JPH0522847Y2 - - Google Patents
Info
- Publication number
- JPH0522847Y2 JPH0522847Y2 JP1987074218U JP7421887U JPH0522847Y2 JP H0522847 Y2 JPH0522847 Y2 JP H0522847Y2 JP 1987074218 U JP1987074218 U JP 1987074218U JP 7421887 U JP7421887 U JP 7421887U JP H0522847 Y2 JPH0522847 Y2 JP H0522847Y2
- Authority
- JP
- Japan
- Prior art keywords
- black image
- chart
- vertical
- horizontal
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987074218U JPH0522847Y2 (OSRAM) | 1987-05-18 | 1987-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987074218U JPH0522847Y2 (OSRAM) | 1987-05-18 | 1987-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63183533U JPS63183533U (OSRAM) | 1988-11-25 |
| JPH0522847Y2 true JPH0522847Y2 (OSRAM) | 1993-06-11 |
Family
ID=30919232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987074218U Expired - Lifetime JPH0522847Y2 (OSRAM) | 1987-05-18 | 1987-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0522847Y2 (OSRAM) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561330A (en) * | 1979-06-19 | 1981-01-09 | Ricoh Co Ltd | Frequency chart for measuring mtf |
| JPS5872028A (ja) * | 1981-10-27 | 1983-04-28 | Ricoh Co Ltd | レンズの尖鋭度測定装置 |
-
1987
- 1987-05-18 JP JP1987074218U patent/JPH0522847Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63183533U (OSRAM) | 1988-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4842411A (en) | Method of automatically measuring the shape of a continuous surface | |
| KR100389976B1 (ko) | 얼라인먼트방법및장치 | |
| US6122078A (en) | Self calibrating scanner with single or multiple detector arrays and single or multiple optical systems | |
| JPS61281915A (ja) | 路面性状計測車両装置 | |
| US6219442B1 (en) | Apparatus and method for measuring distortion of a visible pattern on a substrate by viewing predetermined portions thereof | |
| JPS5654038A (en) | Checking device for shape of photomask | |
| JPH1019562A (ja) | 測量装置および測量方法 | |
| JPH0522847Y2 (OSRAM) | ||
| Nardin et al. | Automation of a series of cutaneous topography measurements from silicon rubber replicas | |
| JPH0719869A (ja) | 構築物の変位検出方法及びこれに用いるターゲットプレート | |
| JP3135063B2 (ja) | 比較検査方法および装置 | |
| JPS6356702B2 (OSRAM) | ||
| EP0198571B1 (en) | Method and system for patching original and extracting original-trimming data in scanner | |
| JP3326444B2 (ja) | 位置合わせ方法及びパターンの継ぎ合わせ精度測定方法 | |
| JP2001272217A (ja) | パターン検査システムの検査条件補正方法、半導体製造用マスク、パターン検査システムおよび記録媒体 | |
| JP3111869B2 (ja) | 2次元位置姿勢測定方法及び装置 | |
| JPS6055867B2 (ja) | ハンドスキャナ型画像入力装置 | |
| JPH0711410B2 (ja) | 部品検査装置 | |
| JPH03232215A (ja) | 位置合せ方法 | |
| JP4188558B2 (ja) | レーザ走査方法およびシステム | |
| JP2001264031A (ja) | 形状計測方法及びその装置 | |
| JPS62192607A (ja) | 複写機現像槽の検査方法 | |
| JP4045819B2 (ja) | 照明光学素子の検査装置、および照明光学素子の検査方法 | |
| WO2023204423A1 (ko) | 초점 거리 측정 장치 및 방법 | |
| JPH01242905A (ja) | 視覚装置における実寸法計測方法 |