JPH0521869Y2 - - Google Patents
Info
- Publication number
- JPH0521869Y2 JPH0521869Y2 JP16774387U JP16774387U JPH0521869Y2 JP H0521869 Y2 JPH0521869 Y2 JP H0521869Y2 JP 16774387 U JP16774387 U JP 16774387U JP 16774387 U JP16774387 U JP 16774387U JP H0521869 Y2 JPH0521869 Y2 JP H0521869Y2
- Authority
- JP
- Japan
- Prior art keywords
- outer cylinder
- exhaust
- exhaust port
- exhaust pipe
- dilution chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010790 dilution Methods 0.000 claims description 20
- 239000012895 dilution Substances 0.000 claims description 20
- 238000004140 cleaning Methods 0.000 claims description 16
- 238000003780 insertion Methods 0.000 claims description 12
- 230000037431 insertion Effects 0.000 claims description 12
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 21
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16774387U JPH0521869Y2 (https=) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16774387U JPH0521869Y2 (https=) | 1987-10-30 | 1987-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0171435U JPH0171435U (https=) | 1989-05-12 |
| JPH0521869Y2 true JPH0521869Y2 (https=) | 1993-06-04 |
Family
ID=31456312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16774387U Expired - Lifetime JPH0521869Y2 (https=) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521869Y2 (https=) |
-
1987
- 1987-10-30 JP JP16774387U patent/JPH0521869Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0171435U (https=) | 1989-05-12 |
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