JPH0171435U - - Google Patents
Info
- Publication number
- JPH0171435U JPH0171435U JP1987167743U JP16774387U JPH0171435U JP H0171435 U JPH0171435 U JP H0171435U JP 1987167743 U JP1987167743 U JP 1987167743U JP 16774387 U JP16774387 U JP 16774387U JP H0171435 U JPH0171435 U JP H0171435U
- Authority
- JP
- Japan
- Prior art keywords
- outer cylinder
- exhaust pipe
- exhaust
- exhaust port
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010790 dilution Methods 0.000 claims description 4
- 239000012895 dilution Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16774387U JPH0521869Y2 (https=) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16774387U JPH0521869Y2 (https=) | 1987-10-30 | 1987-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0171435U true JPH0171435U (https=) | 1989-05-12 |
| JPH0521869Y2 JPH0521869Y2 (https=) | 1993-06-04 |
Family
ID=31456312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16774387U Expired - Lifetime JPH0521869Y2 (https=) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521869Y2 (https=) |
-
1987
- 1987-10-30 JP JP16774387U patent/JPH0521869Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521869Y2 (https=) | 1993-06-04 |
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