced has good high frequency performance. is there.

【図面の簡単な説明】[Brief description of drawings]

【図1】陽極リードを有する固体電解コンデンサ素子を
3個並列にリードフレームに載置した状態を示す斜視図
である。
FIG. 1 is a perspective view showing a state where three solid electrolytic capacitor elements having anode leads are mounted in parallel on a lead frame.

【図2】固体電解コンデンサ素子自体に陽極部を有する
固体電解コンデンサ素子を3個、リードフレームに載置
した状態を示す斜視図である。
FIG. 2 is a perspective view showing a state in which three solid electrolytic capacitor elements each having an anode portion are mounted on a lead frame in the solid electrolytic capacitor element itself.

【図3】リードフレームに接続した固体電解コンデンサ
素子を示す従来例の斜視図である。
FIG. 3 is a perspective view of a conventional example showing a solid electrolytic capacitor element connected to a lead frame.

【符号の説明】[Explanation of symbols]

1 リードフレーム 1a リードフレームの一方の凸部 1b リードフレームの他方の凸部 2 固体電解コンデンサ素子 3 導電体層 4a 陽極部 4b 陽極リード 5 外装部 DESCRIPTION OF SYMBOLS 1 Lead frame 1a One convex part of the lead frame 1b The other convex part of the lead frame 2 Solid electrolytic capacitor element 3 Conductor layer 4a Anode part 4b Anode lead 5 Exterior part

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 陽極部を有し、弁作用金属よりなる陽極
基体の表面に誘電体酸化皮膜層、その上に半導体層、さ
らにその上に導電体層を順次形成した複数の固体電解コ
ンデンサ素子が、一対の対向して配置された凸部を有す
るリードフレームの前記凸部に並列に載置して接合され
ており、前記リードフレームの凸部の一部を残して樹脂
封口していることを特徴とする固体電解コンデンサ。
1. A plurality of solid electrolytic capacitor elements in which a dielectric oxide film layer is formed on the surface of an anode substrate made of a valve metal, which has an anode portion, a semiconductor layer is formed thereon, and a conductor layer is formed thereon. Are mounted and joined in parallel to the convex portions of the lead frame having a pair of opposed convex portions, and are sealed with a resin while leaving a part of the convex portions of the lead frame. Solid electrolytic capacitor characterized by.
JP03356892A 1992-02-20 1992-02-20 Method for manufacturing solid electrolytic capacitor Expired - Lifetime JP3441088B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03356892A JP3441088B2 (en) 1992-02-20 1992-02-20 Method for manufacturing solid electrolytic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03356892A JP3441088B2 (en) 1992-02-20 1992-02-20 Method for manufacturing solid electrolytic capacitor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2003044157A Division JP3932191B2 (en) 2003-02-21 2003-02-21 Solid electrolytic capacitor

Publications (2)

Publication Number Publication Date
JPH05234829A true JPH05234829A (en) 1993-09-10
JP3441088B2 JP3441088B2 (en) 2003-08-25

Family

ID=12390156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03356892A Expired - Lifetime JP3441088B2 (en) 1992-02-20 1992-02-20 Method for manufacturing solid electrolytic capacitor

Country Status (1)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004079760A1 (en) * 2003-03-03 2004-09-16 Showa Denko K.K. Chip solid electrolyte capacitor
WO2005017929A1 (en) * 2003-08-13 2005-02-24 Showa Denko K.K. Chip solid electrolyte capcitor and production method of the same
JP2005093994A (en) * 2003-08-13 2005-04-07 Showa Denko Kk Chip-like solid electrolytic capacitor and manufacturing method therefor
DE102005007582A1 (en) * 2005-02-18 2006-08-24 Epcos Ag Capacitor with a low equivalent series resistor and capacitor arrangement
US7193840B2 (en) 2005-03-29 2007-03-20 Sanyo Electric Co., Ltd. Solid electrolytic capacitor
US8345408B2 (en) 2009-09-24 2013-01-01 Showa Denko K.K. Method for producing solid electrolytic capacitor
JP2016063331A (en) * 2014-09-17 2016-04-25 Necトーキン株式会社 Resonator, electronic pen, and method of manufacturing resonator

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004079760A1 (en) * 2003-03-03 2004-09-16 Showa Denko K.K. Chip solid electrolyte capacitor
US7218505B2 (en) 2003-03-03 2007-05-15 Showa Denko K.K. Chip solid electrolyte capacitor
WO2005017929A1 (en) * 2003-08-13 2005-02-24 Showa Denko K.K. Chip solid electrolyte capcitor and production method of the same
JP2005093994A (en) * 2003-08-13 2005-04-07 Showa Denko Kk Chip-like solid electrolytic capacitor and manufacturing method therefor
US7609505B2 (en) 2003-08-13 2009-10-27 Showa Denko K.K. Chip solid electrolyte capacitor and production method of the same
DE102005007582A1 (en) * 2005-02-18 2006-08-24 Epcos Ag Capacitor with a low equivalent series resistor and capacitor arrangement
US7193840B2 (en) 2005-03-29 2007-03-20 Sanyo Electric Co., Ltd. Solid electrolytic capacitor
US8345408B2 (en) 2009-09-24 2013-01-01 Showa Denko K.K. Method for producing solid electrolytic capacitor
JP2016063331A (en) * 2014-09-17 2016-04-25 Necトーキン株式会社 Resonator, electronic pen, and method of manufacturing resonator

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