JPH0521863Y2 - - Google Patents

Info

Publication number
JPH0521863Y2
JPH0521863Y2 JP1521587U JP1521587U JPH0521863Y2 JP H0521863 Y2 JPH0521863 Y2 JP H0521863Y2 JP 1521587 U JP1521587 U JP 1521587U JP 1521587 U JP1521587 U JP 1521587U JP H0521863 Y2 JPH0521863 Y2 JP H0521863Y2
Authority
JP
Japan
Prior art keywords
coating
center
semiconductor wafer
detectors
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1521587U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63124737U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1521587U priority Critical patent/JPH0521863Y2/ja
Publication of JPS63124737U publication Critical patent/JPS63124737U/ja
Application granted granted Critical
Publication of JPH0521863Y2 publication Critical patent/JPH0521863Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1521587U 1987-02-04 1987-02-04 Expired - Lifetime JPH0521863Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1521587U JPH0521863Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1521587U JPH0521863Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Publications (2)

Publication Number Publication Date
JPS63124737U JPS63124737U (enrdf_load_stackoverflow) 1988-08-15
JPH0521863Y2 true JPH0521863Y2 (enrdf_load_stackoverflow) 1993-06-04

Family

ID=30805941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1521587U Expired - Lifetime JPH0521863Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Country Status (1)

Country Link
JP (1) JPH0521863Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63124737U (enrdf_load_stackoverflow) 1988-08-15

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